Energy beam size verification

Patent metadata

Field	Value
Publication number	US-9347770-B2
Application number	US-201514750779-A
Country	US
Kind code	B2
Filing date	Jun 25, 2015
Priority date	Aug 20, 2014
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

First claim

That which is claimed:

1. A non-transitory computer program product comprising at least one non-transitory computer-readable storage medium having computer-readable program code portions embodied therein, the computer-readable program code portions comprising:
an executable portion configured for generating a first energy beam spot from a first energy beam source having a predetermined size and power at a first position on a work piece,
an executable portion configured for varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until max intensity for the first beam spot is detected,
an executable portion configured for comparing at least one setting of said focus lens and/or astigmatism lens for said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens for the first energy beam spot with said predetermined size and power,
an executable portion configured for repeating said generating, varying, and comparing steps for different predetermined beam powers, and
an executable portion configured for repeating said generating, varying, comparing, and said repetition thereof steps for different positions on said work piece, wherein said first energy beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

2. The non-transitory computer program product of claim 1 , further comprising:
an executable portion configured for generating a predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
an executable portion configured for detecting first positions of said energy beam spot on said work table created with said first deflection speed;
an executable portion configured for generating said predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
an executable portion configured for detecting second positions of said energy beam spot on said work table created with said second deflection speed; and
an executable portion configured for comparing said first and second positions, wherein said deflection speed is verified if each one of said first positions are deviating less than a predetermined distance from corresponding ones of said second positions.

3. An apparatus for verifying a size of at least one energy beam spot, said apparatus comprising:
a first energy beam source configured to generate a first energy beam spot having a predetermined size and power at a first position on a work piece, and
a control unit configured to:
vary at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until max intensity for the first beam spot is detected,
compare at least one setting of said focus lens and/or astigmatism lens for said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens for the first energy beam spot with said predetermined size and power,
repeat said generating, varying, and comparing steps for one or more beam powers other than said predetermined beam power, and
repeat said generating, varying, comparing, and the above repeating steps for one or more positions on said work piece other than said first position, wherein said first energy beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

4. The apparatus of claim 3 , further comprising at least one mirror positioned in a pathway between said first energy beam source and said work piece structure, said at least one mirror being configured for, via said control unit, directing said first energy beam.

5. The apparatus of claim 4 , wherein said at least one mirror is a tiltable or otherwise movable mirror.

6. The apparatus of claim 3 , wherein:
the apparatus is further configured for verifying a deflection speed of said first energy beam spot; and
the control unit is further configured to:
generate a predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
detect first deflection positions of said energy beam spot on said work table created with said first deflection speed;
generate said predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
detect second deflection positions of said energy beam spot on said work table created with said second deflection speed; and
compare said first and second deflection positions, wherein said deflection speed is verified if each one of said first deflection positions are deviating less than a predetermined distance from corresponding ones of said second deflection positions.

Assignees

• Arcam Ab

Inventors

• Snis Anders

Classifications

• G01M11/02

  Testing optical properties · CPC title

• B23K15/02 Primary

  Control circuits therefor · CPC title

• B22F12/90

  Means for process control, e.g. cameras or sensors · CPC title

• B22F12/52

  Hoppers · CPC title

• B22F10/31

  Calibration of process steps or apparatus settings, e.g. before or during manufacturing · CPC title