Device, arrangement, and method for the interference structuring of planar samples

Patent metadata

Field	Value
Publication number	US-9370843-B2
Application number	US-201213984731-A
Country	US
Kind code	B2
Filing date	Feb 9, 2012
Priority date	Feb 10, 2011
Publication date	Jun 21, 2016
Grant date	Jun 21, 2016

Abstract

The invention relates to a device (and a corresponding method) for the interference structuring of a planar sample, comprising a laser, a focusing element, which is arranged in the beam path of the laser and by means of which the laser radiation can be focused in a first spatial direction, a first prism, in particular a biprism, which is arranged in the beam path of the laser and by means of which the laser radiation can be directed at a sample volume in a second spatial direction preferably perpendicular to the first spatial direction by means of two beams, in such a way that the two beams interfere within the sample volume in an interference area, the sample volume, in which the planar sample is or can be placed in the interference area, and a moving unit, by means of which the beam(s) of the laser radiation can be moved in the first, the second, or the first and second spatial directions and/or by means of which a/the sample can be moved in the sample volume in the first, the second, or the first and second spatial directions.

First claim

The invention claimed is:

1. An apparatus for the interference structuring of a planar sample, the apparatus comprising:
a laser;
a single-part or multipart focusing element that is arranged in a beam path of the laser and with which laser radiation can be focused in a first spatial direction;
a first prism, in particular a biprism, which is arranged in the beam path of the laser and with which the laser radiation in a second spatial direction can be directed into one or more beams of laser radiation onto a sample volume such that the one or more beams of laser radiation interfere within the sample volume in an interference region, wherein the planar sample can be positioned or is positioned in the interference region; and
a movement unit configured to perform at least one of moving the one or more beams of the laser radiation and moving the planar sample can be moved in the sample volume.

2. The apparatus in accordance with claim 1 wherein the focusing element is a cylindrical lens, a cylindrical lens having an F-theta objective arranged after it in the beam path, or is a cylindrical F-theta objective; or
the focusing element is configured such that the focus of the laser radiation can be held over a region scannable by means of the movement unit, in exactly one plane within the sample volume.

3. The apparatus in accordance with claim 1 , wherein the movement unit comprises one or more movable beam deflection elements that are arranged in the beam path of the laser, wherein the one or more movable beam deflection elements are at least one of rotatable and pivotable, and with which the one or more beams of the laser radiation can be moved in the first spatial direction, in the second spatial direction, or in the first and second spatial directions.

4. The apparatus in accordance with claim 3 ,
wherein the one or more beam deflection elements can be positioned or angle-adjusted by means of a galvanometer drive; or
the one or more beam deflection elements are arranged after the laser, before the focusing element, and before the first prism in the beam path and can be controlled such that the angle of incidence or the position of incidence of the beam path of the focusing element or the first prism following the beam deflection elements in the beam path can be varied.

5. The apparatus in accordance with claim 1 , wherein the movement unit has a movable displacement unit with which the sample can be displaced in translation or in rotation in the sample volume in a plane of the first and second spatial directions,
wherein the displacement unit is preferably configured so that the sample in the sample volume can be displaced by it perpendicular to the plane.

6. The apparatus in accordance with claim 1 , wherein the movement unit has a rotatable rotation unit with which the sample can be rotated in the sample volume about an axis.

7. The apparatus in accordance with claim 1 , wherein the focusing element is arranged before the first prism in the beam path of the laser; or
the focusing element is arranged after the first prism in the beam path of the laser.

8. The apparatus in accordance with claim 1 , wherein a beam expander is arranged in the beam path of the laser before the first prism or before the one or more beam deflection elements, with which beam expander the extent of the one or more beams of the laser radiation can be expanded only; or
a collimator is arranged in the beam path before the focusing element, before the first prism, or before the beam expander or the one or more beam deflection elements.

9. The apparatus in accordance with claim 1 , further comprising a second prism arranged before the first prism in the beam path of the laser, with which second prism the laser radiation can be split into two second beams that are at least partially separated from one another before two second beams are incident on the first prism and can be brought by the latter to interference in the sample volume.

10. The apparatus in accordance with claim 9 ,
wherein the second prism is arranged before the first prism and the first prism is arranged before the focusing element in the beam path of the laser; or
the second prism is arranged before the focusing element and the focusing element is arranged before the first prism in the beam path of the laser.

11. The apparatus in accordance with claim 1 , wherein the laser;
is a pulsed laser;
generates pulses having a pulse duration of larger than or equal to 0.01 ns and less than or equal to 1000 ns;
generates pulses having a pulse repetition rate of larger than or equal to 1 Hz and less than or equal to 100 MHz; or
has a wavelength in the IR range, in the UV range, or in the visible range.

12. The apparatus in accordance with claim 1 , wherein one or more of the following elements are arranged in the beam path of the laser:
a frequency multiplier;
an acousto-optical modulator;
a mechanical shutter;
a beam homogenizer configured for producing an intensity profile substantially constant over the beam cross-section; and
a polarizer.

13. An arrangement for the interference structuring, the arrangement comprising:
a base arranged at a fixed position in the global coordinate system; and
a kinematic unit connected to the base and movable with one of its ends relative to the base,
wherein an apparatus in accordance with claim 1 is fixed at the movable end of the kinematic unit.

14. A method for the interference structuring of a planar sample, wherein the structuring of the planar sample takes place by use of an apparatus or of an arrangement in accordance with claim 1 .

15. The apparatus in accordance with claim 1 , wherein the first prism comprises a biprism.

16. The apparatus in accordance with claim 1 , wherein the second spatial direction is orthogonal to the first spatial direction.

17. The apparatus in accordance with claim 1 , wherein the movement unit can move the one or more beams of the laser radiation in the first spatial direction, in the second spatial direction, or in the first and second spatial directions or the movement unit can move the planar sample in the sample volume in the first spatial direction, in the second spatial direction, or in the first and second spatial directions.

18. The apparatus in accordance with claim 3 , wherein the one or more movable beam deflection elements comprise at least one of one or more mirrors and one or more reflective prisms.

19. The apparatus in accordance with claim 8 , wherein the beam expander can expand the one or more beams of the laser radiation in the second spatial direction, but not in the first spatial direction, and can expand the one or more beams in parallel.

Assignees

• Lasagni Andrés Fabián
• Bever Eckhard
• Roch Teja
• Fraunhofer Ges Forschung

Inventors

• Lasagni Andrés Fabián
• Bever Eckhard
• Roch Teja

Classifications

• B23K26/0676 Primary

  into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations · CPC title

• G02B27/00

  Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 · CPC title

• G02B26/00

  Optical devices or arrangements for the control of light using movable or deformable optical elements (control of light by modification of the optical properties of the media of the elements involved therein G02F1/00) · CPC title

• G03H2001/0482

  Interference based printer · CPC title

• B23K26/0821

  using multifaceted mirrors, e.g. polygonal mirror · CPC title