Amplifier-embedded pressure sensor

Patent metadata

Field	Value
Publication number	US-9360386-B2
Application number	US-201314090255-A
Country	US
Kind code	B2
Filing date	Nov 26, 2013
Priority date	Dec 13, 2012
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

An amplifier-embedded pressure sensor includes: a pressure-detecting element which detects the differential pressure between the fluid and the space where the pipe including a fluid passage of the fluid is installed, and outputs the pressure signal; an amplifier circuit board having an amplifier circuit for amplifying the pressure signal; a housing to which the pressure-detecting element is fixed; and a separation part which is fixed to the housing and separates a space inside the housing into a first space where the pressure-detecting element is disposed and a second space where the amplifier circuit board is disposed. The housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space.

First claim

The invention claimed is:

1. An amplifier-embedded pressure sensor, which is connected to a pipe including a fluid passage, comprising:
a pressure detector which has a pressure-receiving surface in contact with a fluid flowing in from the pipe, and which detects a differential pressure between the fluid in contact with the pressure-receiving surface and a space where the pipe is installed and outputs a pressure signal;
an amplifier circuit board which has an amplifier circuit for amplifying the pressure signal detected by the pressure detector;
a housing to which the pressure detector is fixed; and
a separator which is fixed to the housing and separates a space inside the housing into a first space where the pressure detector is disposed and a second space where the amplifier circuit board is disposed, wherein
the housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space, and
wherein the amplifier circuit board is disposed between the inflow port and the discharge port so that the cooling gas flowing in from the inflow port cools one side of the amplifier circuit board and passes between the amplifier circuit board and the housing to cool the other side of the amplifier circuit board, and thereafter is discharged from the discharge port.

2. The amplifier-embedded pressure sensor according to claim 1 , wherein
a fluid chamber is formed by the pressure-receiving surface of the pressure detector and a surface of the housing opposite to the pressure-receiving surface,
the housing includes a first passage which communicates with an external passage and a second passage which connects the first passage and the fluid chamber, and
a passage diameter of the second passage is smaller than a passage diameter of the first passage.

3. The amplifier-embedded pressure sensor according to claim 2 , wherein
a passage length of the second passage is longer than a passage length of the first passage.

4. The amplifier-embedded pressure sensor according to claim 1 , wherein the separation part separator includes a separation board having an outer circumferential surface of a shape substantially matching a shape of an inner circumferential surface of the housing, and a filling material which is packed between the outer circumferential surface of the separation board and the inner circumferential surface of the housing so as not to allow the cooling gas to flow through.

5. The amplifier-embedded pressure sensor according to claim 1 , wherein an opening diameter of the discharge port to the second space is larger than an opening diameter of the inflow port to the second space.

6. An amplifier-embedded pressure sensor, which is connected to a pipe including a fluid passage, comprising:
a pressure detector which has a pressure-receiving surface in contact with a fluid flowing in from the pipe, and which detects a differential pressure between the fluid in contact with the pressure-receiving surface and a space where the pipe is installed and outputs a pressure signal;
an amplifier circuit board which has an amplifier circuit for amplifying the pressure signal detected by the pressure detector;
a housing to which the pressure detector is fixed; and
a separator which is fixed to the housing and separates a space inside the housing a first space where the pressure detector is disposed and a second space where the amplifier circuit board is disposed; and
a coupler to which an external wire for transmitting the pressure signal amplified by the amplifier circuit to an external device is coupled, wherein:
the housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space, and
the first space communicates with a space near the external device through a third space between the external wire and cladding that clads the external wire.

7. An amplifier-embedded pressure sensor, which is connected to a pipe including a fluid passage, comprising:
a pressure detector which has a pressure-receiving surface in contact with a fluid flowing in from the pipe, and which detects a differential pressure between the fluid in contact with the pressure-receiving surface and a space where the pipe is installed and outputs a pressure signal;
an amplifier circuit board which has an amplifier circuit for amplifying the pressure signal detected by the pressure detector;
a housing to which the pressure detector is fixed; and
a separator which is fixed to the housing and separates a space inside the housing into a first space where the pressure detector is disposed and a second space where the amplifier circuit board is disposed, wherein:
the housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space,
a fluid chamber is formed by the pressure-receiving surface of the pressure detector and a surface of the housing opposite to the pressure-receiving surface,
the housing includes a first passage which communicates with an external passage and a second passage which connects the first passage and the fluid chamber,
a passage diameter of the second passage is smaller than a passage diameter of the first passage,
a diameter of the outer circumferential surface of the second passage is smaller than a diameter of the outer circumferential surface of the first passage, and
a support is provided which is disposed so as to surround the second passage over its passage length, and supports the second passage in a state where the space close to the outer circumferential surface of the second passage communicates with the external space.

8. An amplifier-embedded pressure sensor, which is connected to a pipe including a fluid passage, comprising:
a pressure detector which has a pressure-receiving surface in contact with a fluid flowing in from the pipe, and which detects a differential pressure between the fluid in contact with the pressure-receiving surface and a space where the pipe is installed and outputs a pressure signal;
an amplifier circuit board which has an amplifier circuit for amplifying the pressure signal detected by the pressure detector;
a housing to which the pressure detector is fixed; and
a separator which is fixed to the housing and separates a space inside the housing into a first space where the pressure detector is disposed and a second space where the amplifier circuit board is disposed;
a first wire which transmits the pressure signal from the pressure detector to the separator;
a second wire which transmits the pressure signal from the separator to the amplifier circuit board; and
a third wire which transmits the pressure signal amplified by the amplifier circuit from the amplifier circuit board to the separator, wherein:
the housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space,
the separator includes a first terminal, to which the first wire is connected, on a first space-side surface thereof, and a second terminal, to which the second wire is connected, on a second space-side surface thereof, and
the first terminal and the second terminal are electrically connected with each other.

Assignees

• Surpass Ind Co Ltd

Inventors

• Takanohashi Toshiyuki

Classifications

• G01L9/0041 Primary

  Transmitting or indicating the displacement of flexible diaphragms · CPC title

• G01L19/0038

  being part of the housing (other details about the housing G01L19/14) · CPC title

• G01L19/0681

  Protection against excessive heat · CPC title

• G01F1/36 Primary

  the pressure or differential pressure being created by the use of flow constriction · CPC title

• G01F1/363

  with electrical or electro-mechanical indication (G01F1/37 and G01F1/38 take precedence) · CPC title