Optomechanical disk vibratory gyroscopes

Patent metadata

Field	Value
Publication number	US-9389079-B2
Application number	US-201514627485-A
Country	US
Kind code	B2
Filing date	Feb 20, 2015
Priority date	Feb 21, 2014
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

An integrated optomechanical disk vibratory gyroscope device includes a mechanical oscillator having a substantially circular structure. The substantially circular structure is supported by a pillar, and mechanically isolated from a surrounding structure by a gap or slot. One or more actuators are coupled to the mechanical oscillator across the gap or slot. Each of the one or more actuators is configured to excite the mechanical oscillator in a driving mode. One or more optomechanical cavities are disposed substantially in a plane defined by the mechanical oscillator. At least one component of the one or more optomechanical cavities is disposed on or in the substantially circular structure. Each of the at least one or more optomechanical cavities configured to measure a displacement of the mechanical oscillator in a sensing mode. A method of manufacture is also described.

First claim

What is claimed is:

1. An integrated optomechanical disk vibratory gyroscope device comprising:
a mechanical oscillator comprising a substantially circular structure, said substantially circular structure mechanically coupled to and supported by a pillar, and mechanically isolated from a surrounding structure by a gap or slot;
one or more actuators disposed in said surrounding structure adjacent to and electro-mechanically or opto-mechanically coupled to said mechanical oscillator across said gap or slot, each of said one or more actuators configured to excite said mechanical oscillator in a driving mode; and
one or more optomechanical cavities disposed substantially in a plane defined by said mechanical oscillator and radially offset about said substantially circular structure from said one or more actuators, at least one component of said one or more optomechanical cavities disposed on or in said substantially circular structure, each of said at least one or more optomechanical cavities configured to measure a displacement of said mechanical oscillator in a sensing mode.

2. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein said mechanical oscillator comprises a disk structure.

3. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein said mechanical oscillator comprises a ring or wheel structure.

4. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein said mechanical oscillator comprises a hat structure.

5. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein said mechanical oscillator comprises a mushroom or wine-glass structure.

6. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein said one or more actuators comprise electrical driving electrodes.

7. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein said one or more actuators comprise optical displacement actuators.

8. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein at least one of said one or more optomechanical cavities comprises a slotted photonic-crystal cavity, a first side of each of said slotted photonic-crystal cavities mechanically coupled to said mechanical oscillator, and a second side of each of said slotted photonic-crystal cavities mechanically grounded.

9. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein at least one of said at least one or more optomechanical cavities comprises a coupled photonic-crystal nanobeam, a first beam of said coupled photonic-crystal nanobeam mechanically coupled to said mechanical oscillator, and a second beam of said coupled photonic-crystal nanobeam mechanically grounded.

10. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein at least one of said one or more optomechanical cavities further comprises optical strip waveguides, each of said optical strip waveguides comprising a bend configured to route optical signals to and from said integrated optomechanical disk vibratory gyroscope.

11. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein at least one of said one or more optomechanical cavities comprises a Fabry-Perot optomechanical cavity having a first mirror coupled to said mechanical oscillator, and a second minor mechanically grounded.

12. The integrated optomechanical disk vibratory gyroscope device of claim 11 , wherein one or more optical strip waveguides are butt coupled to a short photonic-crystal waveguide.

13. The integrated optomechanical disk vibratory gyroscope device of claim 11 , further comprising a grating coupler or a mode-converter configured to couple light to or from an off-chip optical fiber.

14. The integrated optomechanical disk vibratory gyroscope device of claim 1 , wherein at least a selected one of: a frequency of said one or more optomechanical cavities, and a bandwidth of said one or more optomechanical cavities is tuned by use of an optical spring effect.

15. A method for operating an integrated optomechanical disk vibratory gyroscope device comprising the steps of:
providing an integrated optomechanical disk vibratory gyroscope device comprising: a mechanical oscillator comprising a substantially circular structure, said substantially circular structure mechanically coupled to and supported by a pillar, and mechanically isolated from a surrounding structure by a gap or slot, one or more actuators disposed in said surrounding structure adjacent to and electro-mechanically or opto-mechanically coupled to said mechanical oscillator across said gap or slot, each of said one or more actuators configured to excite said mechanical oscillator in a driving mode, and one or more optomechanical cavities disposed substantially in a plane defined by said mechanical oscillator and radially offset about said substantially circular structure from said one or more actuators, at least one component of said one or more optomechanical cavities disposed on or in said substantially circular structure, each of said at least one or more optomechanical cavities configured to measure a displacement of said mechanical oscillator in a sensing mode;
displacing said mechanical oscillator by an electromechanical or optomechanical stimulus applied to a displacement actuator comprising said one or more actuators; and
sensing a displacement of said mechanical oscillator responsive by a plurality of displacement sensors comprising said one or more optomechanical cavities.

16. The method of claim 15 , wherein said step of displacing said mechanical oscillator comprises displacing said mechanical oscillator by an electromechanical stimulus applied by capacitively coupled electrodes driven by an electrical potential.

17. The method of claim 15 , wherein said step of displacing said mechanical oscillator comprises displacing said mechanical oscillator by an optomechanical stimulus applied to said displacement actuator comprising said one or more actuators wherein an optical gradient force is generated by pumping said optomechanical cavity with an optical wave and said mechanical oscillator is driven by modulating a pump amplitude at a mechanical resonance frequency.

Assignees

• Lee Jonathan Y
• Lin Qiang
• Painter Oskar J
• Univ Rochester
• California Inst Of Techn

Inventors

• Lee Jonathan Y
• Lin Qiang
• Painter Oskar J

Classifications

• G01C19/661 Primary

  details · CPC title

• G01C19/5691 Primary

  of essentially three-dimensional [3D] vibrators, e.g. wine glass-type vibrators · CPC title