Systems and methods for optical measurements using multiple beam interferometric sensors
US-2016327414-A1 · Nov 10, 2016 · US
Angle measuring method and angle measuring system
US9372099B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9372099-B2 |
| Application number | US-201514750643-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 25, 2015 |
| Priority date | Apr 3, 2013 |
| Publication date | Jun 21, 2016 |
| Grant date | Jun 21, 2016 |
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Abstract
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An angle measuring system including: a rotary encoder including an encoder main body and a rotating shaft which is freely rotatable with respect to the encoder main body, the rotary encoder which detects a relative rotation angle of the rotating shaft with respect to the encoder main body; a regulation member which regulates an absolute rotation angle of the encoder main body about the rotating shaft within a fixed range; an absolute angle detecting device which detects the absolute rotation angle of the encoder main body about the rotating shaft concurrently with detection of the relative rotation angle by the rotary encoder; and a correction device which corrects the rotation angle detected by the rotary encoder based on the rotation angle detected by the absolute angle detecting device.
First claim
Opening claim text (preview).
What is claimed is: 1. A rotation angle measuring system comprising: a rotary encoder configured to detect a relative rotation angle between a reference body and a rotationally driven rotating body which is configured rotatably with respect to the reference body, with reference to the reference body; and a laser interferometric detecting device configured to optically detect a rotation angle of the reference body from a stationary position separated from the reference body and the rotationally driven rotating body. 2. The rotation angle measuring system according to claim 1 , wherein the rotating body is configured all-round rotatably with respect to the reference body, and the rotary encoder continuously detects the relative rotation angle of the rotating body with reference to the reference body. 3. The rotation angle measuring system according to claim 1 , wherein the laser interferometric detecting device detects the rotation angle of the reference body concurrently with the detection of the relative rotation angle by the rotary encoder. 4. The rotation angle measuring system according to claim 1 , further comprising a correction device configured to correct the rotation angle detected by the rotary encoder based on the rotation angle detected by the laser interferometric detecting device. 5. The rotation angle measuring system according to claim 1 , wherein the laser interferometric detecting device is a laser interferometric detecting device configured to optically detect the rotation angle of the reference body using laser interference. 6. The rotation angle measuring system according to claim 1 , further comprising a regulation member configured to regulate the rotation angle of the reference body within a fixed range. 7. The rotation angle measuring system according to claim 6 , wherein the regulation member includes a weight member which urges a reference position of the reference body vertically downward.
Assignees
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Classifications
- G01D5/266Primary
by interferometric means (G01D5/353 takes precedence) · CPC title
the beams of light being detected by photocells · CPC title
using other sensors · CPC title
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Frequently asked questions
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- What does patent US9372099B2 cover?
- An angle measuring system including: a rotary encoder including an encoder main body and a rotating shaft which is freely rotatable with respect to the encoder main body, the rotary encoder which detects a relative rotation angle of the rotating shaft with respect to the encoder main body; a regulation member which regulates an absolute rotation angle of the encoder main body about the rotating…
- Who is the assignee on this patent?
- Tokyo Seimitsu Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification G01D5/266. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Jun 21 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).