Method and apparatus for multiple-channel pulse gas delivery system

Patent metadata

Field	Value
Publication number	US-9348339-B2
Application number	US-201113035534-A
Country	US
Kind code	B2
Filing date	Feb 25, 2011
Priority date	Sep 29, 2010
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A pulse gas delivery system for delivering a sequence of pulses of prescribed amounts of gases to a process tool, comprises: (a) a plurality of channels, each including (i) a gas delivery chamber; (ii) an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and (iii) an outlet valve connected so as to control the amount of gas flowing out of the corresponding gas delivery chamber; and (b) a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process tool in a predetermined sequence in accordance with a pulse gas delivery process.

First claim

What is claimed is:

1. A pulse gas delivery system for delivering a sequence of pulses of prescribed mass amounts of gases to a process chamber that includes a chamber valve configured to control a pressure within the process chamber, the system comprising: a plurality of channels, each including, a gas delivery chamber; an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and an outlet valve connected so as to control an amount of gas flowing out of the corresponding gas delivery chamber; and a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process chamber in a predetermined sequence in accordance with a pulse gas delivery process; wherein the dedicated multiple channel controller is configured so as to generate for each channel a pre-delivery trigger signal corresponding to each pulse for that channel, wherein the pre-delivery trigger signal includes a gas type and a pulse mass of gas to be delivered in a corresponding pulse, wherein the dedicated multiple channel controller is configured to provide command signals to the process chamber, and wherein the dedicated multiple channel controller is configured to provide the pre-delivery trigger signal to open and precisely control an open position of the chamber valve so as to control the pressure within the process chamber.

2. The pulse gas delivery system according to claim 1 , wherein the process chamber is of a type including a host computer, wherein the pulse gas delivery process is initiated by an instruction provided by the host computer to the dedicated multiple channel controller.

3. The pulse gas delivery system according to claim 1 , further including a user interface coupled to the dedicated multiple channel controller so that the pulse gas delivery process is initiated by an instruction provided through the user interface to the dedicated multiple channel controller.

4. The pulse gas delivery system according to claim 1 , wherein each channel further includes a temperature sensor arranged so as to provide a signal representative of a temperature of the gas in the delivery chamber, and a pressure sensor arranged so as to provide a signal representative of a pressure of the gas in the delivery chamber.

5. The pulse gas delivery system according to claim 4 , wherein the prescribed amount of each pulse of gas delivered to the chamber is a function of the temperature of the gas in the corresponding delivery chamber, and a pressure drop of the gas in the corresponding delivery chamber during a duration of the pulse.

6. The system according to claim 1 , wherein the chamber valve is a pendulum valve.

7. The pulse gas delivery system according to claim 1 , wherein instructions regarding an operation of multiple channels are uploaded from a host computer associated with the process chamber, or through a user interface.

8. The system according to claim 1 , wherein the dedicated multiple channel controller is configured to control the inlet and outlet valves of each of the channels during a gas delivery process independently of a host controller.

9. The pulse gas delivery system according to claim 8 , wherein the host controller triggers an initiation of the delivery process.

10. The combination of a process chamber system having a process chamber and a pulse gas delivery system for delivering a sequence of pulses of prescribed mass amounts of gases to the process chamber, the pulse gas delivery system comprising: a plurality of channels, each including a gas delivery chamber; an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and an outlet valve connected so as to control an amount of gas flowing out of the corresponding gas delivery chamber; and a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process chamber in a predetermined sequence in accordance with a pulse gas delivery process; wherein the dedicated multiple channel controller is configured so as to generate for each channel a pre-delivery trigger signal corresponding to each pulse for that channel, wherein the pre-delivery trigger signal includes a gas type and a pulse mass of gas to be delivered in a corresponding pulse, wherein the dedicated multiple channel controller is configured to provide command signals to the process chamber, and wherein the process chamber includes a chamber valve configured to control a pressure within the process chamber, and the dedicated multiple channel controller is configured to provide the pre-delivery trigger signal to open and precisely control the open position of the chamber valve so as to control the pressure within the process chamber.

11. The combination according to claim 10 , wherein the dedicated multiple channel controller is configured to control the inlet and outlet valves of each of the channels during a gas delivery process independently of a host controller.

12. The combination according to claim 11 , wherein the host controller triggers an initiation of the delivery process.

13. The combination according to claim 10 , wherein each channel further includes a temperature sensor arranged so as to provide a signal representative of a temperature of the gas in the delivery chamber, and a pressure sensor arranged so as to provide a signal representative of a pressure of the gas in the delivery chamber.

14. The combination according to claim 10 , wherein the dedicated multiple channel controller is further configured to generate the pre-delivery trigger signal for preparing the process chamber prior to a running of the pulse gas delivery process.

15. A method of delivering a sequence of pulses of prescribed mass amounts of gases to a process chamber that includes a chamber valve configured to control a pressure within the process chamber, using a pulse gas delivery system comprising a plurality of channels, each channel including a gas delivery chamber; an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; an outlet valve connected so as to control an amount of gas flowing out of the corresponding gas delivery chamber; and a dedicated multiple channel controller; the method comprising: configuring the dedicated multiple channel controller so that it controls the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process chamber in a predetermined sequence in accordance with a pulse gas delivery process; wherein the dedicated multiple channel controller is configured so as to generate for each channel a pre-delivery trigger signal corresponding to each pulse for that channel, wherein the pre-delivery trigger signal includes a gas type and a pulse mass of gas to be delivered in a corresponding pulse, wherein the dedicated multiple channel controller is configured to provide command signals to the process chamber, and wherein the dedicated multiple channel controller is configured to provide the pre-delivery trigger signal to open and precisely control an open position of the chamber valve so as to control the pressure within the process chamber.

16. The method according to claim 15 , wherein the dedicated multiple channel controller is configured so as to control each channel as a function of a temperature and a pressure of the gas in each channel.

17. A multichannel pulse gas deli

Assignees

• Ding Junhua
• Benedict Scott
• Pisera Jaroslaw
• Mks Instr Inc

Inventors

• Ding Junhua
• Benedict Scott
• Pisera Jaroslaw

Classifications

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• G05D7/0635 Primary

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• G05D7/0623

  characterised by the set value given to the control element · CPC title

• G05D7/06

  characterised by the use of electric means {(G05D7/005 takes precedence)} · CPC title

• C23C16/45557

  Pulsed pressure or control pressure · CPC title