Method and system for forming a pattern on a reticle using charged particle beam lithography

Patent metadata

Field	Value
Publication number	US-9341936-B2
Application number	US-201414177688-A
Country	US
Kind code	B2
Filing date	Feb 11, 2014
Priority date	Sep 1, 2008
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

A method and system for fracturing or mask data preparation is disclosed in which a desired substrate pattern for a substrate is input. A plurality of charged particle beam shots is then determined which will form a reticle pattern on a reticle, where the reticle pattern will produce a substrate pattern on the substrate using an optical lithography process, wherein the substrate pattern is within a predetermined tolerance of the desired substrate pattern. A similar method and a similar system for forming a pattern on a reticle are also disclosed.

First claim

What is claimed is:

1. A method for fracturing or mask data preparation for charged particle beam lithography, the method comprising:
inputting a desired substrate pattern for a substrate; and
determining a plurality of charged particle beam shots that form a reticle pattern on a reticle, wherein the reticle pattern will produce a substrate pattern on the substrate using an optical lithography process, wherein the substrate pattern is within a predetermined tolerance of the desired substrate pattern, and
wherein the determining is performed using one or more computing hardware processors.

2. The method of claim 1 wherein the determining comprises calculating a substrate aerial image.

3. The method of claim 2 wherein the calculating of the substrate aerial image comprises using lithography simulation.

4. The method of claim 2 , further comprising calculating a calculated substrate pattern from the substrate aerial image.

5. The method of claim 4 wherein the calculating of the calculated substrate pattern comprises simulating at least one of a group consisting of resist bake, resist development, and etch.

6. The method of claim 4 wherein the calculating of the calculated substrate pattern comprises calculating a bias from the substrate aerial image.

7. The method of claim 1 wherein the determining comprises calculating a calculated reticle pattern from the plurality of charged particle beam shots.

8. The method of claim 7 wherein the calculating of the calculated reticle pattern comprises using charged particle beam simulation.

9. The method of claim 8 wherein the charged particle beam simulation includes at least one of a group consisting of forward scattering, backward scattering, resist diffusion, Coulomb effect, fogging, loading and resist charging.

10. The method of claim 1 wherein a shot in the plurality of charged particle beam shots comprises a multi-beam shot.

11. The method of claim 1 wherein a shot in the plurality of charged particle beam shots comprises a variable shaped beam (VSB) shot.

12. A method for forming a pattern on a reticle using charged particle beam lithography, the method comprising:
inputting a desired substrate pattern for a substrate;
determining a plurality of charged particle beam shots that form a reticle pattern on the reticle, wherein the reticle pattern will produce a substrate pattern on the substrate using an optical lithography process, wherein the substrate pattern is within a predetermined tolerance of the desired substrate pattern; and
forming the reticle pattern with the plurality of charged particle beam shots.

13. The method of claim 12 wherein the determining comprises calculating a substrate aerial image.

14. The method of claim 13 wherein the calculating of the substrate aerial image comprises using lithography simulation.

15. The method of claim 13 , further comprising calculating a calculated substrate pattern from the substrate aerial image.

16. The method of claim 15 wherein the calculating of the calculated substrate pattern comprises simulating at least one of a group consisting of resist bake, resist development, and etch.

17. The method of claim 15 wherein the calculating of the calculated substrate pattern comprises calculating a bias from the substrate aerial image.

18. The method of claim 12 wherein the determining comprises calculating a calculated reticle pattern from the plurality of charged particle beam shots.

19. The method of claim 18 wherein the calculating of the calculated reticle pattern comprises using charged particle beam simulation.

20. The method of claim 12 wherein a shot in the plurality of charged particle beam shots comprises a multi-beam shot.

21. A system for forming a pattern on a reticle using charged particle beam lithography, the system comprising:
a means for inputting a desired substrate pattern for a substrate;
a means for determining a plurality of charged particle beam shots that form a reticle pattern on the reticle, wherein the reticle pattern will produce a substrate pattern on the substrate using an optical lithography process, wherein the substrate pattern is within a predetermined tolerance of the desired substrate pattern; and
a means for forming the reticle pattern on the reticle with the plurality of charged particle beam shots.

22. The system of claim 21 wherein the means for determining performs lithography simulation to calculate a substrate aerial image on the substrate.

23. The system of claim 22 wherein the means for determining calculates a calculated substrate pattern from the substrate aerial image.

24. The system of claim 21 wherein the means for determining performs charged particle beam simulation to calculate the reticle pattern.

25. The system of claim 21 wherein the means for forming the reticle pattern on the reticle is configured for multi-beam shots.

Assignees

• D2S Inc

Inventors

• Fujimura Akira

Classifications

• G06F30/39

  Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347) · CPC title

• H01J2237/31774

  Multi-beam · CPC title

• H01J2237/31764

  Dividing into sub-patterns · CPC title

• H01J37/3174

  Particle-beam lithography, e.g. electron beam lithography · CPC title

• H01J37/3026

  Patterning strategy · CPC title