Elongated capacitively coupled plasma source for high temperature low pressure environments

Patent metadata

Field	Value
Publication number	US-9355819-B2
Application number	US-201414460683-A
Country	US
Kind code	B2
Filing date	Aug 15, 2014
Priority date	Aug 16, 2013
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

A modular plasma source assembly for use with a processing chamber is described. The assembly includes an RF hot electrode with an end dielectric and a sliding ground connection positioned adjacent the sides of the electrode. A seal foil connects the sliding ground connection to the housing to provide a grounded sliding ground connection separated from the hot electrode by the end dielectric. A coaxial feed line passes through a conduit into the RF hot electrode isolated from the processing environment so that the coaxial RF feed line is at atmospheric pressure while the plasma processing region is at reduced pressure.

First claim

What is claimed is:

1. A modular plasma source assembly comprising:
an elongate housing having a side wall, an electrically grounded front face and a gas volume;
an elongate RF hot electrode within the housing, the elongate RF hot electrode having a front face, a back face, elongate sides and a first end and a second end defining an elongate axis, the elongate RF hot electrode spaced from the front face to form a gap between the front face of the RF hot electrode and the front face of the elongate housing;
an end dielectric in contact with each of the first end and the second end of the RF hot electrode and between the RF hot electrode and the side wall;
a sliding ground connection positioned at one or more of the first end and the second end of the RF hot electrode opposite the end dielectric, the sliding ground connection isolated from direct contact with the RF hot electrode by the end dielectric;
a seal foil positioned at each sliding ground connection opposite the end dielectric, the seal foil forming an electrical connection between the front face of the elongate housing and the sliding ground connection; and
a coaxial RF feed line passing through the elongate housing, the coaxial RF feed line including an outer conductor and an inner conductor separated by an insulator, the outer conductor in communication with electrical ground and the inner conductor in electrical communication with the elongate RF hot electrode.

2. The modular plasma source assembly of claim 1 , further comprising:
a dielectric spacer within the housing and positioned adjacent the back face of the elongate RF hot electrode; and
a grounded plate within the housing and positioned on an opposite side of the dielectric spacer from the RF hot electrode, the grounded plate connected to electrical ground.

3. The modular plasma source assembly of claim 2 , wherein the outer conductor of the coaxial RF fee line is connected to the grounded plate.

4. The modular plasma source assembly of claim 2 , further comprising a plurality of compression elements to provide compressive force to the grounded plate in the direction of the dielectric spacer.

5. The modular plasma source assembly of claim 2 , wherein each of the dielectric spacer and the RF hot electrode comprise a plurality of holes therethrough so that a gas in the gas volume can pass through the dielectric spacer and the RF hot electrode into the gap.

6. The modular plasma source assembly of claim 2 , wherein the inner conductor extends through a channel in the grounded plate and the dielectric spacer and connects to the elongate RF hot electrode.

7. The modular plasma source assembly of claim 6 , further comprising an RF hot electrode vacuum seal around the inner conductor at the connection to the elongate RF hot electrode and a dielectric vacuum seal around the channel at an interface of the dielectric spacer and the grounded plate so that the channel extending through the grounded plate is at atmospheric pressure when the gap is at reduced pressure.

8. The modular plasma source assembly of claim 2 , wherein the housing and each of the RF hot electrode, dielectric spacer and grounded plate are wedge-shaped with an inner peripheral edge, and outer peripheral edge and two elongate sides, the first end defining the inner peripheral edge and the second end defining the outer peripheral edge of the housing.

9. The modular plasma source assembly of claim 8 , wherein the front face of the housing comprises a plurality of openings therethrough, the plurality of openings forming a hole pattern rotated at an angle to the elongate axis of the housing.

10. A modular plasma source assembly comprising:
an elongate housing having a side wall, an electrically grounded front face and a gas volume;
an elongate RF hot electrode within the housing, the elongate RF hot electrode having a front face, a back face, elongate sides and a first end and a second end defining an elongate axis, the elongate RF hot electrode and spaced from the front face to form a gap between the front face of the RF hot electrode and the front face of the elongate housing;
a dielectric spacer within the housing and positioned adjacent the back face of the elongate RF hot electrode;
a grounded plate within the housing and positioned on an opposite side of the dielectric spacer from the RF hot electrode, the grounded plate connected to electrical ground;
a channel extending through the grounded plate and the dielectric spacer; and
a coaxial RF feed line passing through the elongate housing, the coaxial RF feed line including an outer conductor and an inner conductor separated by an insulator, the outer conductor in electrical communication with grounded plate and the inner conductor passing through the channel in the grounded plate and the dielectric spacer and in electrical communication with the elongate RF hot electrode, wherein the channel is at atmospheric pressure when the gap is at reduced pressure.

11. The modular plasma source assembly of claim 10 , further comprising:
an end dielectric in contact with each of the first end and the second end of the RF hot electrode and between the RF hot electrode and the side wall;
a sliding ground connection positioned at one or more of the first end and the second end of the RF hot electrode opposite the end dielectric, the sliding ground connection isolated from direct contact with the RF hot electrode by the end dielectric; and
a seal foil positioned at each sliding ground connection opposite the end dielectric, the seal foil forming an electrical connection between the front face of the elongate housing and the sliding ground connection.

12. The modular plasma source assembly of claim 11 , further comprising a plurality of compression elements to provide compressive force to the grounded plate in the direction of the dielectric spacer.

13. The modular plasma source assembly of claim 11 , wherein each of the dielectric spacer and the RF hot electrode comprise a plurality of holes therethrough so that a gas in the gas volume can pass through the dielectric spacer and the RF hot electrode into the gap.

14. A modular plasma source assembly comprising:
a wedge-shaped elongate housing including an inner peripheral end, an outer peripheral end, two side walls connecting the inner peripheral end and the outer peripheral end, an electrically grounded front face comprising a plurality of openings therethrough and a gas volume;
a wedge-shaped RF hot electrode within the housing having a body with a front surface, a back surface, elongate sides, a first end adjacent the inner peripheral end and a second end adjacent the outer peripheral end, the front surface of the RF hot electrode spaced from the front face of the housing to form a gap;
an end dielectric in contact with each of the first end and the second end of the RF hot electrode;
a sliding ground connection positioned at the second end of the RF hot electrode opposite the end dielectric, the sliding ground connection isolated from direct contact with the RF hot electrode by the end dielectric;
a seal foil positioned adjacent the sliding ground connection opposite the end dielectric, the seal foil forming an electrical connection between the front face of the elongate housing and the sliding ground connection; and
a coaxial RF feed line passing through the elongate housing, the coaxial RF feed line including an outer conductor and an inner conductor separated by an insulator, the outer conductor in communication with electrical ground and the inner conductor in electrical communication with the RF hot electrode.

15. The modular pl

Assignees

• Forster John C
• Yudovsky Joseph
• Kwong Garry K
• Ngo Tai T
• Griffin Kevin
• Collins Kenneth S
• Liu Ren
• Applied Materials Inc

Inventors

• Forster John C
• Yudovsky Joseph
• Kwong Garry K
• Ngo Tai T
• Griffin Kevin
• Collins Kenneth S
• Liu Ren

Classifications

• H01J37/32091 Primary

  the radio frequency energy being capacitively coupled to the plasma · CPC title

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title

• H01J37/32513

  Sealing means, e.g. sealing between different parts of the vessel · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/32541

  Shape · CPC title