Optical mask

Patent metadata

Field	Value
Publication number	US-9385347-B2
Application number	US-201514668587-A
Country	US
Kind code	B2
Filing date	Mar 25, 2015
Priority date	Sep 3, 2014
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

An optical mask includes a light-to-heat conversion layer with an improved temperature profile. The optical masks may comprise a light-transmitting base substrate; a first reflective pattern layer which is formed on the light-transmitting base substrate comprising a first opening portion transmitting light emitted from under the light-transmitting base substrate and a first reflective portion reflecting the light; a second reflective pattern layer which is formed over the first opening portion comprising a second opening portion overlapping a first area of the first opening portion and a second reflective portion overlapping a second area of the first opening portion; and a light-to-heat conversion pattern layer which is formed on the light-transmitting base substrate, being disposed in the first area of the first opening portion, absorbing at least a part of the light, and converting the light absorbed into heat.

First claim

What is claimed is:

1. An optical mask, comprising:
a light-transmitting base substrate;
a first reflective pattern layer which is formed on the light-transmitting base substrate comprising a first opening portion transmitting light emitted from under the light-transmitting base substrate and a first reflective portion reflecting the light;
a second reflective pattern layer which is formed over the first opening portion comprising a second opening portion overlapping a first area of the first opening portion and a second reflective portion overlapping a second area of the first opening portion excluding the first area; and
a light-to-heat conversion pattern layer which is formed on the light-transmitting base substrate, being disposed in the first area of the first opening portion, absorbing incident light, and converting the absorbed light into heat.

2. The optical mask of claim 1 , wherein the second reflective portion is shaped like a curved surface extending in a downward direction from an end of the second opening portion to the first opening portion, and all or part of light incident upon the curved surface are reflected to an edge area of the light-to-heat conversion layer.

3. The optical mask of claim 2 , wherein the second reflective portion is shaped like a curved surface having a variable curvature.

4. The optical mask of claim 1 , wherein the second reflective portion extends to an area overlapping the first reflective portion.

5. The optical mask of claim 1 , further comprising a light-transmitting buffer layer which fills a space between the light-transmitting base substrate and the second reflective portion.

6. The optical mask of claim 1 , further comprising:
a light-transmitting buffer layer which is disposed between the first reflective pattern layer and the light-to-heat conversion pattern layer and covers the first reflective portion and the first opening portion.

7. The optical mask of claim 6 , wherein the second reflective portion is shaped like a curved surface extending in a downward direction from an end of the second opening portion to the first opening portion, and all or part of light incident upon the curved surface are reflected to an edge area of the light-to-heat conversion pattern layer.

8. The optical mask of claim 7 , wherein the second reflective portion is shaped like a curved surface having a variable curvature.

9. The optical mask of claim 6 , wherein the second reflective portion extends to an area overlapping the first reflective portion.

10. The optical mask of claim 6 , further comprising a light-transmitting buffer layer which fills a space between the light-transmitting base substrate and the second reflective portion.

11. The optical mask of claim 1 , wherein the second reflective portion is made of one material selected from the group consisting of aluminum (Al), gold (Au), silver (Ag), platinum (Pt), copper (Cu), an aluminum-containing alloy, a silver-containing alloy, and indium oxide-tin oxide.

12. An optical mask, comprising:
a light-transmitting base substrate;
a first reflective pattern layer which is formed on the light-transmitting base substrate comprising a first opening portion transmitting light emitted from under the light-transmitting base substrate and a first reflective portion reflecting the light;
a second reflective pattern layer which is comprised of a dome-structured second reflective portion formed over the first opening portion to cover the first opening portion; and
a light-to-heat conversion pattern layer which is formed on the light-transmitting base substrate, being disposed in a first area of the first opening portion, absorbing incident light, and converting the absorbed light into heat.

13. The optical mask of claim 12 , wherein the second reflective portion has a hemispherical dome structure, reflecting a part of the light incident upon a curved surface to the light-to-heat conversion pattern layer and transmitting a part of the light.

14. The optical mask of claim 12 , wherein the second reflective portion extends to an area overlapping the first reflective portion.

15. The optical mask of clam 12 , further comprising a light-transmitting buffer layer which fills a space between the light-transmitting base substrate and the second reflective portion.

16. The optical mask of claim 12 , further comprising a light-transmitting buffer layer which is disposed between the first reflective pattern layer and the light-to-heat conversion pattern layer and covers the first reflective portion and the first opening portion.

17. The optical mask of claim 16 , wherein the second reflective portion has a hemispherical dome structure, reflecting a part of the light incident upon the curved surface to the light-to-heat conversion pattern layer and transmitting a part of the light.

18. The optical mask of claim 17 , wherein the second reflective portion extends to an area overlapping the first reflective portion.

19. The optical mask of claim 17 , further comprising:
a light-transmitting buffer layer which fills a space between the light-transmitting base substrate and the second reflective portion.

20. The optical mask of claim 12 , wherein the second reflective portion is made of one material selected from the group consisting of aluminum (Al), gold (Au), silver (Ag), platinum (Pt), copper(Cu), an aluminum-containing alloy, a silver-containing alloy, and indium oxide-tin oxide.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Joon Gu
• Lee Yeon Hwa
• Choi Jin Baek
• Kwon Young Gil

Classifications

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/18 Primary

  using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet · CPC title

• C23C14/042

  using masks · CPC title

• B41M5/426

  characterised by inorganic compounds, e.g. metals, metal salts, metal complexes · CPC title

• B41M5/48

  combined with other image registration layers or compositions; Special originals for reproduction by thermography · CPC title