Integrated circuit having multiple threshold voltages

Patent metadata

Field	Value
Publication number	US-9362180-B2
Application number	US-201414189085-A
Country	US
Kind code	B2
Filing date	Feb 25, 2014
Priority date	Feb 25, 2014
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

In one aspect there is set forth herein an integrated circuit having a first plurality of field effect transistors and a second plurality of field effect transistor, wherein field effect transistors of the first plurality of field effect transistors each have a first gate stack and wherein field effect transistors of the second plurality of field effect transistors each have a second gate stack, the second gate stack being different from the first gate stack by having a metal layer common to the first gate stack and the second gate stack that includes a first thickness at the first gate stack and a second thickness at the second gate stack.

First claim

What is claimed is:

1. An integrated circuit comprising:
a substrate structure;
a first plurality of field effect transistors formed in the substrate structure, a second plurality of field effect transistors formed in the substrate structure, a third plurality of field effect transistors formed in the substrate structure, and a fourth plurality of field effect transistors formed in the substrate structure;
wherein field effect transistors of the first plurality of field effect transistors each have a first channel polarity and a first gate stack comprising a dielectric layer, a first conductive cap layer overlying the dielectric layer, a second conductive cap layer overlying the first cap layer, a first work function layer overlying the second conductive cap layer, and a metal layer overlying the first work function layer;
wherein field effect transistors of the second plurality of field effect transistors each have a second gate stack that comprises the layers of the first gate stack and the first channel polarity, the first conductive cap layer including a first thickness at the first gate stack and a second thickness at the second gate stack, wherein the second thickness is different from the first thickness;
wherein field effect transistors of the third plurality of field effect transistors each have a third gate stack and a channel polarity opposite the first channel polarity, the third gate stack comprising the layers of the first and second gate stacks and a second work function layer positioned between the second conductive cap layer and the first work function layer;
wherein field effect transistors of the fourth plurality of field effect transistors each have a fourth gate stack that comprises the layers of the third gate stack and a channel polarity opposite the first channel polarity, the first conductive cap layer including the first thickness at the fourth gate stack and the second thickness at the third gate stack;
wherein the second gate stack has a gate material sequence in common with the first gate stack, wherein the fourth gate stack has a gate material sequence in common with the third gate stack, and wherein the third gate stack has a gate material sequence that is different from a gate material sequence of the first gate stack;
wherein field effect transistors of the first plurality of field effect transistors each have a first Vt, and wherein field effect transistors of the second plurality of field effect transistors each have a second Vt, the second Vt being different from the first Vt.

2. The integrated circuit of claim 1 , wherein the first conductive cap layer includes at least one of TiN, TaN and TiC.

3. The integrated circuit of claim 1 , wherein the second conductive cap layer comprises an etch stop layer.

4. The integrated circuit of claim 1 , wherein the field effect transistors of the first plurality of field effect transistors and the field effect transistors of the second plurality of field effect transistors have common gate lengths.

5. The integrated circuit of claim 1 , wherein the first Vt is a low voltage Vt and wherein the second Vt is a regular voltage Vt.

6. A method for fabricating an integrated circuit, the method comprising:
depositing a plurality of gate stack layers, wherein the depositing includes varying a depositing of gate stack layers between first, second, third and fourth regions of a substrate structure so that there is defined at the first region of the substrate structure a first gate stack of a first field effect transistor having a first channel polarity and further so that there is defined at the second region of the substrate structure a second gate stack of a second field effect transistor having the first channel polarity and further so that there is defined at the third region of the substrate structure a third gate stack of a third field effect transistor having a second channel polarity opposite the first channel polarity and further so that there is defined at the fourth region of the substrate structure a fourth gate stack of a fourth field effect transistor having the second channel polarity,
wherein the first gate stack and the second gate stake comprise a dielectric layer, a first conductive cap layer overlying the dielectric layer, a second conductive cap layer overlying the first conductive cap layer, a first work function layer overlying the second conductive cap layer, and a metal layer overlying the first work function layer, and wherein the third gate stack and the fourth gate stake comprise the dielectric layer, the first conductive cap layer overlying the dielectric layer, the second conductive cap layer overlying the first conductive cap layer, the first work function layer overlying the second conductive cap layer, a second work function layer underlying the first work function layer and the metal layer overlying the second work function layer;
wherein the depositing is performed so that the first conductive cap layer includes a first thickness at the first gate stack and the third gate stack and a second thickness at the second gate stack and the fourth gate stack, wherein the second thickness is different from the first thickness;
wherein the depositing is performed so that the second gate stack has a gate material sequence in common with the first gate stack, wherein the fourth gate stack has a gate material sequence in common with the third gate stack, and wherein the third gate stack has a gate material sequence that is different from a gate material sequence of the first gate stack;
wherein the fabricating is performed so that the first field effect transistor includes a first threshold voltage and further so that the second field effect transistor includes a second threshold voltage, the second threshold voltage being different from the first threshold voltage.

7. The method of claim 6 , wherein the depositing is performed so that there is defined at the first region of the substrate structure a first plurality of field effect transistors, each having the first gate stack and further so that there is defined at the second region of the substrate structure a second plurality of field effect transistors, each having the second gate stack being different from the first gate stack.

8. The method of claim 6 , wherein the first conductive cap layer includes TiN, and wherein the depositing includes depositing in the first region a first sublayer of TiN, depositing in the first region a sacrificial amorphous silicon layer on the first sublayer of TiN, and depositing in the first region a second sublayer of TiN on the first sublayer of TiN after removal of the amorphous silicon layer to form the first conductive cap layer.

9. The method of claim 6 , wherein the first conductive cap layer includes TaN.

10. The method of claim 6 , wherein the first conductive cap layer includes TiC.

11. The method of claim 6 , wherein the second conductive cap layer comprises an etch stop layer.

12. The method of claim 6 , wherein the varying a depositing includes using a mask patterned to include an opening in the second region to facilitate removal of material from the first conductive cap layer in the second region without removing material of the first conductive cap layer from the first region.

13. The method of claim 6 , wherein the fabricating is performed so that a source and drain of the first field effect transistor and the second field effect transistor are formed in a common material layer defining the substrate structure.

14. The integrated circuit of claim 1 , wherein the thickness of the second work function layer at the third gate stack is the same as at the four

Assignees

• Globalfoundries Inc

Inventors

• Lee Bongki
• Liu Jin Ping
• Joshi Manoj
• Eller Manfred
• Pal Rohit
• Carter Richard J
• Samavedam Srikanth Balaji

Classifications

• H10D64/01318

  the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN (comprising a layer of alloys of Si, Ge or C H10D64/01314) · CPC title

• H10D64/017

  using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes · CPC title

• H10D84/856

  the complementary IGFETs having different architectures than each other, e.g. high-voltage and low-voltage CMOS · CPC title

• H10D84/853

  comprising FinFETs · CPC title

• H10D84/834

  comprising FinFETs · CPC title