Gas injector particle removal process and apparatus

Patent metadata

Field	Value
Publication number	US-9390895-B2
Application number	US-201313929890-A
Country	US
Kind code	B2
Filing date	Jun 28, 2013
Priority date	Jun 28, 2013
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

A sonic cleaning tool having a component retaining fixture, a sonic bath, and a cleaning fluid circulating system. The sonic bath has a sound field transducer and is structurally configured to place the component retaining fixture in sonic communication with the sound field transducer within the sonic bath. The component retaining fixture comprises a first end plate, a second end plate, a first component securing member, a second component securing member, and a plurality of compression studs. The first component securing member projects from the first end plate and is structurally configured for repeatable transition between a retracted position and an extended position. The second component securing member projects from the second end plate. The compression studs of the component retaining fixture span from the first end plate to the second end plate and are spaced to form a plurality of sonic transmission windows between the compression studs. The sonic transmission windows collectively place a majority of a component disposed in the component retaining fixture in substantially unobstructed sonic communication with the sound field transducer of the sonic bath. The cleaning fluid circulating system has a cleaning fluid, a cleaning fluid supply reservoir, a deionized water supply, and a compressed dry air supply, which are fluidly connected to the component retaining fixture.

First claim

What is claimed is:

1. A sonic cleaning tool comprising a component retaining fixture, a sonic bath, and a cleaning fluid circulating system, wherein:
the sonic bath comprises a sound field transducer and is structurally configured to place the component retaining fixture in sonic communication with the sound field transducer within the sonic bath;
the component retaining fixture comprises a first end plate, a second end plate, a first component securing member, a second component securing member, and a plurality of compression studs;
the first component securing member of the component retaining fixture projects from the first end plate and comprises an advancing shaft, a component engaging saddle and a cleaning fluid delivery channel extending through the advancing shaft and the component engaging saddle;
the advancing shaft of the first component securing member is structurally configured for repeatable transition between a retracted position and an extended position;
the second component securing member of the component retaining fixture projects from the second end plate and comprises a cleaning fluid outlet channel;
the compression studs of the component retaining fixture span from the first end plate of the component retaining fixture to the second end plate of the component retaining fixture;
the compression studs of the component retaining fixture are spaced to form a plurality of sonic transmission windows between the compression studs;
the sonic transmission windows collectively place a majority of a component disposed in the component retaining fixture in substantially unobstructed sonic communication with the sound field transducer of the sonic bath;
the cleaning fluid circulating system comprises a cleaning fluid, a cleaning fluid supply reservoir, a deionized water supply, and a compressed dry air supply; and
the cleaning fluid supply reservoir, the deionized water supply, and the dry compressed air supply are fluidly connected to the cleaning fluid delivery channel.

2. The sonic cleaning tool of claim 1 , wherein the advancing shaft is substantially configured to be threadably advanced from the retracted position to the extended position.

3. The sonic cleaning tool of claim 1 , wherein the first component securing member further comprises a securing member washer disposed between the advancing shaft and the component engaging saddle.

4. The sonic cleaning tool of claim 1 , wherein:
the plurality of compression studs each comprise a threaded portion and a tightening knob disposed on at least one end of the compression studs; and
the compression studs pass through apertures disposed in the first end plate and the second end plate.

5. The sonic cleaning tool of claim 1 , wherein
the plurality of compression studs comprise a flange on a first end of the compression studs and a threaded portion and a tightening knob on a second end of the compression studs;
the compression studs pass through apertures disposed in the first end plate and the second end plate; and
at least one of the first end plate and the second end plate comprise recessed portions substantially matching the geometry of the flange and in alignment with the apertures.

6. The sonic cleaning tool of claim 1 , wherein:
the first end plate and the second end plate each comprise a substantially triangular geometry having three exterior faces; and
the component retaining fixture comprises three compression studs arranged at respective apexes of an equilateral triangle.

7. The sonic cleaning tool of claim 6 , wherein each of the three faces of at least the first end plate or the second end plate comprise a different marking.

8. The sonic cleaning tool of claim 1 , wherein the component is a ceramic gas injector.

9. The sonic cleaning tool of claim 1 , wherein the cleaning fluid circulating system further comprises a thermal control unit to adjust the temperature of the cleaning fluid.

10. The sonic cleaning tool of claim 1 , wherein the sonic bath further comprises an inner liner tank disposed within an outer sonic tank.

11. The sonic cleaning tool of claim 1 , wherein the cleaning fluid is pH controlled to lower the zeta potential of particles attached to interior surfaces of the component.

12. The sonic cleaning tool of claim 1 , wherein the cleaning fluid comprises at least one surfactant.

13. The sonic cleaning tool of claim 10 , wherein the inner liner tank is sized to fully submerge a component disposed in the component retaining fixture when the component retaining fixture is placed in the inner liner tank.

14. The sonic cleaning tool of claim 1 , wherein the sonic transmission windows transmit 5 to 25 W/in 2 of acoustic energy from the sound field transducer.

15. The sonic cleaning tool of claim 1 , wherein a component disposed in the component retaining fixture floats against resilient sealing members between the first component securing member and the second component securing member.

16. A component retaining fixture comprising a first end plate, a second end plate, a first component securing member, a second component securing member, and a plurality of compression studs, wherein:
the first component securing member of the component retaining fixture projects from the first end plate and comprises an advancing shaft, a component engaging saddle and a cleaning fluid delivery channel extending through the advancing shaft and the component engaging saddle;
the advancing shaft of the first component securing member is structurally configured for repeatable transition between a retracted position and an extended position;
the advancing shaft of the first component securing member is structurally configured to be threadably advanced from the retracted position to the extended position;
the second component securing member of the component retaining fixture projects from the second end plate and comprises a cleaning fluid outlet channel;
the compression studs of the component retaining fixture span from the first end plate of the component retaining fixture to the second end plate of the component retaining fixture;
the compression studs of the component retaining fixture pass through apertures disposed in the first end plate and the second end plate;
the compression studs of the component retaining fixture comprise a tightening knob on a second end of the compression studs;
the compression studs of the component retaining fixture are spaced to form a plurality of sonic transmission windows between the compression studs; and
the sonic transmission windows collectively place a majority of a component disposed in the component retaining fixture in substantially unobstructed sonic communication with a sound field transducer.

17. The component retaining fixture of claim 16 , wherein the plurality of compression studs are configured to prevent rotation relative to at least one of the first end plate and the second end plate.

18. The component retaining fixture of claim 17 , wherein the compression studs of the component retaining fixture comprise a non-circular flange on a first end of the compression studs and at least one of the first end plate and the second end plate comprise recessed portions substantially matching the geometry of the non-circular flange and in alignment with the apertures.

19. An ultrasonic cleaning tool comprising a component retaining fixture, a sonic bath, and a cleaning fluid circulating system, wherein:
the sonic bath comprises a sound field transducer and is structurally configured to place the component retai

Assignees

• Lam Res Corp

Inventors

• Lacroix Cliff
• Avoyan Armen

Classifications

• C11D11/007

  Chemistry & Metallurgy · mapped topic

• C11D11/0041

  Chemistry & Metallurgy · mapped topic

• H01J37/32862 Primary

  In situ cleaning of vessels and/or internal parts · CPC title

• B08B3/10

  with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title

• B08B3/12 Primary

  by sonic or ultrasonic vibrations · CPC title