Sulfonyl photoacid generators and photoresists comprising same
US-2017153542-A1 · Jun 1, 2017 · US
US9353052B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9353052-B2 |
| Application number | US-201113988380-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 6, 2011 |
| Priority date | Dec 17, 2010 |
| Publication date | May 31, 2016 |
| Grant date | May 31, 2016 |
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Described herein is an oligomer having a pendant bromine-containing moiety according to formula II and/or formula III; and combinations thereof; wherein X 1 , X 2 , and X 3 are each independently selected from F, Cl, H, and CF 3 ; R is a linear or branched linking group, which may be saturated or unsaturated, substituted or unsubstituted, and may comprise a heteroatom; each Z 1 and Z 2 is independently selected from F and CF 3 ; n is 0 or 1; q is 0 or 1; and m is at least 2.
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What is claimed is: 1. A composition comprising an oligomer comprising a repeating unit of: wherein X 1 , X 2 , and X 3 are each independently selected from F, Cl, H, and CF 3 ; R is a linear or branched linking group, which may be saturated or unsaturated, substituted or unsubstituted, and may comprise a catenary heteroatom; each Z 1 and Z 2 is independently selected…
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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