Increasing current carrying capability through direct liquid cooling of test contacts

Patent metadata

Field	Value
Publication number	US-9360502-B2
Application number	US-201113976013-A
Country	US
Kind code	B2
Filing date	Dec 31, 2011
Priority date	Dec 31, 2011
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

Testing methods and systems are described. One method for testing an electronic device includes providing a probe in electrical contact with a device. The method also includes positioning an interface of the probe and the device in a liquid medium. The method also includes transmitting a current from the probe through the interface while the interface is in the liquid medium. Other embodiments are described and claimed.

First claim

What is claimed:

1. A method for testing an electronic device, comprising:
providing a probe in electrical contact with a device;
positioning an interface of the probe and the device so that the interface is surrounded by a liquid medium;
transmitting a current from the probe through the interface while the interface is surrounded by the liquid medium; and
controlling the transmitting the current to generate heat so that an amount of the liquid medium boils.

2. The method of claim 1 , wherein the probe has a length and at least part of the length of the probe is in the liquid medium during the transmitting the current.

3. The method of claim 1 , wherein the probe has a length and the entire length of the probe is in the liquid medium.

4. The method of claim 1 , wherein the probe is positioned in a test head, and the test head is positioned in the liquid medium.

5. The method of claim 1 , wherein the liquid medium is a halogenated liquid.

6. The method of claim 1 , further comprising circulating the liquid medium over the interface during the transmitting the current.

7. The method of claim 1 , further comprising cooling the liquid medium during the transmitting the current.

8. The method of claim 1 , further comprising providing the liquid medium at a temperature within 10° C. of its freezing temperature during the transmitting the current.

9. The method of claim 1 , further comprising circulating the liquid medium over the interface and providing the liquid medium at a temperature within 10° C. of its freezing temperature during the transmitting the current.

10. A method comprising:
positioning a plurality of test probes in electrical contact with a device, the test probes each having a length; and
conducting electrical testing of the device while at least a portion of the length of the test probes is in a liquid medium comprising a halogenated liquid; wherein the conducting electrical testing comprises applying a sufficient current through the test probes so that heat is generated in the liquid medium and a quantity of the liquid medium is boiled.

11. The method of claim 10 , wherein the electrical contact between the test probes and the device is on pads, further comprising conducting the electrical testing while the pads are in the liquid medium.

12. The method of claim 11 , further comprising circulating a quantity of the liquid medium over an interface of the test probes and the pads during the electrical testing.

13. The method of claim 12 , further comprising providing the liquid medium at a temperature within 10° C. of its freezing temperature during the electrical testing.

14. The method of claim 12 , wherein the quantity of the liquid medium that is boiled is positioned adjacent to the interface.

15. The method of claim 10 , wherein the test probes are positioned in a test head, further comprising positioning the test head in the liquid medium during the conducting electrical testing.

16. The method of claim 10 , further comprising cooling the liquid medium during the electrical testing.

17. The method of claim 10 , further comprising providing the liquid medium at a temperature within 10° C. of its freezing temperature during electrical testing.

18. A system comprising:
an electronic device including contact regions;
a testing mechanism including a plurality of test probes, the test probes adapted to touch the contact regions during electrical testing;
a container, wherein the container is adapted to house the contact regions and at least a portion of the test probes in a liquid medium during the electrical testing; and
a cooling mechanism adapted to control a temperature of the liquid medium;
the testing mechanism configured to transmit a sufficient current through the test probes during the electrical testing so that heat is generated in the liquid medium and a quantity of the liquid medium is boiled.

19. The system of claim 18 , further comprising a pump adapted to transmit the liquid medium during testing.

20. The system of claim 18 , further comprising a test head into which the test probes are positioned.

21. The system of claim 20 , wherein the container is sized to hold at least part of the test head in the liquid medium during testing.

22. The system of claim 21 , wherein the container is sized to contain a wafer on which the electronic device is located.

23. The system of claim 18 , further comprising a quantity of the liquid medium in the container, the liquid medium comprising a halogenated material.

Assignees

• Crippen Warren S
• Grossman Brett
• Swart Roy E
• Tadayon Pooya
• Intel Corp

Inventors

• Crippen Warren S
• Grossman Brett
• Swart Roy E
• Tadayon Pooya

Classifications

• G01R1/067

  Measuring probes · CPC title

• G01R31/2877 Primary

  related to cooling · CPC title

• G01R1/44 Primary

  Modifications of instruments for temperature compensation · CPC title