Methods for stripping photoresist and/or cleaning metal regions

Patent metadata

Field	Value
Publication number	US-9373497-B2
Application number	US-201313759958-A
Country	US
Kind code	B2
Filing date	Feb 5, 2013
Priority date	Apr 4, 2007
Publication date	Jun 21, 2016
Grant date	Jun 21, 2016

Abstract

Methods are provided for cleaning metal regions overlying semiconductor substrates. A method for removing material from a metal region comprises heating the metal region, forming a plasma from a gas comprising hydrogen and carbon dioxide, and exposing the metal region to the plasma.

First claim

What is claimed is:

1. A method for removing material from a metal region overlying a semiconductor substrate, the method comprising:
forming a plasma from a gas comprising hydrogen and carbon dioxide; and
exposing the metal region to the plasma to thereby remove material from the metal region of the semiconductor substrate.

2. The method of claim 1 , further comprising heating the metal region to a temperature in a range of about 200° C. to about 450° C.

3. The method of claim 2 , wherein the temperature is in a range of about 270° C. and 350° C.

4. The method of claim 1 , wherein the plasma is formed from gas comprising hydrogen and about 0.1% to about 10% carbon dioxide.

5. The method of claim 4 , wherein the plasma is formed gas comprising hydrogen and about 0.1% to about 1% carbon dioxide.

6. The method of claim 1 , wherein the plasma is a remote plasma.

7. The method of claim 1 , wherein the plasma is an in situ plasma.

8. The method of claim 1 , wherein the metal region is a metal silicide region.

9. The method of claim 8 , the metal silicide region is a nickel silicide region.

10. The method of claim 1 , wherein the metal region comprises a metal interconnect.

11. The method of claim 1 , wherein exposing the metal region to the plasma comprises exposing the metal region to the plasma and an inert gas.

12. The method of claim 11 , further comprising introducing the inert gas upstream from the metal region, wherein the inert gas has a flow rate in a range of about 0.15 and 25 times a flow rate of the hydrogen.

13. The method of claim 1 , wherein a polymeric material is removed.

14. A method for cleaning a metal region overlying a semiconductor substrate, the method:
exciting a gas, wherein the gas comprises hydrogen and carbon dioxide; and
subjecting the metal region to the excited gas to thereby clean the metal region of the semiconductor substrate.

15. The method of claim 14 , wherein the gas comprises about 0.1% by volume to about 10% by volume carbon dioxide.

16. The method of claim 14 , wherein exciting the gas comprises exciting the gas upstream from a chamber in which the semiconductor substrate is disposed.

17. The method of claim 16 , further comprising introducing an inert gas upstream from the semiconductor substrate, and wherein subjecting the metal region to the excited gas comprises subjecting the metal region to the excited gas and the inert gas.

18. The method of claim 14 , wherein exciting the gas comprises exciting the gas in a chamber in which the semiconductor substrate is disposed.

19. A method for fabricating a semiconductor structure including a metal region, the method comprising:
heating the metal region;
exciting a gas to form a plasma, wherein the gas comprises hydrogen and carbon dioxide;
subjecting the metal region to a plasma to thereby remove material from the metal region; and
forming an insulating layer overlying the metal region.

20. The method of claim 19 , wherein the gas comprises about 0.1% by volume to about 10% by volume carbon dioxide.

Assignees

• Novellus Systems Inc

Inventors

• Chen David
• Goto Haruhiro Harry
• Su Martina
• Greer Frank
• Alokozai Shamsuddin

Classifications

• H10P72/0421

  for drying etching · CPC title

• H10P70/277

  the processing being a planarisation of conductive layers · CPC title

• H10P70/234 Primary

  the processing being the formation of vias or contact holes · CPC title

• H10P50/287

  by chemical means · CPC title

• H10P70/273 Primary

  the processing being a delineation of conductive layers, e.g. by RIE · CPC title