Apparatus and method for speckle reduction in laser processing equipment

Patent metadata

Field	Value
Publication number	US-9341858-B2
Application number	US-201414180010-A
Country	US
Kind code	B2
Filing date	Feb 13, 2014
Priority date	Sep 28, 2011
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

Embodiments described herein provide apparatus and methods for processing semiconductor substrates with uniform laser energy. A laser pulse or beam is directed to a spatial homogenizer, which may be a plurality of lenses arranged along a plane perpendicular to the optical path of the laser energy, an example being a microlens array. The spatially uniformized energy produced by the spatial homogenizer is then directed to a refractive medium that has a plurality of thicknesses. Each thickness of the plurality of thicknesses is different from the other thicknesses by at least the coherence length of the laser energy.

First claim

What is claimed is:

1. An apparatus for improving energy uniformity of coherent light, comprising:
a plurality of lenses positioned to produce a composite projection field; and
a refractive medium having one or more first surfaces and a plurality of second surfaces, wherein each second surface is located at one or more distances from the one or more first surfaces, and the refractive medium is positioned to receive the composite projection field at the one or more first surfaces and to transmit an energy field from the plurality of second surfaces, or the refractive medium is positioned to receive the composite projection field at the plurality of second surfaces and to transmit the energy field from the one or more first surfaces, wherein the refractive medium is a prism comprising a plurality of columns having a plurality of different lengths.

2. The apparatus of claim 1 , wherein the plurality of lenses is a microlens array.

3. The apparatus of claim 1 , wherein surfaces of the refractive medium other than the one or more first surfaces and the plurality of second surfaces are coated with a reflective material.

4. The apparatus of claim 1 , wherein each surface of the refractive medium transmitting the energy field is diffusive.

5. An apparatus for generating a uniform illumination field, comprising:
a laser projecting radiation along an optical path;
a plurality of lenses disposed along a plane perpendicular to the optical path;
a refractive optic disposed along the optical path, the refractive optic having a first surface intersecting the optical path and a second surface intersecting the optical path, wherein the first surface defines a plane perpendicular to the optical path, and the second surface comprises a plurality of facets, each facet defining a plane perpendicular to the optical path, and wherein no two facets are at the same distance from the first surface, the plurality of lenses being disposed between the laser and the refractive optic, wherein a distance of each facet from the first surface is different from the distance of every other facet from the first surface by an amount greater than a coherence length of the laser.

6. The apparatus of claim 5 , wherein a distance between the plurality of lenses and the refractive optic is greater than a focal length of any of the plurality of lenses.

7. An apparatus for generating a uniform illumination field, comprising: a laser projecting radiation along an optical path;
a plurality of lenses disposed along a plane perpendicular to the optical path;
a refractive optic disposed along the optical path, the refractive optic having a first surface intersecting the optical path and a second surface intersecting the optical path, wherein the first surface defines a plane perpendicular to the optical path, and the second surface comprises a plurality of facets, each facet defining a plane perpendicular to the optical path, and wherein no two facets are at the same distance from the first surface, the plurality of lenses being disposed between the laser and the refractive optic and further comprising a second laser and a beam combiner between the lasers and the plurality of lenses.

8. The apparatus of claim 7 , further comprising a pulse shaper disposed to receive radiation transmitted by the refractive optic.

9. The apparatus of claim 7 , wherein the refractive optic comprises a plurality of etalons.

10. An apparatus for generating a uniform illumination field, comprising:
a laser projecting radiation along an optical path;
a plurality of lenses disposed along a plane perpendicular to the optical path;
a refractive optic disposed along the optical path, the refractive optic having a first surface intersecting the optical path and a second surface intersecting the optical path, wherein the first surface defines a plane perpendicular to the optical path, and the second surface comprises a plurality of facets, each facet defining a plane perpendicular to the optical path, and wherein no two facets are at the same distance from the first surface, the plurality of lenses being disposed between the laser and the refractive optic; and further comprising a work surface for receiving a workpiece to be processed by the radiation from the laser, the work surface disposed substantially perpendicular to the optical path of the laser.

Assignees

• Applied Materials Inc

Inventors

• Moffatt Stephen

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• B23K26/0626

  Energy control of the laser beam (B23K26/0622 takes precedence) · CPC title

• G02B3/0056

  arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses (G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085) · CPC title

• G02B5/04

  Prisms · CPC title

• F21V5/004

  using microlenses · CPC title