Confocal optical scanner

Patent metadata

Field	Value
Publication number	US-9360665-B2
Application number	US-201514620272-A
Country	US
Kind code	B2
Filing date	Feb 12, 2015
Priority date	Feb 17, 2014
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

A confocal optical scanner according to one aspect of the present invention includes an optical filter. The optical filter includes a plate-shaped body including a first surface and a second surface opposite to the first surface. The first surface has a plurality of pinholes. The optical filter further includes a plurality of first microlenses on the second surface. The first microlenses are disposed nearly coaxially with the pinholes, respectively.

First claim

What is claimed is:

1. A confocal optical scanner for a microscope comprising an optical filter, the optical filter comprising:
a plate-shaped body including a first surface and a second surface opposite to the first surface, the first surface having a plurality of pinholes; and
a plurality of first microlenses on the second surface, the first microlenses being disposed nearly coaxially with the pinholes, respectively,
wherein the optical filter is configured to increase a numerical aperture of light input from a specimen and to output the light having the increased numerical aperture.

2. The confocal optical scanner for the microscope according to claim 1 , wherein the confocal optical scanner further comprises a motor connected to the body and configured to rotate the optical filter,
the optical filter is a disk-shaped filter,
each first microlens is a convex lens, and
the second surface of the body faces the specimen.

3. The confocal optical scanner for the microscope according to claim 1 , wherein the confocal optical scanner further comprises:
a light source device configured to output illumination light for illuminating the specimen; and
a galvanic mirror configured to reflect the illumination light output from the light source device, and a direction of a surface of the galvanic mirror being variable with respect to a light axis of the illumination light,
the optical filter is an array type filter,
each first microlens is a convex lens, and
the second surface of the body is disposed to receive return light from the specimen.

4. The confocal optical scanner for the microscope according to claim 1 , wherein the confocal optical scanner further comprises a motor connected to the body and configured to rotate the optical filter,
the optical filter is a disk-shaped filter,
each first microlens is a convex lens,
the second surface of the body faces the specimen,

the optical filter includes concave mirrors disposed on the first surface of the body, and
each pinhole is disposed coaxially with the center of each concave mirror.

5. The confocal optical scanner for the microscope according to claim 1 , wherein the confocal optical scanner further comprises an intermediate variable magnification optical system.

6. The confocal optical scanner for the microscope according to claim 5 , wherein the intermediate variable magnification optical system comprises a first lens and a second lens.

7. The confocal optical scanner for the microscope according to claim 6 , wherein the intermediate variable magnification optical system is configured to increase a numerical aperture of light input from the first lens and to output the light having the increased numerical aperture from the second lens and to reduce a numerical aperture of light input from the second lens and to output the light having the reduced numerical aperture from the first lens.

8. The confocal optical scanner for the microscope according to claim 1 , wherein the optical filter is configured to increase the numerical aperture of the light input from the specimen in the range of 1.2 times to 4 times as large as before, and to output the light having the increased numerical aperture.

9. The confocal optical scanner for the microscope according to claim 1 , wherein the optical filter includes a light shielding mask disposed on the first surface of the body, and
each pinhole is an opening of the light shielding mask.

10. The confocal optical scanner for the microscope according to claim 1 , wherein
the confocal optical scanner further comprises a microlens disk opposite to the optical filter, and
a plurality of second microlenses is disposed on the microlens disk.

11. The confocal optical scanner for the microscope according to claim 10 , wherein
each second microlens is configured to divide illumination light into a plurality of illumination light beamlets, and
each pinhole of the body is configured to allow one illumination light beamlet of the illumination light beamlets, which has been passed through the second microlens positioned opposite to the pinhole, to pass through.

12. The confocal optical scanner for the microscope according to claim 11 , wherein each first microlens is configured to reduce a numerical aperture of the illumination light beamlet and to output the illumination light beamlet having the reduced numerical aperture.

13. A confocal optical scanner for a microscope comprising:
an optical filter, the optical filter comprising:
a plate-shaped body including a first surface and a second surface opposite to the first surface, the first surface having a plurality of pinholes; and
a plurality of first microlenses on the second surface, the first microlenses being disposed nearly coaxially with the pinholes, respectively, and

a motor connected to the body and configured to rotate the optical filter,
wherein
the optical filter is a disk-shaped filter,

each first microlens is a concave lens, and
the first surface of the body faces a specimen.

14. A confocal optical scanner for a microscope comprising:
an optical filter, the optical filter comprising:
a plate-shaped body including a first surface and a second surface opposite to the first surface, the first surface having a plurality of pinholes; and
a plurality of first microlenses on the second surface, the first microlenses being disposed nearly coaxially with the pinholes, respectively,

a light source device configured to output illumination light for illuminating a specimen; and
a galvanic mirror configured to reflect the illumination light output from the light source device, and a direction of a surface of the galvanic mirror being variable with respect to a light axis of the illumination light,
wherein
the optical filter is an array type filter,
each first microlens is a concave lens, and
the first surface of the body is disposed to receive return light from the specimen.

Assignees

• Yokogawa Electric Corp

Inventors

• Azuma Takuya

Classifications

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G02B26/10

  Scanning systems · CPC title

• G02B21/0044 Primary

  moving apertures, e.g. Nipkow disks, rotating lens arrays · CPC title

• G02B26/0875 Primary

  by means of one or more refracting elements · CPC title

• G02B21/0048

  scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors · CPC title