Polishing pad conditioning system including suction

Patent metadata

Field	Value
Publication number	US-9375825-B2
Application number	US-201414266543-A
Country	US
Kind code	B2
Filing date	Apr 30, 2014
Priority date	Apr 30, 2014
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A system for use in substrate polishing includes a conditioner system for conditioning a surface of a polishing pad and a vacuum system having a vacuum port. The conditioner system includes a conditioner head constructed to receive an abrasive conditioner component. The vacuum system is configured to apply suction through the vacuum port to the surface of the polishing pad in a direction away from the surface to remove material on the surface.

First claim

What is claimed is:

1. An apparatus for use in substrate polishing, comprising:
a conditioner system for conditioning a surface of a polishing pad, the conditioner system including a conditioner head constructed to receive an abrasive conditioner component, a substantially straight arm that supports the conditioner head, and a base that supports the arm, the conditioner head including a curved contour extending beyond the arm; and
a vacuum system having a vacuum port, the vacuum system being configured to apply suction through the vacuum port to the surface of the polishing pad in a direction away from the surface to remove material on the surface, wherein the vacuum port includes a first substantially straight section spaced apart from and extending parallel to the arm and a second curved section spaced apart from and extending along the curved contour of the conditioner head.

2. The apparatus of claim 1 , comprising a dispenser to supply a cleaning fluid to the polishing pad.

3. The apparatus of claim 2 , wherein the dispenser is configured to supply the cleaning fluid through the conditioner head.

4. The apparatus of claim 1 , wherein the vacuum port surrounds less than an entirety of the curved contour of the conditioner head.

5. An apparatus for use in substrate polishing, comprising:
a conditioner system for conditioning a surface of a polishing pad, the conditioner system including a conditioner head constructed to receive an abrasive conditioner component, an arm that supports the conditioner head, and a base that supports the arm, the base including an actuator connected to the arm to sweep the arm and the conditioner head over the polishing pad; and
a vacuum system having a housing horizontally spaced from the arm and a vacuum port in the housing, the vacuum system being configured to apply suction through the vacuum port to the surface of the polishing pad in a direction away from the surface to remove material on the surface, wherein the vacuum port includes a substantially straight section horizontally spaced away from and extending parallel to the arm, and wherein the housing including the substantially straight section of the vacuum port is constructed to move synchronously with the conditioner head.

6. The apparatus of claim 5 , wherein the housing with the vacuum port is connected to and supported by the arm.

7. The apparatus of claim 5 , wherein the vacuum port has a shape that follows a shape of part of a contour of the conditioner head.

8. The apparatus of claim 1 , wherein the vacuum port is located downstream of the conditioner head, such that a given spot on the surface of the polishing pad is moved to be under the conditioner head for conditioning before to be under the vacuum port.

9. The apparatus of claim 1 , further comprising a rotatable platen to support the polishing pad and a carrier head to hold the substrate in contact with the polishing pad, and wherein along a direction of rotation of the platen, the carrier head is positioned between the vacuum port and the conditioner head.

10. A method of treating a polishing pad, comprising:
applying an abrasive conditioner component to a surface of the polishing pad for conditioning the surface;
sweeping the abrasive conditioner component horizontally across the surface with an arm;
applying suction to the surface being conditioned in an area including a substantially straight section horizontally spaced away from and extending parallel to the arm of the abrasive conditioner, the suction applied along a direction away from the surface to remove material on the surface; and
moving the area in which the suction is applied to the surface synchronously with the abrasive conditioner component.

11. The method of claim 10 , wherein applying the abrasive conditioner component comprises moving a conditioner head relative to the surface of the polishing pad, and applying the suction comprises moving a vacuum port with the conditioner head.

12. The method of claim 11 , wherein the vacuum port is downstream of the conditioner head, such that a given spot on the surface of the polishing pad is moved to be under the conditioner head for conditioning before to be under the vacuum port.

Assignees

• Applied Materials Inc

Inventors

• Sun Lizhong
• Kwak Byung-Sung Leo

Classifications

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B55/06

  Dust extraction equipment on grinding or polishing machines (B24B31/12 takes precedence) · CPC title

• B24B53/007

  Cleaning of grinding wheels · CPC title