Substrate cartridge, substrate-processing apparatus, substrate-processing system, substrate-processing method, control apparatus, and method of manufacturing display element

Patent metadata

Field	Value
Publication number	US-9379339-B2
Application number	US-201213461523-A
Country	US
Kind code	B2
Filing date	May 1, 2012
Priority date	Nov 5, 2009
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A substrate cartridge includes a cartridge main body that houses a substrate and an information-maintaining section that is housed in the cartridge main body and maintains information that includes at least specification information of specification values of the substrate housed in the cartridge main body.

First claim

What is claimed is:

1. A substrate-processing system comprising:
a substrate-processing apparatus that processes a flexible band-shaped substrate;
a substrate cartridge connected to the substrate-processing apparatus and comprising:
a cartridge main body that houses the substrate; and
an information-maintaining section that maintains information comprising at least specification information relating to a specification value of the substrate that is housed in the cartridge main body; and

a main control unit that receives the information from the information-maintaining section of the substrate cartridge and controls the substrate-processing apparatus based on the information.

2. The substrate-processing system according to claim 1 , wherein the information-maintaining section maintains process information that is based on the specification information.

3. The substrate-processing system according to claim 1 , wherein
the information-maintaining section that maintains information further comprising at least process information that is based on specification information relating to the specification value of the substrate that is housed in the cartridge main body.

4. The substrate-processing system according to claim 1 , wherein the specification value comprises at least one of a material, flexibility, heat-resistance, an abrasion property, elasticity, a thickness, an expansion coefficient, a friction coefficient, and tension-resistance of the substrate.

5. The substrate-processing system according to claim 1 , wherein the specification value comprises at least one of a lyophilic property for a predetermined liquid adhering to the substrate and a drying property of the predetermined liquid on the substrate.

6. The substrate-processing system according to claim 1 , wherein the specification information comprises pretreatment information relating to a pretreatment performed for the substrate.

7. The substrate-processing system according to claim 1 , wherein the information comprises identification information that is used for identifying the cartridge main body.

8. The substrate-processing system according to claim 1 , wherein the information-maintaining section is disposed at a plurality of positions.

9. The substrate-processing system according to claim 1 , wherein the information-maintaining section is disposed so as to be detachable from the cartridge main body.

10. The substrate-processing system according to claim 1 , further comprising a communication unit that is connected to the information-maintaining section and performs at least one of transmission or reception of the information.

11. The substrate-processing system according to claim 1 , wherein the cartridge main body further comprises a mounting unit that is connected to the substrate-processing apparatus, which processes the substrate, in an attachable/detachable manner.

12. The substrate-processing system according to claim 11 , wherein the mounting unit further comprises a guiding target portion that is guided by a part of the substrate-processing apparatus.

13. The substrate-processing system according to claim 11 , wherein the mounting unit further comprises a terminal portion that electrically connects the substrate-processing apparatus and the information-maintaining section.

14. The substrate-processing system according to claim 1 , wherein the cartridge main body further comprises a substrate-driving mechanism that performs at least one of drawing-in of the substrate or sending-out of the substrate based on the specification information.

15. The substrate-processing system according to claim 1 , wherein the information-maintaining section further comprises a display portion that displays the information.

16. The substrate-processing system according to claim 1 wherein the substrate-processing apparatus further comprises:
a substrate-processing unit that processes the substrate;
a substrate carrying-in unit that carries the substrate in the substrate-processing unit; and
a substrate carrying-out unit that carries the substrate out from the substrate-processing unit,
wherein the substrate cartridge is used as at least one of the substrate carrying-in unit or the substrate carrying-out unit.

17. The substrate-processing system according to claim 16 , wherein the information maintained in the information-maintaining section of the substrate cartridge is used in the process of the substrate-processing unit.

18. The substrate-processing system according to claim 16 ,
wherein the process comprises at least one unit process corresponding to the specification information of the substrate, and
wherein the substrate-processing unit changes the unit process in accordance with the information.

19. The substrate-processing system according to claim 16 , wherein the process comprises at least one unit process corresponding to the specification information of the substrate.

20. The substrate-processing system according to claim 16 , further comprising an apparatus-side terminal portion that is electrically connected with the substrate cartridge.

21. The substrate-processing system according to claim 16 , wherein the substrate-processing unit comprises an apparatus-side communication section that performs at least one of transmission or reception of the information to or from the substrate cartridge.

22. The substrate-processing system according to claim 1 , wherein a process of the substrate-processing apparatus comprises at least one unit process corresponding to the specification information of the substrate.

23. The substrate-processing system according to claim 22 , wherein the main control apparatus changes the unit process in the substrate-processing apparatus in correspondence with the information of the substrate.

24. A substrate-processing system comprising:
a substrate-processing apparatus that processes a flexible band-shaped substrate;
a substrate cartridge connected to the substrate-processing apparatus and comprising:
a cartridge main body that houses the substrate; and
an information-maintaining section that maintains at least one of identification information used for identifying the cartridge main body or process information of the substrate that is housed in the cartridge main body; and

a main control unit that receives the information from the information-maintaining section of the substrate cartridge and controls the substrate-processing apparatus based on the information.

25. The substrate-processing system according to claim 24 , wherein the process information further comprises defect information of the substrate.

26. The substrate-processing system according to claim 24 ,
wherein the process information further comprises positional information of a predetermined portion of the substrate.

27. The substrate-processing system according to claim 26 , wherein the predetermined portion comprises a defective portion of the substrate.

28. The substrate-processing system according to claim 27 , wherein the process information further comprises defect history of the defective portion.

29. The substrate-processing system according to claim 26 , wherein the positional information comprises a distance between an end portion of the substrate and the predetermined portion.

30. The substrate-processing system according to claim 26 ,

Assignees

• Inoue Hideya
• Nikon Corp

Inventors

• Inoue Hideya

Classifications

• Y10T29/49002

  Electrical device making · CPC title

• Y02E10/549

  Organic PV cells · CPC title

• H01L51/0096 Primary

  Electricity · mapped topic

• H01L27/3244

  Electricity · mapped topic

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title