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Waferstart processes and systems for integrated circuit fabrication

US9367882B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9367882-B2
Application numberUS-201213568449-A
CountryUS
Kind codeB2
Filing dateAug 7, 2012
Priority dateAug 7, 2012
Publication dateJun 14, 2016
Grant dateJun 14, 2016

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A waferstart process for integrated circuit fabrication includes entering order information from requested wafers into a computer through a data input interface of the computer. A container is provided including supplied wafers and having a machine-readable medium associated therewith. The machine-readable medium is encoded with wafer data pertaining to the supplied wafers. The wafer data is entered from the machine-readable medium associated with the container into the computer. The order information and the wafer data are compared within the computer to create a verified data set in the computer upon the computer determining that the supplied wafers in the container correspond to the requested wafers in the order information. The verified data set is stored in a storage medium within the computer. The supplied wafers are transferred from the container to a front opening unified pod after creating the verified data set.

First claim

Opening claim text (preview).

What is claimed is: 1. A waferstart system for integrated circuit fabrication, said waferstart system comprising: a computer including a data input interface and a storage medium, the computer configured to receive order information from requested wafers through the data input interface of the computer and to receive wafer data pertaining to supplied wafers; a stocker having a plurality of slots adapted to receive a container including supplied wafers with the container having a…

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Frequently asked questions

Answers are generated from the same data shown on this page.

What does patent US9367882B2 cover?
A waferstart process for integrated circuit fabrication includes entering order information from requested wafers into a computer through a data input interface of the computer. A container is provided including supplied wafers and having a machine-readable medium associated therewith. The machine-readable medium is encoded with wafer data pertaining to the supplied wafers. The wafer data is en…
Who is the assignee on this patent?
Genenncher Tony, Puelm Stephan, Foerster Michael, and 2 more
What technology area does this patent fall under?
Primary CPC classification G06Q50/04. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Jun 14 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).