Differential suspended single-layer graphene nanopore sensor, and preparation method therefor and use thereof
US-2024204190-A1 · Jun 20, 2024 · US
US9372165B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9372165-B2 |
| Application number | US-201213593771-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 24, 2012 |
| Priority date | Oct 13, 2011 |
| Publication date | Jun 21, 2016 |
| Grant date | Jun 21, 2016 |
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Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.
Opening claim text (preview).
What is claimed is: 1. A gas sensor comprising: a heater; a detection material disposed on the heater; and an encapsulant disposed on the detection material and sealing the detection material from a detected gas, wherein the heater is operable to heat the encapsulant, and wherein the detection material includes SnO 2 and contacts a top surface of the heater. 2. A method of manufacturing and using a gas sensor, the method comprising: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated. 3. The method of claim 2 , wherein in the forming of the detection material, the detection material is formed on the heater through screen printing. 4. The method of claim 2 , wherein in the coating of the encapsulant, the encapsulant is coated on the detection material through any one process of pressing, thermocompression binding, spin coating, drop coating, dip coating and spray coating. 5. The method of claim 2 , wherein in the coating of the encapsulant, the encapsulant is heated by an external heat source or the heater to be coated on the detection material. 6. The method of claim 5 , wherein the encapsulant is heated to a temperature in a range from 150 to 170° C. 7. The method of claim 2 , wherein in the removing of the encapsulant, when the gas sensor is operated, the encapsulant is removed from the detection material by heating the heater to a thermal decomposition temperature of the encapsulant or higher. 8. The method of claim 2 , wherein the gas sensor is a first gas sensor that includes the heater, the detection material, and the encapsulant, the method further comprising: detecting an abnormal operation of the first gas sensor; and heating a heater of a second gas sensor and removing an encapsulant of the second gas sensor, when the abnormal operation of the first gas sensor is detected. 9. A gas sensor comprising: a heater; a detection material disposed on the heater; and an encapsulant disposed on the detection material and sealing the detection material from a detected gas, wherein the heater is operable to heat the encapsulant, and wherein the encapsulant directly contacts the heater.
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