Piezoelectric energy harvesting device and method of fabricating the same

Patent metadata

Field	Value
Publication number	US-9379309-B2
Application number	US-201313908086-A
Country	US
Kind code	B2
Filing date	Jun 3, 2013
Priority date	Dec 6, 2012
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A flexible piezoelectric energy harvesting device includes a first flexible electrode substrate, a piezoelectric layer disposed on the first flexible electrode substrate, and a second flexible electrode substrate disposed on the piezoelectric layer. The piezoelectric layer may include a plurality of first piezoelectric lines spaced apart from each other in one direction and a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines.

First claim

What is claimed is:

1. A flexible piezoelectric energy harvesting device comprising:
a first flexible electrode substrate;
a piezoelectric layer disposed on the first flexible electrode substrate, the piezoelectric layer including a plurality of first piezoelectric lines spaced apart from each other in one direction and a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines; and
a second flexible electrode substrate disposed on the piezoelectric layer.

2. The flexible piezoelectric energy harvesting device of claim 1 , wherein the first and second flexible electrode substrates include a conductive material.

3. The flexible piezoelectric energy harvesting device of claim 1 , wherein each of the first and second flexible electrode substrates comprises:
an insulating polymer layer; and
an electrode pattern disposed on a surface of the insulating polymer layer which is adjacent to the piezoelectric layer.

4. The flexible piezoelectric energy harvesting device of claim 3 , wherein the electrode pattern has an interdigitated electrode (IDE) structure.

5. The flexible piezoelectric energy harvesting device of claim 1 , wherein the first piezoelectric lines include a piezoelectric ceramic material or a single-crystalline material.

6. The flexible piezoelectric energy harvesting device of claim 5 , wherein the first piezoelectric lines include the piezoelectric ceramic material; and
wherein the piezoelectric ceramic material includes lead zirconate titanate (PZT) or lead-free ceramic materials.

7. The flexible piezoelectric energy harvesting device of claim 5 , wherein the first piezoelectric lines include the single-crystalline material; and
wherein the single-crystalline material includes lead magnesium niobate-lead titanate (PMN-PT), lead magnesium niobate-lead zirconate titanate (PMN-PZT), lead indium niobate-lead titanate (PIN-PT), or lead zirconate niobate-lead titanate (PZN-PT).

8. The flexible piezoelectric energy harvesting device of claim 1 , wherein the second piezoelectric lines include a piezoelectric polymer material; and
wherein the piezoelectric polymer material includes a polyvinylidene difluoride (PVDF) polymer-based piezoelectric material, or a polyvinylidene difluoride-trifluoroethylene (PVDF-TrFE) polymer-based piezoelectric material.

9. The flexible piezoelectric energy harvesting device of claim 1 , wherein each of the first and second piezoelectric lines has a quadrilateral cross section in another direction crossing the one direction.

10. A flexible piezoelectric energy harvesting device comprising:
a first flexible electrode substrate;
a piezoelectric layer disposed on the first flexible electrode substrate, the piezoelectric layer including a plurality of piezoelectric islands spaced apart from each other and regularly arranged and a piezoelectric net pattern filling spaces between the piezoelectric islands; and
a second flexible electrode substrate disposed on the piezoelectric layer,
wherein the piezoelectric net pattern includes a piezoelectric material that comes in contact with the first and second flexible electrodes, the piezoelectric material extending from the first flexible electrode to the second flexible electrode.

Assignees

• Korea Electronics Telecomm

Inventors

• Lee Sang Kyun
• Yang Yil Suk
• Kwon Jong-Kee

Classifications

• H01L41/37

  Electricity · mapped topic

• H01L41/113 Primary

  Electricity · mapped topic

• H01L41/183

  Electricity · mapped topic

• Y10T29/42

  Piezoelectric device making · CPC title

• H10N30/092

  Forming composite materials · CPC title