Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US9353130B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9353130-B2 |
| Application number | US-201314376009-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 30, 2013 |
| Priority date | Jan 31, 2012 |
| Publication date | May 31, 2016 |
| Grant date | May 31, 2016 |
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A non-carcinogenic process for the activation of zinc metal in a medium polarity solvent, wherein said zinc metal is activated by the reaction thereof with a halogen and a lithium compound selected from lithium halides and lithium pseudohalides, the use of said activated zinc metal for the preparation of an organozinc halide of formula R—ZnX, and a process for the preparation of compounds obtainable by the reaction of said organozinc halide of formula R—ZnX with compounds having functionality enabling them to react with said organozinc halide.
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The invention claimed is: 1. A process for activating zinc metal, comprising: providing zinc metal in a medium polarity solvent having a low nucleophilicity; and reacting said zinc metal with a halogen and a lithium compound selected from lithium halides and lithium pseudohalides, thereby activating said zinc metal, wherein the medium polarity solvent having low nucleophilicity is selected from the group consisting of tetrahydrofuran, diethyl ether, any other symmetric or asymmetric, cyclic or acyclic, substituted or unsubstituted dialkylether, dichloromethane, and ethyl acetate, with the proviso that the solvent chosen must not react with or interfere in an unwanted manner with any subsequent reagent or chemical process. 2. A process according to claim 1 , wherein said zinc metal is first mixed with said lithium compound, before the addition of said solvent to the resulting product and then finally the addition of said halogen. 3. A process according to claim 2 , wherein the mixture resulting from the addition of said lithium compound to said zinc metal is dried before the addition of said solvent. 4. A process according to claim 2 , wherein the mixture produced after the addition of said halogen is heated. 5. A process according to claim 1 , wherein said lithium compound is selected from lithium chloride, lithium bromide, lithium iodide, lithium trifluoromethanesulfonate, lithium cyanate and lithium isothiocyanate. 6. A process according to claim 1 , wherein said halogen is iodine. 7. A process according to claim 1 , wherein said zinc metal is in the form of zinc dust, zinc powder, zinc granules, zinc shot, zinc wire, zinc sheets or other macroscopic form of zinc. 8. A process according to claim 1 , wherein said zinc metal has an average particle size of from 1×10 −3 to 10 mm. 9. A process according to claim 6 , wherein the amount of iodine added is from 1 to 10 mol % of the amount of zinc metal. 10. A process for the preparation of an organozinc halide of formula R—ZnX, wherein R is an organo group and X is Cl, Br or I, said process comprising the following steps: (a) activation of zinc metal by the treatment thereof with a halogen and a lithium compound according to claim 1 ; and (b) reaction of the activated zinc moiety formed in step (a) with an organohalide of formula R—X to form said organozinc halide of formula R—ZnX. 11. A process according to claim 10 , wherein said organozinc halide of formula R—ZnX is a lithium halide additive of formula R—ZnBr.(LiY 1 ) n wherein Y 1 is a halide and n is an integer or non-integer number greater than zero or R—ZnX is a lithium pseudohalide additive of formula R—ZnBr.(LiY 2 ) n wherein Y 2 is a pseudohalide and n is an integer or non-integer number greater than zero. 12. A process according to claim 10 , wherein R is an optionally substituted alkyl group having from 1 to 30 carbon atoms, an optionally substituted alkenyl group having from 2 to 30 carbon atoms, an optionally substituted alkynyl group having from 2 to 30 carbon atoms or an optionally substituted aryl group having from 5 to 20 carbon atoms having one or more aromatic rings, wherein the optional substituents are selected from the group consisting of alkyl groups having from 1 to 20 carbon atoms, optionally substituted aryl groups having from 5 to 20 carbon atoms, halogen atoms, haloalkyl groups having from 1 to 20 carbon atoms, alkoxy groups having from 1 to 20 carbon atoms, alkoxycarbonyl groups comprising carbonyl groups that are substituted by alkoxy groups having from 1 to 20 carbon atoms, carboxyl groups, cyano groups, amino groups, monoalkylamino groups wherein the alkyl groups have from 1 to 20 carbon atoms, dialkylamino groups wherein each alkyl group is the same or different and each is an alkyl group having from 1 to 20 carbon atoms, monoarylamino groups wherein the aryl group is optionally substituted, diarylamino groups wherein each aryl group is the same or different and is optionally substituted and hydroxyl groups. 13. A process according to claim 10 , wherein steps (a) and (b) are performed consecutively in the same reaction vessel without isolation of the activated zinc intermediate and using the same solvent as used for the zinc metal activation process. 14. A process for the preparation of a compound obtainable by the reaction of an organozinc halide of formula R—ZnX with a compound having functionality enabling it to react with said organozinc halide, wherein said organozinc halide of formula R—ZnX is prepared according to the process according to claim 10 . 15. A process according to claim 14 , wherein said compound obtainable by the reaction of an organozinc halide of formula R—ZnX with a compound having functionality enabling it to react with said organozinc halide is a ketone of formula R′—C(O)—R obtainable by the reaction of said organozinc halide with an acid chloride of formula R′C(O)—Cl in the presence of a Cu(I) salt. 16. A process according to claim 14 , wherein said compound obtainable by the reaction of an organozinc halide of formula R—ZnX with a compound having functionality enabling it to react with said organozinc halide is an alkyl-substituted aryl group of formula Ar—R, wherein Ar is an optionally substituted aryl group having from 5 to 20 carbon atoms having one or more aromatic rings, wherein the optional substituents are selected from the group consisting of alkyl groups having from 1 to 20 carbon atoms, optionally substituted aryl groups having from 5 to 20 carbon atoms, halogen atoms, haloalkyl groups having from 1 to 20 carbon atoms, alkoxy groups having from 1 to 20 carbon atoms, alkoxycarbonyl groups comprising carbonyl groups that are substituted by alkoxy groups having from 1 to 20 carbon atoms, carboxyl groups, cyano groups, nitro groups, amino groups, monoalkylamino groups wherein the alkyl groups have from 1 to 20 carbon atoms, dialkylamino groups wherein each alkyl group is the same or different and each is an alkyl group having from 1 to 20 carbon atoms, monoarylamino groups wherein the aryl group is optionally substituted, diarylamino groups wherein each aryl group is the same or different and is optionally substituted and hydroxyl groups and R is an organo group, said compound of formula Ar—R being obtainable by the reaction of said organozinc halide with an aryl halide of formula Ar-Hal wherein Hal is a halogen atom. 17. A process according to claim 14 , wherein said compound obtainable by the reaction of an organozinc halide of formula R—ZnX with a compound having functionality enabling it to react with said organozinc halide is an alcohol of formula R′—C(R″)(OH)—R, said compound that reacts with said organozinc halide having the formula R′—C(O)—R″. 18. A process according to claim 17 , wherein the reaction of said organozinc halide of formula R—ZnX with said compound of formula R′—C(O)—R″ is performed in the presence of boron trifluoride. 19. A process according to claim 14 , wherein said compound obtainable by the reaction of an organozinc halide of formula R—ZnX with a compound having functionality enabling it to react with said organozinc halide is a primary amine of formula (I): wherein: R is an optionally substituted alkyl group having from 1 to 30 carbon atoms, an optionally substituted alkenyl group having from 2 to 30 carbon atoms, an optionally substituted alkynyl group having from 2 to 30 carbon atoms or an optionally substituted aryl group having from 5 to 20
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