Method for the production of polymeric membranes having an ordered arrangement of high-aspect-ratio nanopores, by means of heavy ion bombing

Patent metadata

Field	Value
Publication number	US-9376538-B2
Application number	US-201013636000-A
Country	US
Kind code	B2
Filing date	Dec 23, 2010
Priority date	Mar 23, 2010
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A nanoporous polymeric membrane is obtained by bombing a polymer film by means of high energy focused heavy ion beams and subsequently performing chemical etching to remove the portions of the polymer film in the zones degraded by the ion bombing, in such a manner to obtain pores passing through the polymer film. The heavy ion bombing is performed after interposing between the source of ions and the polymer film, adjacent to the film, an amplitude mask having an ordered arrangement of nanopores and having sufficient thickness to prevent the passage of the heavy ions that are not directed through the pores of said amplitude mask, in such a manner to obtain in the polymer fill an ordered arrangement of nanopores having an aspect-ratio at least exceeding 10 and preferably exceeding 100.

First claim

The invention claimed is:

1. A method for the production of a nanoporous polymeric membrane, comprising
positioning an opaque layer of material entirely opaque to ions over a polymer film and depositing an aluminum layer over said opaque layer, transforming said aluminum layer into anodic porous alumina by an anodisation method, the transforming forming a barrier layer inside and at a bottom of pores of the anodic porous alumina;
eliminating the barrier layer through chemical etching, in such a manner to define channels passing through the layer of anodic porous alumina;
chemically etching the opaque layer through the pores of the anodic porous alumina in such a manner to obtain in said opaque layer an ordered honeycomb arrangement of mask nanopores corresponding to the arrangement of the pores of the anodic porous alumina and thus forming an amplitude mask in the opaque layer;
removing the anodic porous alumina;
interposing the amplitude mask between a source of heavy ions and a polymer film, in proximity to the film, the amplitude mask having the ordered honeycomb arrangement of mask nanopores and thickness sufficient to prevent the passage of the heavy ions that are not directed through the mask nanopores of the amplitude mask;
bombing the polymer film by a high energy focused heavy ion beam through the amplitude mask having the ordered honeycomb arrangement of mask nanopores, so that a corresponding ordered honeycomb distribution of polymer nanopores is obtained in said polymer film;
performing a chemical etching of the film after the bombing to remove the portions of said film in zones degraded by the ion bombing in such a manner to obtain pores passing through the film; and
said polymer nanopores obtained in the polymer film having an aspect-ratio at least exceeding 10.

2. A method for the production of a nanoporous polymeric membrane, comprising
positioning a layer of gold, indium or tin oxide over a polymer film and then depositing a layer of aluminum thereon,
transforming said aluminum layer into anodic porous alumina by means of an anodisation method,
using the layer of gold, indium or tin oxide as an electrode for electrodepositing a metal into the pores of the anodic porous alumina, in such a manner to obtain metal nanowires in a matrix,
dissolving the anodic porous alumina through chemical etching in such a manner to obtain an ordered distribution of nanowires adhering to a polymer sublayer and to the layer of gold, indium or tin oxide to form an amplitude mask,
interposing the amplitude mask between a source of heavy ions and a polymer film, in proximity to the film, the amplitude mask having the ordered honeycomb arrangement of mask nanopores and thickness sufficient to prevent the passage of the heavy ions that are not directed through the mask nanopores of the amplitude mask;
bombing the polymer film by a high energy focused heavy ion beam through the amplitude mask having the ordered honeycomb arrangement of mask nanopores, so that a corresponding ordered honeycomb distribution of polymer nanopores is obtained in said polymer film;
performing a chemical etching of the film after the bombing to remove the portions of said film in zones degraded by the ion bombing in such a manner to obtain pores passing through the film; and
said polymer nanopores obtained in the polymer film having an aspect-ratio at least exceeding 10.

3. The method according to claim 1 , wherein the amplitude mask always remains at a fixed position with respect to the beam of heavy ions, while the polymer film is displaced in the longitudinal direction thereof, orthogonally to the beam of heavy ions.

4. The method according to claim 1 , wherein the amplitude mask and the polymer film remain at fixed position during the heavy ion bombing.

5. The method according to claim 4 , wherein the amplitude mask is maintained spaced from the polymer film.

6. The method according to claim 3 , wherein the amplitude mask is maintained in contact with said polymer film during the heavy ion bombing.

7. The method according to claim 2 , wherein the amplitude mask always remains at a fixed position with respect to the beam of heavy ions, while the polymer film is displaced in the longitudinal direction thereof, orthogonally to the beam of heavy ions.

8. The method according to claim 2 , wherein the amplitude mask and the polymer film remain at fixed position during the heavy ion bombing.

Assignees

• Pullini Daniele
• Sgroi Mauro
• Fiat Ricerche

Inventors

• Pullini Daniele
• Sgroi Mauro

Classifications

• H01M50/451

  comprising layers of only organic material and layers containing inorganic material · CPC title

• H01M50/434

  Ceramics · CPC title

• H01M50/491

  Porosity · CPC title

• H01M50/414

  Synthetic resins, e.g. thermoplastics or thermosetting resins · CPC title

• H01M2/1653

  Electricity · mapped topic