Resist composition and pattern forming process
US-2024377730-A1 · Nov 14, 2024 · US
US9389503B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9389503-B2 |
| Application number | US-201514706564-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 7, 2015 |
| Priority date | Nov 12, 2012 |
| Publication date | Jul 12, 2016 |
| Grant date | Jul 12, 2016 |
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A manufacturing method of a conductive sheet includes: a step A of forming a silver halide-containing photosensitive layer, which contains silver halide, gelatin, and a polymer different from the gelatin and in which a mass ratio (Y/X) of a mass Y of the polymer to a mass X of the gelatin is equal to or greater than 0.1, on a support; a step B of forming conductive portions containing metal silver by performing exposure and then development treatment on the silver halide-containing photosensitive layer; and a step C of treating the support having the conductive portions with an oxidant which has a standard electrode potential of equal to or greater than +1.5 V and decomposes the gelatin.
Opening claim text (preview).
What is claimed is: 1. A manufacturing method of a conductive sheet, comprising: a step A of forming a silver halide-containing photosensitive layer, which contains silver halide, gelatin, and a polymer different from the gelatin and in which a mass ratio (Y/X) of a mass Y of the polymer to a mass X of the gelatin is equal to or greater than 0.1, on a support; a step B of forming conductive portions containing metal silver by performing exposure and then development treatment on the silver halide-containing photosensitive layer; and a step C of treating the support having the conductive portions with an oxidant which has a standard electrode potential of equal to or greater than +1.5 V and decomposes the gelatin. 2. The manufacturing method of a conductive sheet according to claim 1 , wherein the oxidant is aqueous hydrogen peroxide or sodium hypochlorite. 3. The manufacturing method of a conductive sheet according to claim 1 , wherein the silver halide-containing photosensitive layer further contains a crosslinking agent cross-linking the polymers to each other. 4. The manufacturing method of a conductive sheet according to claim 1 , wherein the support is a treated support having undergone at least one type of treatment selected from the group consisting of atmospheric pressure plasma treatment, corona discharge treatment, and ultraviolet irradiation treatment. 5. The manufacturing method of a conductive sheet according to claim 1 , wherein the support has an undercoat layer, which contains a polymer different from the gelatin, on the surface thereof. 6. The manufacturing method of a conductive sheet according to claim 1 , further comprising, before the step A, a step of forming a silver halide-free layer, which contains gelatin and a polymer different from the gelatin, on the support. 7. The manufacturing method of a conductive sheet according to claim 1 , further comprising, between the step A and the step B, a step of forming a protective layer, which contains gelatin and a polymer different from the gelatin, on the silver halide-containing photosensitive layer. 8. The manufacturing method of a conductive sheet according to claim 7 , wherein a mass ratio (the mass of the polymer/the mass of the gelatin) of the polymer to the gelatin in the protective layer is greater than 0 and equal to or less than 1.0. 9. The manufacturing method of a conductive sheet according to claim 1 , further comprising, between the step B and the step C and/or after the step C, a step of performing reduction treatment by treating the support having the conductive portions with a reducing aqueous solution. 10. The manufacturing method of a conductive sheet according to claim 1 , further comprising, between the step B and the step C and/or after the step C, a step of irradiating the conductive portions with pulsed light from a xenon flash lamp. 11. The manufacturing method of a conductive sheet according to claim 10 , wherein when the conductive portions are irradiated with the pulsed light from the xenon flash lamp, the irradiation energy per pulse is equal to or less than 1,500 J, and the number of times the pulsed light is radiated is equal to or less than 2,000. 12. The manufacturing method of a conductive sheet according to claim 1 , further comprising, between the step B and the step C and/or after the step C, a step of performing smoothing treatment on the conductive portions. 13. The manufacturing method of a conductive sheet according to claim 12 , wherein the smoothing treatment is calender treatment in which the support having the conductive portions is passed through at least a pair of rolls under a condition of a linear pressure of 20 kgf/cm to 700 kgf/cm. 14. The manufacturing method of a conductive sheet according to claim 13 , wherein a surface roughness Ra of the rolls is 0 μm to 2.0 μm. 15. The manufacturing method of a conductive sheet according to claim 1 , further comprising, between the step B and the step C and/or after the step C, a step of performing heating treatment on the support having the conductive portions. 16. The manufacturing method of a conductive sheet according to claim 15 , wherein the heating treatment is treatment for bringing the support having the conductive portions into contact with superheated vapor. 17. The manufacturing method of a conductive sheet according to claim 15 , wherein the heating treatment is heating treatment performed at 80° C. to 150° C. 18. The manufacturing method of a conductive sheet according to claim 1 , further comprising, after the step C, a step of bringing the support having the conductive portions into contact with a migration inhibitor. 19. The manufacturing method of a conductive sheet according to claim 1 , further comprising, after the step C, a step of bringing the support having the conductive portions into contact with an organic solvent. 20. The manufacturing method of a conductive sheet according to claim 19 , wherein the organic solvent is a solvent dissolving the polymer. 21. The manufacturing method of a conductive sheet according to claim 19 , wherein the organic solvent is an organic solvent having an SP value within a range of 8.0 to 12.0. 22. A conductive sheet comprising: a support; conductive portions which are disposed on the support and contain metal silver and a resin binder; and resin binder portions each of which is present between the conductive portions, wherein each of the conductive portions has a lower layer not containing metal silver, an intermediate layer containing metal silver, and an upper layer not containing metal silver in this order, an average thickness of the upper layer is equal to or less than 0.40 μm, and a hydrophobization rate A determined by the following hydrophobization rate A-measuring method is equal to or greater than 90, (hydrophobization rate A-measuring method: 5 conductive sheets are prepared and dried for 24 hours at 110° C.; a mass X of each of the obtained conductive sheets is measured; the obtained conductive sheets are dipped into a sodium hypochlorite solution (25° C.) having an effective chlorine concentration of 5% for 10 minutes and then subjected to washing treatment (for 5 minutes) using water (20° C.); the obtained conductive sheets are dried for 24 hours at 110° C.; a mass Y of each of the obtained conductive sheets is measured; a hydrophobization rate A1 of each of the conductive sheets is calculated by using the following Equation (A); and the arithmetic mean of the values of the hydrophobization rate A1 of the 5 conductive sheets is calculated and taken as the hydrophobizing rate A, and in the Equation (A), a mass Z represents the mass of the support; Hydrophobization rate A 1=[mass Y −mass Z ]/[mass X −mass Z ]×100). Equation (A): 23. The conductive sheet according to claim 22 , wherein a hydrophobization rate B determined by the following hydrophobization rate B-measuring method is equal to or greater than 90, (hydrophobization rate B-measuring method: 5 conductive sheets are prepared and dried for 24 hours at 110° C.; a mass M of each of the obtained conductive sheets is measured; the obtained conductive sheets are dipped into hot water (70° C.) for 1 hour and then dried for 24 hours at 110° C.; a mass N of each of the obtained conductive sheets is measured; a hydrophobization rate B1 of the each of the conductive sheets is calculated by using the following Equation (B); and the arithmet
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