Fabricating method of carbon nanotube-based field effect transistor and carbon nanotube-based field effect transistor fabricated thereby
US-8999820-B2 · Apr 7, 2015 · US
US9388513B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9388513-B2 |
| Application number | US-201213538326-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 29, 2012 |
| Priority date | Jul 1, 2011 |
| Publication date | Jul 12, 2016 |
| Grant date | Jul 12, 2016 |
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A thermal and electrical conducting apparatus includes a few-layer graphene film having a thickness D where D≦1.5 nm and a plurality of carbon nanotubes crystallographically aligned with the few-layer graphene film.
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What is claimed: 1. A thermal and electrical conducting apparatus, comprising: a few layer graphene film having a thickness of 6 atomic layers or less; a substrate supporting the few layer graphene film; and a plurality of carbon nanotubes crystallographically aligned with said few-layer graphene film along armchair directions of the few layer graphene lattice, wherein said plurality of carbon nanotubes further comprises out of plane growth perpendicular to the few layer graphene film. 2. The apparatus of claim 1 , wherein said substrate is made from an insulator. 3. The apparatus of claim 1 , wherein said substrate is made from metal. 4. The apparatus of claim 1 , wherein said substrate is made from a material selected from a group consisting of SiO 2 , Al 2 O 3 , Si 3 N 4 , BN, HfSiO 4 , ZrSiO 4 , HfO 2 , ZrO 2 and mixtures thereof. 5. The apparatus of claim 1 , wherein said substrate is made from a material selected from a group consisting of Ni, Cu, Pt, Au, Co, Fe and mixtures thereof. 6. The apparatus of claim 1 , wherein said few-layer graphene film has a thickness D, where D≦1.0 nm. 7. The apparatus of claim 1 , wherein said carbon nanotubes demonstrate three distinct histogram peaks at angles of −60°, about 0° and about +60° in relation to any of the peaks.
by thermal decomposition of hydrocarbon gases or vapours {or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols} · CPC title
Manufacture or treatment of nanostructures · CPC title
Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title
Chemistry & Metallurgy · mapped topic
Preparation · CPC title
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