Amorphous dielectric film and electronic component

Patent metadata

Field	Value
Publication number	US-9382163-B2
Application number	US-201414310212-A
Country	US
Kind code	B2
Filing date	Jun 20, 2014
Priority date	Jun 20, 2013
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

The present invention aims to provide an amorphous dielectric film and an electronic component in which the relative permittivity and the temperature coefficient of electrostatic capacitance can be maintained and the withstand voltage can be increased even if the dielectric film is further thinned. The amorphous dielectric film of the present invention is characterized in that it is a dielectric film composed of an amorphous composition with A-B—O as the main component, wherein A contains at least two elements selected from the group consisting of Ba, Ca and Sr, and B contains Zr. When the main component of the dielectric film is represented by (Ba x Ca y Sr z ) α —B—O, x, y and z meet the conditions of 0≦x≦1, 0≦y≦1, 0≦z≦1, respectively, x+y+z=1 and at least any two of x, y and z are 0.1 or more. When A/B is represented by α, 0.5≦α≦1.5.

First claim

What is claimed is:

1. An amorphous dielectric film, consisting of:
an amorphous composition with an A-B—O compound as the main component, the A-B—O compound being represented by the following formula:
(Ba x Ca y Sr z ) α —(Ti 1-w Zr w )—O

wherein:
0≦x≦1, 0≦y≦1, and 0≦z≦1;
x+y+z=1;
at least two of x, y, and z are 0.1 or more;
B comprises Zr;
α=A/B;
0.75≦w≦1; and
0.5≦α≦1.5.

2. An electronic component comprising the amorphous dielectric film of claim 1 .

Assignees

• Tdk Corp

Inventors

• Kaneko Toshihiko
• Takeda Saori
• Yamashita Yuki
• Yamazaki Junichi

Classifications

• H01G4/33

  Thin- or thick-film capacitors {(thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)} · CPC title

• H01G4/12

  Ceramic dielectrics {(H01G4/085 takes precedence)} · CPC title

• H01B3/10

  metallic oxides (ceramics H01B3/12) · CPC title

• H10D86/85 Primary

  characterised by only passive components · CPC title

• H10D1/68

  Capacitors having no potential barriers · CPC title