Position-measuring device and system having such a position-measuring device

Patent metadata

Field	Value
Publication number	US-9389065-B2
Application number	US-201313845988-A
Country	US
Kind code	B2
Filing date	Mar 18, 2013
Priority date	Mar 22, 2012
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

A position-measuring device, as well as a system having such a position-measuring device, is used for determining the position of a first object relative to a second object, the first and the second object being movable relative to one another along at least two measuring directions. The position-measuring device has an optical unit that is linked to one of the two objects and includes at least one light source, a detector system, as well as further optical elements in a defined configuration. In addition, the position-measuring device includes a measuring standard-reflector unit, which is provided on the other object, and has at least two differently formed regions in one track that are optically scannable by the optical unit for position sensing. The different formation of the regions makes switching among the various measuring directions possible during position sensing, and positional signals can be generated by the optical unit relative to the relative movement of the two objects for each measuring direction.

First claim

What is claimed is:

1. A position-measuring device for measuring a position of a first object relative to a second object, the first object and the second object being movable relative to one another along at least two measuring directions, comprising:
an optical unit attachable to one of the objects and including at least one light source, a detector system, and further optical elements in a defined configuration; and
a measuring standard-reflector unit attachable to the other object and including at least two differently formed regions in one track that are optically scannable by the optical unit for position sensing;
wherein the different formation of the regions provide for switching among the measuring directions during position sensing; and
wherein the optical unit is adapted to generate positional signals in accordance with relative movement of the two objects for each measuring direction.

2. The position-measuring device according to claim 1 , wherein measuring reflectors and measuring standards are provided in the regions of the track of the measuring standard-reflector unit.

3. The position-measuring device according to claim 2 , wherein the measuring reflectors include plane mirrors, and the measuring standards include incident-light diffraction gratings.

4. The position-measuring device according to claim 2 , wherein the differently formed regions are adapted to subject ray bundles, that strike the differently formed regions, to different deflection effects.

5. The position-measuring device according to claim 1 , wherein the measuring standard-reflector unit includes a plurality of parallel tracks, in which measuring standards and/or measuring reflectors are provided.

6. The position-measuring device according to claim 5 , wherein a first measuring standard is arranged in a first track, a measuring reflector is arranged in a second track, and a second measuring standard is arranged in a second region, the first measuring standard being identical to the second measuring standard.

7. The position-measuring device according to claim 1 , wherein a central first region is arranged in the track along a longitudinal direction of the track, and a differently configured second region is arranged in the track at least at one end of the first region.

8. The position-measuring device according to claim 1 , wherein a first region is arranged in the track and a second region is arranged in the track, the first region extend over a greater part of the track than the second region.

9. A system, comprising:
a first object movable along two orthogonal, first and second principal axes of motion and along a third axis, the first principal axis of motion corresponding to a first measuring direction, the third axis corresponding to a second measuring direction, and the second principal axis of motion corresponding to a third measuring direction;
a stationary second object; and
a first position-measuring device adapted to measure a position of the first object relative to the second object, the position-measuring device including:
an optical unit attached to the second object and including at least one light source, a detector system, and further optical elements in a defined configuration; and
a measuring standard-reflector unit attached to the first object and including at least two differently formed regions in one track that are optically scannable by the optical unit for position sensing;

wherein the different formation of the regions provide for switching among the measuring directions during position sensing;
wherein the optical unit is adapted to generate positional signals in accordance with relative movement of the two objects for each measuring direction; and
wherein the measuring standard-reflector unit extends along the second principal axis of motion and includes a track having a first region including a measuring reflector and a second region having a measuring standard, so that, in accordance with optical scanning of the first region, positional signals indicative of movement along the first measuring direction of the first object are generated, and, upon optical scanning of the second region, further positional signals indicative of movement of the first object along the second measuring direction or along the third measuring direction are generated.

10. The system according to claim 9 , further comprising a second position-measuring device adapted to generate positional signals indicative of movement of the first object along the second measuring direction.

11. The system according to claim 9 , further comprising a third position-measuring device adapted to generate positional signals indicative of movement of the first object along the third measuring direction.

12. The system according to claim 10 , wherein, upon optical scanning of the measuring standard in the second region and simultaneous generation of positional signals by the second position-measuring device during a traverse movement along the first measuring direction, a reflector of the second position-measuring device scanned twice along the first measuring direction.

13. The system according to claim 11 , wherein, upon optical scanning of the measuring standard in the second region and simultaneous generation of positional signals by the third position-measuring device during a traverse movement along the first measuring direction, a reflector of the third position-measuring device scanned twice along the first measuring direction.

14. The system according to claim 12 , wherein the positional signals of the first and second position-measuring devices are transmittable to a calibration unit.

15. The system according to claim 13 , wherein the positional signals of the first and third position-measuring devices are transmissible to a calibration unit.

16. The system according to claim 9 , wherein the first position-measuring device is arranged as a multi-axis interferometer having four measurement beams.

Assignees

• Heidenhain Gmbh Dr Johannes

Inventors

• Holzapfel Wolfgang
• Drescher Joerg
• Meissner Markus
• Joerger Ralph
• Musch Bernhard
• Kaelberer Thomas

Classifications

• H10P74/00

  Testing or measuring during manufacture or treatment of wafers, substrates or devices · CPC title

• G01D5/34715

  Scale reading or illumination devices · CPC title

• G01D5/34746 Primary

  Linear encoders · CPC title

• G01B11/14 Primary

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• G01B11/26

  for measuring angles or tapers; for testing the alignment of axes · CPC title