Device for non-linear signal conversion by four-wave mixing

Patent metadata

Field	Value
Publication number	US-9377668-B2
Application number	US-201414307842-A
Country	US
Kind code	B2
Filing date	Jun 18, 2014
Priority date	Jun 25, 2013
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A device for non-linear conversion of first infrared signal into a second infrared signal with a wavelength that is less than that of the first infrared signal by means of four-wave mixing, which includes at least one portion of SiGe arranged on at least one first layer of material with a refractive index which is less than that of silicon, a germanium concentration in the portion of SiGe which varies continuously between a first value and a second value which is greater than the first value, in a direction which is approximately perpendicular to a face of the first layer on which the portion of SiGe is arranged, and in which a summital part of the portion of SiGe where the germanium concentration is equal to the second value is in contact with a gas and/or a material with a refractive index which is less than that of the silicon.

First claim

The invention claimed is:

1. A device suitable for a non-linear conversion of a first infrared signal into a second infrared signal whose wavelength is less than that of the first infrared signal by four-wave mixing, comprising at least one portion of SiGe arranged on at least one first layer of material whose refractive index is less than that of silicon, wherein a germanium concentration in the portion of SiGe varies continuously between a first value and a second value which is greater than the first value, along a direction which is approximately perpendicular to a face of the first layer on which the portion of SiGe is arranged, the first value corresponding to the germanium concentration of a face of the portion of SiGe facing the first layer, and in which a summital part of the portion of SiGe in which the germanium concentration is equal to the second value is in contact with a gas and/or a material whose refractive index is less than that of silicon.

2. The device according to claim 1 , in which the wavelength of the first infrared signal is between about 3 μm and 7.5 μm and in which the wavelength of the second infrared signal is between about 1.3 μm and 1.9 μm.

3. The device according to claim 1 , where said device forms a waveguide which is suitable for receiving, as an input signal, the first infrared signal and a pump signal whose wavelength is different from those of the first infrared signal and of the second infrared signal, with the SiGe portion forming a core of the waveguide in which the non-linear conversion is able to take place.

4. The device according to claim 1 , in which the first layer comprises SiO 2 or sapphire.

5. The device according to claim 1 , in which the second value of the germanium concentration in the portion of SiGe is greater than about 20%.

6. The device according to claim 1 , in which the summital part of the portion of SiGe and the lateral flanks of the portion of SiGe are in contact with air or at least one gas or SiO 2 or sapphire.

7. The device according to claim 1 which includes in addition a second layer which is silicon-based and arranged between the first layer and the portion of SiGe.

8. The device according to claim 7 , in which the thickness of the second layer is less than or equal to about 0.3 μm.

9. The device according to claim 7 , in which the second layer includes a portion of silicon on which the portion of SiGe is arranged, wherein said portion of silicon includes, in a plane parallel to said face of the first layer, a width and a length which are approximately similar to a width and a length respectively of the portion of SiGe, and which includes a thickness, perpendicular to said face of the first layer which is greater than the thickness of the rest of the second layer.

10. The device according to claim 1 , which includes in addition a portion of silicon arranged on the first layer and on which the portion of SiGe is arranged, with said portion of silicon including, in a plane parallel to said face of the first layer, a width and a length which are approximately similar to a width and a length respectively of the portion of SiGe.

11. The device according to claim 1 , in which the portion of SiGe is of an approximately rectangular parallelepiped shape and includes, in a plane parallel to said face of the first layer, a width of between about 0.5 μm and 0.7 μm and a length between about 1 cm and 5 cm, and a height, perpendicular to said face of the first layer which is between about 1.3 μm and 1.6 μm.

12. A NDIR-type gas detection device which includes at least one non-linear conversion device according to claim 1 , in which said conversion device is suitable for carrying out a detection of a gas.

13. A process for making a device suitable for a non-linear conversion of a first infrared signal into a second infrared signal whose wavelength is less than that of the first infrared signal by four wave mixing, which includes at least the making of a portion of SiGe arranged on at least one first layer of material whose refractive index is less than that of silicon and such that a concentration of germanium in the portion of SiGe varies continuously between a first value and a second value which is greater than the first value in a direction which is approximately perpendicular to a face of the first layer on which the portion of SiGe is made, the first value corresponding to the germanium concentration of a face of the portion of SiGe facing the first layer, and in which a summital part of the portion of SiGe in which the germanium concentration is equal to the second value is in contact with a gas and/or a material whose refractive index is less than that of silicon.

14. The process according to claim 13 , which includes, in addition, prior to the making of the portion of SiGe, the making of a silicon-based second layer on the first layer, where the portion of SiGe is then made on the second layer.

15. The process according to claim 14 , in which the portion of SiGe is made using the following steps:
epitaxy of a layer of SiGe onto the second layer so that a germanium concentration in the layer of SiGe varies continuously between a first value and a second value which is greater than the first value in a direction which is approximately perpendicular to the said face of the first layer.
photolithography and etching of the layer of SiGe, forming the said portion of SiGe.

16. The process according to claim 15 , in which the step of etching the layer of SiGe is carried out such that a part of the second layer is also etched, forming a portion of silicon on which the portion of SiGe is arranged such that the said portion of silicon includes, in a plane parallel to said face of the first layer, a width and a length that are approximately similar to a width and a length respectively of the portion of SiGe, and comprising a thickness, perpendicular to said face of the first layer, which is greater than the thickness of the rest of the second layer.

17. The process according claim 13 , which includes in addition, prior to the making of the portion of SiGe, the making of a portion of silicon on the first layer and on which the portion of SiGe is made, wherein said portion of silicon includes, in a plane parallel to said face of the first layer, a width and a length which are approximately similar to a width and a length respectively of the portion of SiGe.

Assignees

• Commissariat Energie Atomique
• Commissariat Energie Atomique

Inventors

• Brun Mickael
• Labeye Pierre
• Nicoletti Sergio
• Bogris Adonis
• Kapsalis Alexandros
• Syvridis Dimitris

Classifications

• G02B6/102

  for infrared and ultraviolet radiation · CPC title

• G01N21/3504

  for analysing gases, e.g. multi-gas analysis · CPC title

• G02B2006/12176

  Etching · CPC title

• G01N21/7703

  using reagent-clad optical fibres or optical waveguides (using measurement of total internal reflection or attenuated total reflection G01N21/552; optical fibres or waveguides per se G02B) · CPC title

• G02F2202/105

  single crystal Si · CPC title