Plasma light source apparatus and plasma light generating method

Patent metadata

Field	Value
Publication number	US-9374883-B2
Application number	US-201414560732-A
Country	US
Kind code	B2
Filing date	Dec 4, 2014
Priority date	Dec 5, 2013
Publication date	Jun 21, 2016
Grant date	Jun 21, 2016

Abstract

A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.

First claim

What is claimed is:

1. A plasma light source apparatus, comprising: a chamber including a plasma source gas for generating laser induced plasma; a laser generating part spaced apart from the chamber, the laser generating part being configured to generate a hollow laser beam; and a curved mirror disposed between the chamber and the laser generating part, the curved mirror being configured to reflect and to condense the generated hollow laser beam to generate the laser induced plasma in the chamber, and to reflect a light emitted from the generated laser induced plasma, wherein the laser generating part includes a first laser source generating a first laser beam, a second laser source generating a second laser beam, and a transformation part, and wherein the transformation part transforms both of the first and second laser beams into the hollow laser beam.

2. The plasma light source apparatus of claim 1 , further comprising:
a first mirror for reflecting the light reflected by the curved mirror; and
a condensing lens part for condensing the light reflected by the first mirror.

3. The plasma light source apparatus of claim 2 , further comprising a calibration part positioned on a path of the generated hollow laser beam, wherein the calibration part calibrates a distortion of the generated hollow laser beam.

4. The plasma light source apparatus of claim 2 , wherein the condensing lens part comprises a concave lens or a convex lens.

5. The plasma light source apparatus of claim 1 , further comprising a second mirror positioned on a path of the hollow laser beam, the second mirror being configured to reflect the hollow laser beam to the curved mirror.

6. The plasma light source apparatus of claim 1 , wherein the laser generating part comprises an axicon lens.

7. The plasma light source apparatus of claim 1 , wherein:
the first laser beam is a circular laser beam having a pulse wave,
wherein the second laser beam is a circular laser beam having a continuous wave, and
wherein the transformation part is positioned on paths of the first and second laser beams.

8. The plasma light source apparatus of claim 1 , wherein
the first laser beam has a pulse wave and a first wavelength,
wherein the second laser beam has a continuous wave and a second wavelength different from the first wavelength,
wherein the transformation part includes a first transformation part and a second transformation part,
wherein the first transformation part is positioned on a path of the first laser beam, the first transformation part transforming the first laser beam into the hollow laser beam, and
wherein the second transformation part is positioned on a path of the second laser beam, the second transformation part transforming the second laser beam into the hollow laser beam.

9. The plasma light source apparatus of claim 1 , wherein the chamber has a spherical shape, and the chamber comprises fused silica or quartz glass.

10. A method for generating plasma light, the method comprising:
generating a hollow laser beam;
reflecting and condensing the generated hollow laser beam into a chamber including a plasma source gas using a curved mirror, and generating laser induced plasma in the chamber; and
reflecting a first light emitted from the generated laser induced plasma using the curved mirror,
wherein the generating a hollow laser beam includes generating a first laser beam using a first laser source and a second laser beam using a second laser source, and transforming the first and second laser beams into the hollow laser beam.

11. The method of claim 10 , further comprising reflecting the first light reflected by the curved mirror to a condensing lens part using a first mirror, wherein the first mirror is disposed on a path of the first light reflected by the curved mirror.

12. The method of claim 11 , further comprising calibrating a distortion of the hollow laser beam using a calibration part, wherein the calibration part is disposed on a path of the hollow laser beam.

13. The method of claim 10 , further comprising reflecting the hollow laser beam to the curved mirror using a second mirror, wherein the second mirror is disposed on a path of the hollow laser beam.

14. The method of claim 10 , wherein the first laser beam is
a circular laser beam having a pulse wave,
wherein the second laser beam is a circular laser beam having a continuous wave,
wherein the first laser beam is transformed into the hollow laser beam using a first transformation part disposed on a path of the first laser beam, and
wherein the second laser beam is transformed into the hollow laser beam using a second transformation part disposed on a path of the second laser beam.

15. The method of claim 10 , wherein the first laser beam is
a circular laser beam having a pulse wave and a first wavelength,
wherein the second laser beam is a circular laser beam having a continuous wave and a second wavelength.

16. A method for generating light, the method comprising:
generating first and second laser beams;
transforming the first and second laser beams into a hollow laser beam;
reflecting and condensing the hollow laser beam using a curved mirror to generate laser induced plasma in a chamber;
reflecting light emitted from the generated laser induced plasma using the curved mirror; and
condensing the light reflected using the curved mirror.

17. The method of claim 16 , wherein the first laser beam has a pulse wave and the second laser beam has a continuous wave.

18. The method of claim 16 , wherein the first laser beam has a pulse wave and a first wavelength, and the second laser beam has a continuous wave and a second wavelength different from the first wavelength.

19. The method of claim 16 , further comprising calibrating a distortion of the hollow laser beam.

20. The method of claim 16 , further comprising reflecting the hollow laser beam to the curved mirror using a first mirror, wherein the first mirror is disposed on a path of the generated hollow laser beam.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Park Young-Kyu
• Kim Wook-Rae
• Jeon Byeong-Hwan
• Kohei Hashimoto

Classifications

• H05H1/46 Primary

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title

• H05G2/008 Primary

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/003

  the plasma being generated from a material in a liquid or gas state · CPC title

• H05G2/00

  Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma (X-ray lasers H01S4/00) · CPC title

• G21K5/00 Primary

  Irradiation devices (discharge tubes for irradiating H01J37/00) · CPC title