Storage shelf

Patent metadata

Field	Value
Publication number	US-9359135-B2
Application number	US-201414767061-A
Country	US
Kind code	B2
Filing date	Feb 12, 2014
Priority date	Feb 12, 2013
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

A storage shelf reduces vibration while maintaining load-carrying capacity and includes placement units on which a FOUP is placed, and a frame unit that supports the placement units. The placement units include frames that are arranged on the frame unit with first elastic bodies interposed therebetween, and a shelf plate that is arranged on the frames with second elastic bodies interposed therebetween and is configured to place thereon the FOUP.

First claim

The invention claimed is:

1. A storage shelf configured to reduce the vibration of objects stored thereon, the storage shelf comprising: a placement unit on which an object is able to be placed; and a frame unit that supports the placement unit; wherein the placement unit includes:
a frame that is arranged on a frame unit with a first elastic body interposed therebetween; and
a shelf plate that is arranged on the frame with a second elastic body interposed therebetween and on which the object is to be placed;
wherein the frame unit includes a pair of beam members facing each other; the frame is disposed over the pair of beam members and includes: a concave portion positioned between the pair of beam members and including a base portion extending in an opposing direction of the pair of beam members and a pair of raised portions that are raised from both ends of the base portion; and overhanging portions that overhang from ends of the raised portions and are mounted on the beam members each with the first elastic body interposed therebetween; and the second elastic body is arranged on the concave portion of the frame.

2. The storage shelf according to claim 1 , wherein, when in use, the object is a front-opening unified pod configured to accommodate therein wafers;
the placement unit includes a third elastic body arranged between the frame and the shelf plate, the third elastic body having a rigidity higher than those of the first and the second elastic bodies; and
the third elastic body is arranged on a side where a lid of the front-opening unified pod is positioned when the front-opening unified pod is placed on the shelf plate.

3. The storage shelf according to claim 1 , wherein the frame unit is capable of being secured to a rail of a traveling vehicle.

Assignees

• Murata Machinery Ltd

Inventors

• Nagamine Shohei

Classifications

• H10P72/3404 Primary

  Storage means · CPC title

• F16F15/08

  with rubber springs {(grommet- or bushing-type resilient mountings F16F1/3732, F16F1/38); with springs made of rubber and metal (arrangement of internal-combustion or jet-propulsion units B60K5/12; mounting of propulsion plants on vessels B63H21/30; mounting of vehicle drivers' cabs B62D33/0604)} · CPC title

• A47B55/00 Primary

  Cabinets, racks or shelf units, having essential features of rigid construction (safes E05G) · CPC title

• B65G2201/0297

  Wafer cassette · CPC title

• B65G2207/20

  Earthquake protection · CPC title