Hydroxyl group termination for nucleation of a dielectric metallic oxide

Patent metadata

Field	Value
Publication number	US-9373501-B2
Application number	US-201313863580-A
Country	US
Kind code	B2
Filing date	Apr 16, 2013
Priority date	Apr 16, 2013
Publication date	Jun 21, 2016
Grant date	Jun 21, 2016

Abstract

A surface of a semiconductor-containing dielectric material/oxynitride/nitride is treated with a basic solution in order to provide hydroxyl group termination of the surface. A dielectric metal oxide is subsequently deposited by atomic layer deposition. The hydroxyl group termination provides a uniform surface condition that facilitates nucleation and deposition of the dielectric metal oxide, and reduces interfacial defects between the oxide and the dielectric metal oxide. Further, treatment with the basic solution removes more oxide from a surface of a silicon germanium alloy with a greater atomic concentration of germanium, thereby reducing a differential in the total thickness of the combination of the oxide and the dielectric metal oxide across surfaces with different germanium concentrations.

First claim

What is claimed is:

1. A method of forming a semiconductor structure comprising:
forming a semiconductor-containing dielectric material layer on a semiconductor material portion of a substrate;
forming another semiconductor-containing dielectric material layer on another semiconductor material portion of said substrate,
forming a hydroxyl group terminated surface of said semiconductor-containing dielectric material layer and another hydroxyl group terminated surface of said another semiconductor-containing dielectric material layer by treating a top surface of said semiconductor-containing dielectric material and a to s surface of said another semiconductor-containing dielectric material with an etchant selected from a basic solution and a basic vapor; and
depositing a metal oxide layer directly on said hydroxyl group terminated surface and said another hydroxyl group terminated surface employing atomic layer deposition,
wherein said semiconductor-containing dielectric material layer and said another semiconductor-containing dielectric material layer have different compositions.

2. The method of claim 1 , further comprising loading said substrate into a vacuum environment of a process tool for said atomic layer deposition while at least 90% of said top surface has hydroxyl group termination.

3. The method of claim 1 , wherein said etchant removes a surface portion of said semiconductor-containing dielectric material layer.

4. The method of claim 3 , wherein a thickness of said removed surface portion of said semiconductor-containing dielectric material layer is in a range from 0.05 nm to 0.5 nm.

5. The method of claim 1 , wherein said etchant comprises ammonium hydroxide and hydrogen peroxide.

6. The method of claim 5 , wherein said etchant further comprises deionized water.

7. The method of claim 6 , wherein a volume ratio among ammonium hydroxide, hydrogen peroxide, and deionized water is 1:x:y, wherein x is in a range from 0.5 to 2, and y is in a range from 3 to 20.

8. The method of claim 1 , wherein said etchant comprises an ammonium hydroxide solution or an ammonium hydroxide vapor.

9. The method of claim 1 , wherein said etchant comprises a potassium hydroxide solution or a potassium hydroxide vapor.

10. The method of claim 1 , wherein said etchant comprises a sodium hydroxide solution or a sodium hydroxide vapor.

11. The method of claim 1 , wherein said metal oxide layer comprises an oxide of a transition metal or an oxide of a Lanthanide element.

12. The method of claim 1 , wherein said metal oxide layer comprises a material selected from HfO 2 , ZrO 2 , La 2 O 3 , Al 2 O 3 , TiO 2 , and Y 2 O 3 .

13. The method of claim 1 , wherein said metal oxide layer is an HfO 2 layer.

14. The method of claim 1 , wherein said semiconductor-containing dielectric material is silicon oxide or an oxide of a silicon-germanium alloy.

15. The method of claim 1 , wherein said etchant removes a surface portion of said semiconductor-containing dielectric material layer and a surface portion of said another semiconductor-containing dielectric material layer simultaneously.

16. The method of claim 15 , wherein a thickness of said removed surface portion of said another semiconductor-containing dielectric material layer is greater than a thickness of said removed surface portion of said semiconductor-containing dielectric material layer.

17. The method of claim 15 , further comprising:
forming said semiconductor-containing dielectric material layer by conversion of a surface portion of said semiconductor material portion into a dielectric material by a dielectric conversion process; and
forming said another semiconductor-containing dielectric material layer by conversion of a surface portion of said another semiconductor material portion into another dielectric material by said dielectric conversion process.

18. The method of claim 17 , wherein said semiconductor material portion includes a silicon portion, and said another semiconductor material portion includes a silicon-germanium alloy portion.

19. The method of claim 18 , wherein said another semiconductor-containing dielectric material layer has a greater thickness than said semiconductor-containing dielectric material layer upon formation by said dielectric conversion process.

20. The method of claim 19 , wherein said surface treatment decreases a thickness differential between said another semiconductor-containing dielectric material layer and said semiconductor-containing dielectric material layer upon formation of said hydroxyl group terminated surface of said semiconductor-containing dielectric material layer.

Assignees

• IBM

Inventors

• Ando Takashi
• Chudzik Michael P
• Dai Min
• Frank Martin M
• Hilscher David F
• Krishnan Rishikesh
• Linder Barry P
• Ortolland Claude
• Shepard Jr Joseph F

Classifications

• H10P14/69396

  the material containing at least one rare earth metal element, e.g. oxides of lanthanides, scandium or yttrium · CPC title

• H10P14/69395

  the material containing zirconium, e.g. ZrO2 · CPC title

• H10P14/69394

  the material containing titanium, e.g. TiO2 · CPC title

• H10P14/69392

  the material containing hafnium, e.g. HfO2 · CPC title

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title