Top notch slit profile for mems device
US-2024381034-A1 · Nov 14, 2024 · US
US9380392B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9380392-B2 |
| Application number | US-201514635833-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 2, 2015 |
| Priority date | Mar 14, 2014 |
| Publication date | Jun 28, 2016 |
| Grant date | Jun 28, 2016 |
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Official abstract text for this publication.
A microphone has a MEMS acoustic transducer having a frame-shaped support, and a membrane including a diaphragm as a movable electrode, covering an opening in the support, an integrated circuit that amplifies the output from the MEMS acoustic transducer, and a housing that houses the MEMS acoustic transducer and the integrated circuit. The housing includes a sound port bearing partition with a sound port formed therein. The MEMS acoustic transducer is secured in the housing with the membrane thereof facing the inner surface of the sound port bearing partition to form a closed space inward of the sound port bearing partition of the housing between the membrane and the sound port bearing partition. The closed space communicates with the outside via the sound port.
Opening claim text (preview).
The invention claimed is: 1. A microphone comprising: a MEMS acoustic transducer comprising: a frame-shaped support, and a membrane including a diaphragm as a movable electrode, covering an opening in the support; an integrated circuit that amplifies the output from the MEMS acoustic transducer; and a housing that houses the MEMS acoustic transducer and the integrated circuit, wherein the housing includes a sound port bearing partition with a sound port formed therein, wherein the…
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