External beam delivery system for laser dark-field illumination in a catadioptric optical system

Patent metadata

Field	Value
Publication number	US-9377610-B2
Application number	US-201414156351-A
Country	US
Kind code	B2
Filing date	Jan 15, 2014
Priority date	Jun 19, 2007
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A catadioptric objective configured to inspect a specimen is provided. The catadioptric objective includes a Mangin element having one surface at a first axial location and an extension element positioned together with the Mangin element. The extension element provides a second surface at a second axial location. Certain light energy reflected from the specimen passes to the second surface of the extension element, the Mangin element, and through a plurality of lenses. An aspheric surface may be provided, and light energy may be provided to the specimen using diverting elements such as prisms or reflective surfaces.

First claim

What is claimed is:

1. A specimen inspection apparatus, comprising:
a light energy source;
at least one lens; and
a composite Mangin element comprising a first surface axially positioned away from the specimen and a second surface axially positioned toward the specimen and an extension comprising a third surface axially positioned closer to the specimen than the second surface;
wherein the light energy source is configured to transmit light energy substantially parallel to a surface of the specimen, and the apparatus is further configured to divert light energy around the extension of the composite Mangin element, thereby striking the surface of the specimen, and further wherein certain light energy reflected from the specimen passes through the third surface, second surface, first surface, and at least one lens.

2. The specimen inspection apparatus of claim 1 , wherein the apparatus being further configured to divert comprises a plurality of reflective surfaces positioned proximate the second surface of the Mangin element.

3. The specimen inspection apparatus of claim 1 , wherein the apparatus being further configured to divert comprises a plurality of prisms positioned proximate the second surface of the Mangin element.

4. The specimen inspection apparatus of claim 1 , wherein the extension is integrally formed with the Mangin element.

5. The specimen inspection apparatus of claim 1 , wherein the extension is separately formed from the Mangin element and joined to the Mangin element using one from a group comprising glue, optical contacting, and mechanical mounting.

6. The specimen inspection apparatus of claim 1 , wherein said diverting occurs using at least one reflective surface.

7. The specimen inspection apparatus of claim 1 , wherein said diverting occurs using at least one prism.

8. A method for inspecting a specimen, comprising:
providing a beam of light energy at an angle substantially parallel to a surface of the specimen through a gap bounded by the specimen and a composite Mangin element;
diverting the beam of light energy toward the surface of the specimen such that certain light energy reflects from the specimen; and
receiving certain light energy reflected from the specimen through the composite Mangin element and at least one lens;
wherein the composite Mangin element comprises a first axially positioned surface, a second axially positioned surface, and a third axially positioned surface located on a composite Mangin element extension.

9. The method of claim 8 , wherein the composite Mangin element comprises a Mangin element integrally formed with an extension.

10. The method of claim 8 , wherein the composite Mangin element comprises a Mangin element separately formed from the extension and joined to the Mangin element using one from a group comprising glue, optical contacting, and mechanical mounting.

11. A specimen inspection apparatus, comprising:
a light source; and
an objective for inspecting a specimen, the objective comprising:
a plurality of lenses;
a Mangin element comprising a first surface at a first axial position and a second surface at a second axial position; and
an extension located proximate the Mangin element and positioned between the Mangin element and the specimen, the extension providing a third surface at a third axial position;
wherein certain light energy transmitted from the light energy source that is reflected from the specimen passes through the third surface, the second surface, the first surface, and the plurality of lenses.

12. The specimen inspection apparatus of claim 11 , wherein the Mangin element, extension, and specimen are oriented to form a gap configured to receive light energy and the objective is further configured to divert the light energy toward the specimen.

13. The specimen inspection apparatus of claim 12 , wherein the objective is further configured to divert the light energy toward the specimen comprises reflective surfaces configured to divert the light energy at approximately 45 degrees relative to a plane of incidence for illumination light.

14. The specimen inspection apparatus of claim 11 , wherein at least one surface from a group comprising the plurality of lenses and the Mangin element is aspheric.

Assignees

• Kla Tencor Corp

Inventors

• Armstrong J Joseph

Classifications

• G02B21/06

  Means for illuminating specimens · CPC title

• G02B13/18

  with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration {(G02B13/002 takes precedence)} · CPC title

• G02B21/082

  for incident illumination only · CPC title

• G02B17/0856 Primary

  comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors · CPC title

• G02B17/0808

  on-axis systems with at least one of the mirrors having a central aperture · CPC title