Low temperature deposition apparatus

Patent metadata

Field	Value
Publication number	US-9359667-B2
Application number	US-201213602668-A
Country	US
Kind code	B2
Filing date	Sep 4, 2012
Priority date	Jan 9, 2012
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

A low temperature deposition device according to the present invention includes: a thermal deposition source unit spraying a deposition beam; a differential pumping unit connected to the thermal deposition source unit and passing the deposition beam; and a cooling gas inlet connected to the differential pumping unit and inserting a cooling gas inside the differential pumping unit to cool the deposition beam. According to the present invention, the inorganic deposition beam of low temperature is deposited on the substrate to form the inorganic metal layer of low temperature so that the damage to the organic layer may be minimized when forming the inorganic metal layer of low temperature on the organic layer.

First claim

What is claimed is:

1. A low temperature deposition device, comprising:
a thermal deposition source unit for spraying a deposition beam;
a differential pumping unit connected to the thermal deposition source unit for passing the deposition beam;
wherein the differential pumping unit comprises a first high vacuum unit, a second high vacuum unit, and a low vacuum unit disposed between the first high vacuum unit and the second high vacuum unit; and
wherein a first high vacuum pump of the first high vacuum unit is disposed at a same height as a first low vacuum pump of the low vacuum unit, and a second high vacuum pump of the second high vacuum unit is disposed at a same height as a second low vacuum pump of the low vacuum unit; said low temperature deposition device further comprising a cooling gas inlet connected to the low vacuum unit for inserting a cooling gas inside the differential pumping unit so as to cool the deposition beam.

2. The low temperature deposition device of claim 1 , wherein:
the first high vacuum unit is connected to the thermal deposition source unit;
the low vacuum unit is connected to the first high vacuum unit; and
the second high vacuum unit is connected to the low vacuum unit.

3. The low temperature deposition device of claim 2 , further comprising:
a first deposition hole formed in a first boundary wall dividing the first high vacuum unit and the low vacuum unit for passing the deposition beam; and
a second deposition hole formed in a second boundary wall dividing the low vacuum unit and the second high vacuum unit for passing the deposition beam.

4. The low temperature deposition device of claim 1 , wherein the first high vacuum unit includes a first high vacuum deposition tube directly connected to the thermal deposition source unit for passing the deposition beam, and wherein a first high vacuum pump tube is connected to the first high vacuum deposition tube and to the first high vacuum pump.

5. The low temperature deposition device of claim 4 , wherein the second high vacuum unit includes a second high vacuum deposition tube for passing the deposition beam, and wherein a second high vacuum pump tube is connected to the second high vacuum deposition tube and to the second high vacuum pump.

6. The low temperature deposition device of claim 5 , wherein the low vacuum unit includes a first low vacuum pump tube disposed parallel to the first high vacuum pump tube, a second low vacuum pump tube disposed parallel to the second high vacuum pump tube, and a low vacuum deposition tube connecting the first low vacuum pump tube and the second low vacuum pump tube to each other for passing the deposition beam.

Assignees

• Han Kyul
• Kwon O-Hyun
• Shin Dong-Woo
• Kim Seul-Ong
• Choi Byoung-Ki
• Samsung Display Co Ltd

Inventors

• Han Kyul
• Kwon O-Hyun
• Shin Dong-Woo
• Kim Seul-Ong
• Choi Byoung-Ki

Classifications

• C23C14/20

  on organic substrates · CPC title

• C23C14/12 Primary

  Organic material · CPC title

• C23C14/541

  Heating or cooling of the substrates · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• H10K71/00 Primary

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title