Acceleration sensor

Patent metadata

Field	Value
Publication number	US-9389241-B2
Application number	US-201313899204-A
Country	US
Kind code	B2
Filing date	May 21, 2013
Priority date	May 31, 2012
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof.

First claim

What is claimed is:

1. An acceleration sensor, comprising:
a mass body;
a fixing part disposed so as to be spaced from the mass body;
a first flexible part connecting both sides of the mass body with the fixing part to each other in an Y-axis direction;
a second flexible part connecting one side or both sides of the mass body with the fixing part to each other in an X-axis direction;
a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part so as to connect the mass body with the fixing part; and
a wiring passing through the membrane;
wherein a width in the X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof,
wherein the second flexible part has a thickness in a Z-axis direction larger than the width in the Y-axis direction,
wherein the mass body rotates based on an X-axis,
wherein a bending stress is generated at the first flexible part and a torsion stress is generated at the second flexible part,
wherein the second flexible part is disposed over a center of gravity of the mass body based on the Z-axis direction,
wherein the second flexible part is disposed at a position corresponding to a center of gravity of the mass body based on the X-axis direction, and
wherein the membrane is configured to prevent the wiring from overlapping a stress concentration area located where the membrane is disposed over the second flexible part.

2. The sensor as set forth in claim 1 , further comprising: a sensing unit disposed in the first flexible part to sense a displacement of the mass body.

3. The sensor as set forth in claim 2 , wherein the sensing unit includes:
a piezoelectric material or a piezo-resistor; and
an electrode formed in the piezoelectric material or the piezo-resistor.

4. The sensor as set forth in claim 3 , further comprising:
a wiring extending to the fixing part from the electrode through the membrane.

5. The sensor as set forth in claim 3 , wherein the electrode includes:
a first electrode; and
a second electrode formed to be closer to the mass body than the first electrode, and
wherein the sensor further comprising:
a first wiring extending to the fixing part from the first electrode; and
a second wiring extending to the fixing part from the second electrode through the membrane.

6. The sensor as set forth in claim 1 , wherein when being viewed from an XY plane, the wiring is formed so as not to overlap the second flexible part.

7. The sensor as set forth in claim 1 , wherein a portion at which the membrane is connected to the mass body or the fixing part is subjected to rounding processing.

Assignees

• Samsung Electro Mech

Inventors

• Kim Jong Woon
• Lim Jun
• Lim Seung Mo
• Kim Sang Jin

Classifications

• G01P2015/084

  the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass · CPC title

• G01C19/00

  Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects · CPC title

• G01C19/56 Primary

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• G01P3/44 Primary

  for measuring angular speed (G01P3/56 takes precedence) · CPC title

• G01P15/123

  by piezo-resistive elements, e.g. semiconductor strain gauges · CPC title