Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Patent metadata

Field	Value
Publication number	US-9388488-B2
Application number	US-201113015357-A
Country	US
Kind code	B2
Filing date	Jan 27, 2011
Priority date	Oct 22, 2010
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

An organic film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet spaced apart from the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction; a first blocking member between the substrate and the deposition source and movable together with the substrate to be positioned to screen at least a part of the substrate; and a second blocking member between the first blocking member and the substrate and fixedly held relative to the deposition source, wherein the substrate is spaced apart from the organic film deposition apparatus and at least one of the substrate or the organic film deposition apparatus moves relative to the other.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display device by using an organic film deposition apparatus for forming an organic film on a substrate, the method comprising:
arranging the substrate to be spaced apart from the organic film deposition apparatus; and
depositing a deposition material discharged from the organic film deposition apparatus on the substrate while moving the substrate relative to the organic film deposition apparatus,
wherein the depositing of the deposition material on the substrate further comprises:
placing a second blocking member in a fixed position;
moving a first blocking member together with a first non-deposition region of the substrate while the deposition material is deposited on the substrate;
moving the first blocking member back to an original position; and
moving the first blocking member together with a second non-deposition region of the substrate while the deposition material is deposited on the substrate, and

wherein in the moving of the first blocking member back to the original position, the first blocking member is moved at a higher speed than the substrate.

2. A method of manufacturing an organic light-emitting display device by using an organic film deposition apparatus for forming an organic film on a substrate, the method comprising:
arranging the substrate to be spaced apart from the organic film deposition apparatus; and
depositing a deposition material discharged from a deposition source nozzle unit of the organic film deposition apparatus on the substrate while moving the substrate relative to the organic film deposition apparatus, wherein the depositing of the deposition material on the substrate comprises:
placing a second blocking member in a fixed position with respect to the organic film deposition apparatus, and such that the second blocking member blocks the deposition material that is discharged from the deposition source nozzle unit from reaching a region of the substrate;
moving a first blocking member together with a first non-deposition region of the substrate while the deposition material is deposited on the substrate;
moving the first blocking member back to an original position to change a location of the first blocking member with respect to the substrate; and
moving the first blocking member together with a second non-deposition region of the substrate while the deposition material is deposited on the substrate;
wherein depositing the deposition material on the substrate further comprises discharging the deposition material from the deposition source nozzle unit through a patterning slit sheet,
wherein the deposition source nozzle unit comprises a plurality of deposition source nozzles arranged in a first direction located at a side of the deposition source,
wherein the patterning slit sheet comprises a plurality of patterning slits arranged in a second direction perpendicular to the first direction and is located opposite to the deposition source nozzle unit,
wherein the first blocking member is located between the substrate and the deposition source, and
wherein the fixed position of the second blocking member is between the first blocking member and the substrate.

3. The method of claim 2 , wherein the patterning slit sheet is smaller than the substrate.

Assignees

• Lee Yun-Mi
• Park Hyun-Sook
• Kim Jong-Heon
• Chang Seok-Rak
• Samsung Display Co Ltd

Inventors

• Lee Yun-Mi
• Park Hyun-Sook
• Kim Jong-Heon
• Chang Seok-Rak

Classifications

• H10K71/441

  in the presence of solvent vapors, e.g. solvent vapour annealing · CPC title

• H01L51/0011

  Electricity · mapped topic

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• H01L51/56

  Electricity · mapped topic

• C23C14/042

  using masks · CPC title