Overhead substrate handling and storage system

Patent metadata

Field	Value
Publication number	US-9385019-B2
Application number	US-201213529264-A
Country	US
Kind code	B2
Filing date	Jun 21, 2012
Priority date	Jun 21, 2012
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.

First claim

We claim:

1. A material handling system, comprising:
an overhead rack defining a plurality of storage positions, wherein the overhead rack defines at least one interior window devoid of storage locations and at least one periphery window along an edge of the overhead rack;
first and second side rails disposed above the overhead rack;
a first cross rail movably coupled to the first and second side rails to allow movement of the first cross rail in a first direction along the first and second side rails;
a first transport vehicle movably coupled to the first cross rail and operable to move in a second direction perpendicular to the first direction along the first cross rail and to descend below the overhead rack through the at least one interior window or the at least one periphery window;
a first tool disposed below the overhead rack and having a first load port accessible by the first transport vehicle through the at least one interior window; and
a second tool disposed below the overhead rack and having a second load port accessible by the first transport vehicle through the at least one periphery window.

2. The system of claim 1 , further comprising:
a first overhead rail disposed outside of said overhead rack parallel to said side first and second rails; and
a second transport vehicle movably coupled to said first overhead rail.

3. The system of claim 2 , further comprising a third tool having a third load port disposed below the overhead rack, wherein the second transport vehicle is operable to descend below the overhead rack to access the third load port.

4. The system of claim 2 , wherein an input/output port position is defined in the overhead rack, and the first and second transport vehicles are operable to access the input/output port position.

5. The system of claim 1 , wherein at least one of the first tool or the second tool comprises a cluster tool.

6. The system of claim 1 , wherein the first transport vehicle includes a rotatable hoist.

7. The system of claim 1 , further comprising:
a first overhead rail disposed along a first edge of said overhead rack parallel to said side first and second rails;
a second transport vehicle movably coupled to said first overhead rail;
a second overhead rail disposed along a second edge of said overhead rack parallel to said side first and second rails;
a third transport vehicle movably coupled to said second overhead rail;
a first input/output port position defined in the overhead rack along the first edge and accessible by the second transport vehicle; and
a second input/output port position defined in the overhead rack along the second edge and accessible by the third transport vehicle.

8. The system of claim 7 , further comprising:
a second cross rail movably coupled to the first and second side rails; and
a fourth transport vehicle movably coupled to the second cross rail.

9. The system of claim 8 , wherein the second cross rail is operable to push the first cross rail along the first and second side rails.

10. The system of claim 1 , further comprising a purge nest disposed on the overhead rack and having at least one gas port operable to engage a pod supported by the overhead rack.

11. The system of claim 10 , wherein the gas port comprises a purge gas supply port.

12. The system of claim 11 , wherein the purge nest further comprises a second gas port operable to engage the pod, wherein the second gas port comprises a vacuum port.

13. A material handling system, comprising:
an overhead rack defining a plurality of storage positions, wherein the overhead rack defines at least one interior window devoid of storage locations and at least one periphery window along an edge of the overhead rack;
first and second side rails disposed above the overhead rack;
a first cross rail movably coupled to the first and second side rails to allow movement of the first cross rail in a first direction along the first and second side rails;
a first transport vehicle movably coupled to the first cross rail and operable to move in a second direction perpendicular to the first direction along the first cross rail, wherein, at a first position of the first cross rail and the first transport vehicle, the first transport vehicle is operable to descend below the overhead rack through the at least one interior window and, at a second position of the first cross rail and the first transport vehicle, the first transport vehicle is operable to descend below the overhead rack through the at least one periphery window;
a first tool disposed below the overhead rack and having a first load port accessible by the first transport vehicle through the at least one interior window; and
a second tool disposed below the overhead rack and having a second load port accessible by the first transport vehicle through the at least one periphery window.

14. The system of claim 13 , further comprising:
a first overhead rail disposed outside of said overhead rack parallel to said first and second side rails;
a second transport vehicle movably coupled to said first overhead rail; and
a third tool having a third load port disposed below the overhead rack, wherein the second transport vehicle is operable to descend below the overhead rack to access the third load port, wherein an input/output port position is defined in the overhead rack, and the first and second transport vehicles are operable to access the input/output port position.

15. The system of claim 13 , wherein the first transport vehicle includes a rotatable hoist.

16. The system of claim 13 , further comprising:
a first overhead rail disposed along a first edge of said overhead rack parallel to said first and second side rails;
a second transport vehicle movably coupled to said first overhead rail;
a second overhead rail disposed along a second edge of said overhead rack parallel to said first and second side rails;
a third transport vehicle movably coupled to said second overhead rail;
a first input/output port position defined in the overhead rack along the first edge and accessible by the second transport vehicle; and
a second input/output port position defined in the overhead rack along the second edge and accessible by the third transport vehicle.

17. The system of claim 16 , further comprising:
a second cross rail movably coupled to the first and second side rails; and
a fourth transport vehicle movably coupled to the second cross rail, wherein the second cross rail is operable to push the first cross rail along the first and second side rails.

18. The system of claim 13 , further comprising a purge nest disposed on the overhead rack and having at least one purge gas supply port operable to engage a pod supported by the overhead rack.

19. The system of claim 18 , wherein the purge nest further comprises a second gas port operable to engage the pod, wherein the second gas port comprises a vacuum port.

20. A material handling system, comprising:
an overhead rack defining a plurality of storage positions, wherein the overhead rack defines at least one interior window devoid of storage locations;
first and second side rails disposed above the overhead rack;
a first cross rail movably coupled to the first and second side rails to allow movement of the first cross rail in a first direction along the first and second side rails;
a first transport vehicle movably coupled to the first cross rail and operable to move in a second direction perpendicular to the first direction along the first cross rail and

Assignees

• Fosnight William J
• Christensen Eric
• Marshall Leslie
• Gallagher Ryan John
• Waite Stephanie
• Gaxiola Gabriel
• Globalfoundries Inc

Inventors

• Fosnight William J
• Christensen Eric
• Marshall Leslie
• Gallagher Ryan John
• Waite Stephanie
• Gaxiola Gabriel

Classifications

• H10P72/30

  for conveying, e.g. between different workstations · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title

• B65G2201/0297

  Wafer cassette · CPC title

• B65G1/0464

  with access from above · CPC title

• H01L21/677

  Electricity · mapped topic