Laser-ablation-based material analysis system with a power/energy detector

Patent metadata

Field	Value
Publication number	US-9352418-B2
Application number	US-201514588824-A
Country	US
Kind code	B2
Filing date	Jan 2, 2015
Priority date	Jan 6, 2014
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

A laser ablation system and methods are disclosed for performing material analysis. The laser ablation system includes a sample chamber which holds and encloses a sample material to be ablated; a laser source that produces a laser beam which is directed into the sample chamber to a surface of the sample material to cause laser ablation; a laser measuring device which is physically attached to the sample chamber to measure a power/energy value of the laser beam; and a material analyzing module that is coupled to the sample chamber to receive the ablated material from laser ablation of the sample material.

First claim

The invention claimed is:

1. A laser ablation system for performing material analysis, comprising:
a sample chamber which holds and encloses a sample material to be ablated;
a laser source that produces a laser beam which is directed into the sample chamber to a surface of the sample material to cause laser ablation;
a laser measuring device which is physically attached to the sample chamber to measure a power/energy value of the laser beam, wherein the laser measuring device is configured to provide feedback to the laser ablation system to allow for automatic adjustment of the power/energy value of the laser beam; and
a material analyzing module that is coupled to the sample chamber to receive the ablated material from laser ablation of the sample material, wherein the material analyzing module is configured to analyze the ablated material by performing spectrometry on the ablated material.

2. The laser ablation system of claim 1 , wherein the laser measuring device is a laser energy detector or energy meter.

3. The laser ablation system of claim 1 , wherein the laser measuring device is a laser power detector or power meter.

4. The laser ablation system of claim 1 , wherein the laser measuring device is a photodiode detector.

5. The laser ablation system of claim 1 , wherein the laser measuring device is a metal-semiconductor-metal (MSM) photodetector.

6. The laser ablation system of claim 1 , wherein the laser measuring device is a thermal detector.

7. The laser ablation system of claim 1 , wherein the laser measuring device is a pyroelectric detector.

8. The laser ablation system of claim 1 , wherein the laser measuring device is a photomultiplier tube.

9. The laser ablation system of claim 1 , wherein the laser measuring device is located inside the sample chamber and the laser beam entering the sample chamber is directed onto a receiver of the laser measuring device by mirrors or other means.

10. The laser ablation system of claim 1 , wherein the laser measuring device is mounted to an outside wall of the sample chamber and the laser beam entering the sample chamber is directed onto a receiver of the laser measuring device through an opening in a wall of the sample chamber.

11. The laser ablation system of claim 1 , wherein the laser measuring device is mounted onto or placed inside a removable drawer which is inserted into the sample chamber.

12. The laser ablation system of claim 11 , wherein the removable drawer includes an area separated from the laser measuring device for holding the sample material.

13. The laser ablation system of claim 1 , wherein the laser measuring device is located above the focal plane of the laser beam.

14. The laser ablation system of claim 1 , wherein the laser measuring device is located below the focal plane of the laser beam.

15. The laser ablation system of claim 1 , wherein the laser measuring device is located at the focal plane of the laser beam and below a protective filter.

16. The laser ablation system of claim 1 , wherein the laser power/energy is measured simultaneously when the laser ablation of the sample material is taking place.

17. The laser ablation system of claim 1 , wherein the laser power/energy is measured before the laser ablation of the sample material takes place.

18. The laser ablation system of claim 1 , wherein the laser power/energy is measured after the laser ablation of the sample material has taken place.

19. The laser ablation system of claim 1 , wherein the laser source includes a pulsed laser source.

20. The laser ablation system of claim 1 , wherein the laser source includes a continuous wave (CW) laser source.

21. The laser ablation system of claim 1 , wherein the material analyzing module includes an inductively coupled mass spectrometer (ICP-MS) or an inductively coupled optical emission spectrometer (ICP-OES) instrument.

22. A method for performing material analysis using a laser ablation system, comprising:
directing a laser beam onto a surface of a sample material placed inside a sample chamber to cause laser ablation of the sample material;
during the laser ablation, simultaneously measuring a laser power/energy of the laser beam using a laser measuring device which is physically attached to the sample chamber, wherein the laser measuring device is configured to provide feedback to the laser ablation system to allow for automatic adjustment of the laser power/energy of the laser beam; and
using a material analyzing module coupled to the sample chamber to receive the ablated material from laser ablation of the sample material for material analysis, wherein the material analyzing module is configured to analyze the ablated material by performing spectrometry on the ablated material.

23. A method for performing material analysis using a laser ablation system, comprising:
directing a laser beam onto a surface of a sample material placed inside a sample chamber to cause laser ablation of the sample material;
using a material analyzing module coupled to the sample chamber to receive the ablated material from laser ablation of the sample material for material analysis, wherein the material analyzing module is configured to analyze the ablated material by performing spectrometry on the ablated material;
after the laser ablation, directing the laser beam onto a laser measuring device physically attached to the sample chamber to measure a laser power/energy of the laser beam, wherein the laser measuring device is configured to provide feedback to the laser ablation system to allow for automatic adjustment of the laser power/energy of the laser beam.

24. A method for performing material analysis using a laser ablation system, comprising:
directing a laser beam onto a laser measuring device which is physically attached to a sample chamber to measure a laser power/energy of the laser beam, wherein the laser measuring device is configured to provide feedback to the laser ablation system to allow for automatic adjustment of the laser power/energy of the laser beam;
after the laser power/energy measurement, directing the laser beam onto a surface of a sample material placed inside the sample chamber to cause laser ablation of the sample material; and
using a material analyzing module coupled to the sample chamber to receive the ablated material from laser ablation of the sample material for material analysis, wherein the material analyzing module is configured to analyze the ablated material by performing spectrometry on the ablated material.

Assignees

• Teledyne Instruments Inc

Inventors

• Roy John W
• Barbula James Bryan

Classifications

• H01J49/26

  Mass spectrometers or separator tubes · CPC title

• B23K26/16 Primary

  Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece (by a fluid stream B23K26/142) · CPC title

• H01J49/0463 Primary

  Desorption by laser or particle beam, followed by ionisation as a separate step (sample holder per se H01J49/0418) · CPC title

• B23K26/342

  Build-up welding · CPC title

• H01J49/105

  using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP] · CPC title