Gate structures for transistor devices for CMOS applications and products

Patent metadata

Field	Value
Publication number	US-9362283-B2
Application number	US-201514793005-A
Country	US
Kind code	B2
Filing date	Jul 7, 2015
Priority date	Sep 4, 2013
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

An integrated circuit product includes an NMOS transistor having a gate structure that includes an NMOS gate insulation layer, a first NMOS metal layer positioned on the NMOS gate insulation layer, an NMOS metal silicide material positioned above the first NMOS metal layer, and a layer of a second metal material positioned above and in contact with the NMOS gate insulation layer, the first NMOS metal layer, and the NMOS metal silicide layer. The PMOS transistor has a gate structure that includes a PMOS gate insulation layer, a first PMOS metal layer positioned on the PMOS gate insulation layer, a PMOS metal silicide material positioned above the first PMOS metal layer, and a layer of the second metal material positioned above and in contact with the PMOS gate insulation layer, the first PMOS metal layer, and the PMOS metal silicide layer.

First claim

What is claimed:

1. An integrated circuit product, comprising:
an NMOS transistor, said NMOS transistor comprising:
an NMOS gate structure, comprising:
an NMOS gate insulation layer comprised of a high-k gate insulation material;
a first NMOS metal layer comprised of a first metal positioned on said NMOS gate insulation layer; and
an NMOS metal silicide material positioned above said first NMOS metal layer, said NMOS metal silicide material comprising a first amount of atomic silicon;

a first dielectric gate cap layer positioned above said NMOS gate structure; and
a first sidewall spacer positioned adjacent to and laterally confining sidewalls of said NMOS gate structure and sidewalls of said first dielectric gate cap layer; and

a PMOS transistor, said PMOS transistor comprising:
a PMOS gate structure, comprising:
a PMOS gate insulation layer comprised of said high-k gate insulation material;
a first PMOS metal layer comprised of said first metal positioned on said PMOS gate insulation layer; and
a PMOS metal silicide material positioned above said first PMOS metal layer, said PMOS metal silicide material comprising a second amount of atomic silicon, wherein said first and second amounts of atomic silicon are different;

a second dielectric gate cap layer positioned above said PMOS gate structure; and
a second sidewall spacer positioned adjacent to and laterally confining sidewalls of said PMOS gate structure and sidewalls of said second dielectric gate cap layer.

2. The device of claim 1 , wherein said first amount of atomic silicon is greater than said second amount of atomic silicon.

3. The device of claim 1 , wherein said NMOS metal silicide material comprises 50-95% atomic silicon.

4. The device of claim 1 , wherein said PMOS metal silicide material comprises 2-40% atomic silicon.

5. The device of claim 1 , wherein said NMOS metal silicide material and said PMOS metal silicide material are one of tungsten silicide, hafnium silicide, tantalum silicide, titanium silicide, nickel silicide, nickel-platinum silicide, a silicide of a refractory metal, and a silicide of a transition metal.

6. The device of claim 1 , wherein said NMOS metal silicide material and said PMOS metal silicide material are comprised of the same metal silicide material.

7. The device of claim 1 , wherein said NMOS metal silicide material and said PMOS metal silicide material are comprised of different metal silicide materials.

8. The device of claim 1 , wherein the difference between said first and second amounts of atomic silicon is at least 10 atomic percent.

9. The device of claim 1 , wherein said NMOS gate structure further comprises a second metal layer positioned above said NMOS gate insulation layer, said first NMOS metal layer, and said NMOS metal silicide material.

10. The device of claim 9 , wherein said NMOS gate insulation layer comprises a horizontal bottom portion positioned above an active region of said NMOS transistor and vertical sidewall portions positioned adjacent to inside sidewalls of said first sidewall spacer, and wherein said vertical sidewall portions of said NMOS gate insulation layer are positioned below said second metal layer and laterally confine said first NMOS metal layer and said NMOS metal silicide material.

11. The device of claim 10 , wherein said first NMOS metal layer comprises a horizontal bottom portion positioned above said horizontal bottom portion of said NMOS gate insulation layer and vertical sidewall portions positioned adjacent said vertical sidewall portions of said NMOS gate insulation layer, and wherein said vertical sidewall portions of said first NMOS metal layer are positioned below said second metal layer and laterally confine said NMOS metal silicide material.

12. The device of claim 1 , wherein said PMOS gate structure further comprises a second metal layer positioned above said PMOS gate insulation layer, said first PMOS metal layer, and said PMOS metal silicide material.

13. The device of claim 12 , wherein said PMOS gate insulation layer comprises a horizontal portion positioned above an active region of said PMOS transistor and vertical sidewall portions positioned adjacent to inside sidewalls of said second sidewall spacer, and wherein said vertical sidewall portions of said PMOS gate insulation layer are positioned below said second metal layer and laterally confine said first PMOS metal layer and said PMOS metal silicide material.

14. The device of claim 13 , wherein said first PMOS metal layer comprises a horizontal bottom portion positioned above said horizontal bottom portion of said PMOS gate insulation layer and vertical sidewall portions positioned adjacent said vertical sidewall portions of said PMOS gate insulation layer, and wherein said vertical sidewall portions of said first PMOS metal layer are positioned below said second metal layer and laterally confine said PMOS metal silicide material.

15. An integrated circuit product, comprising:
an NMOS transistor having an NMOS gate structure comprised of:
an NMOS gate insulation layer comprised of a high-k gate insulation material;
a first NMOS metal layer comprised of a first metal material positioned on said NMOS gate insulation layer;
an NMOS metal silicide material positioned above said first NMOS metal layer, said NMOS metal silicide material comprising 50-95% atomic silicon; and
a layer of a second metal material positioned above and in contact with each of said NMOS gate insulation layer, said first NMOS metal layer, and said NMOS metal silicide layer; and

a PMOS transistor having a PMOS gate structure comprised of:
a PMOS gate insulation layer comprised of said high-k gate insulation material;
a first PMOS metal layer comprised of said first metal material positioned on said PMOS gate insulation layer;
a PMOS metal silicide material positioned above said first PMOS metal layer, said PMOS metal silicide material comprising 2-40% atomic silicon; and
a layer of said second metal material positioned above and in contact with each of said PMOS gate insulation layer, said first PMOS metal layer, and said PMOS metal silicide layer.

16. The device of claim 15 , wherein said NMOS metal silicide material and said PMOS metal silicide material are comprised of the same metal silicide material.

17. The device of claim 15 , wherein said NMOS metal silicide material and said PMOS metal silicide material are comprised of different metal silicide materials.

18. The device of claim 15 , wherein said NMOS transistor further comprises a first dielectric gate cap layer positioned above said NMOS gate structure and a first sidewall spacer positioned adjacent to and laterally confining sidewalls of said NMOS gate structure and sidewalls of said first dielectric gate cap layer, and wherein said PMOS transistor further comprises a second dielectric gate cap layer positioned above said PMOS gate structure and a second sidewall spacer positioned adjacent to and laterally confining sidewalls of said PMOS gate structure and sidewalls of said second dielectric gate cap layer.

19. An integrated circuit product, comprising:
an NMOS transistor, said NMOS transistor comprising:
an NMOS gate structure, comprising:
an NMOS gate insulation layer comprised of a high-k gate insulation material, wherein said NMOS gate insulation layer comprises a first horizontal bottom portion positioned above an active region of said NMOS transistor and first vertical sidewall portions that define a portion of a sidewall of said NMOS gate structure;
a first NMO

Assignees

• Globalfoundries Inc

Inventors

• Hong Zhendong
• Tzeng Susie
• Joshi Amol
• Bodke Ashish
• Pisharoty Divya
• Raghuram Usha
• Karlsson Olov
• Choi Kisik
• Mujumdar Salil
• Besser Paul R
• Liu Jinping
• Kim Hoon

Classifications

• H10D64/01342

  by deposition, e.g. evaporation, ALD or laser deposition (H10D64/01344 takes precedence) · CPC title

• H10D64/0134

  with a treatment, e.g. annealing, after the formation of the insulator and before the formation of the conductor · CPC title

• H10D64/0132

  the conductor being a metallic silicide · CPC title

• H10D84/0174

  the gate conductors being silicided · CPC title

• H10D84/85 Primary

  Complementary IGFETs, e.g. CMOS · CPC title