Energy beam position verification

Patent metadata

Field	Value
Publication number	US-9341467-B2
Application number	US-201514750713-A
Country	US
Kind code	B2
Filing date	Jun 25, 2015
Priority date	Aug 20, 2014
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

A method for verifying a position of an energy beam spot, said method comprising the steps of: providing a calibrated energy beam having a first focus in a at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said first focus, providing said calibrated energy beam having a second focus in said at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said second focus, comparing said at least two positions created with said first and second focus, wherein said position of the energy beam is verified if said positions created with said first focus are deviating less than a predetermined distance from said positions created with said second focus.

First claim

That which is claimed:

1. A non-transitory computer program product comprising at least one non-transitory computer-readable storage medium having computer-readable program code portions embodied therein, the computer-readable program code portions comprising:
at least one executable portion configured for:
providing said energy beam having a first focus in at least two positions on said work table,
detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said first focus,
providing said energy beam having a second focus in said at least two positions on said work table, and
detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said second focus, and
at least one executable portion configured for comparing said at least two positions created with said first and second focuses, wherein said position of the energy beam is verified if said at least two positions created with said first focus are deviating less than a predetermined distance from said at least two positions created with said second focus.

2. The non-transitory computer program product of claim 1 , wherein:
said computer program product is configured for verifying a deflection speed; and
said computer program product further comprises:
an executable portion configured for generating a predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
an executable portion configured for detecting first positions of said energy beam spot on said work table created with said first deflection speed;
an executable portion configured for generating said predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
an executable portion configured for detecting second positions of said energy beam spot on said work table created with said second deflection speed; and
an executable portion configured for comparing said first and second positions, wherein said deflection speed is verified if each one of said first positions are deviating less than a predetermined distance from corresponding ones of said second positions.

3. The non-transitory computer program product of claim 2 , wherein:
said computer program product is configured for verifying a beam spot size; and
said computer program product further comprises:
an executable portion configured for generating a first energy beam spot from a first energy beam source having a predetermined size and power at a first position on a work piece,
an executable portion configured for varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until max intensity for the first beam spot is detected,
an executable portion configured for comparing at least one setting of said focus lens and/or astigmatism lens for said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens for the first energy beam spot with said predetermined size and power,
an executable portion configured for repeating said generating, varying, and comparing steps for different predetermined beam powers, and
an executable portion configured for repeating said generating, varying, comparing, and said repetition thereof steps for different positions on said work piece, wherein said first energy beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

4. The non-transitory computer program product of claim 1 , wherein:
said computer program product is configured for verifying a beam spot size; and
said computer program product further comprises:
an executable portion configured for generating a first energy beam spot from a first energy beam source having a predetermined size and power at a first position on a work piece,
an executable portion configured for varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until max intensity for the first beam spot is detected,
an executable portion configured for comparing at least one setting of said focus lens and/or astigmatism lens for said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens for the first energy beam spot with said predetermined size and power,
an executable portion configured for repeating said generating, varying, and comparing steps for different predetermined beam powers, and
an executable portion configured for repeating said generating, varying, comparing, and said repetition thereof steps for different positions on said work piece, wherein said first energy beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

5. An apparatus for verifying a position of an energy beam spot, said apparatus comprising:
at least one energy beam source configured to generate at least one energy beam; and
a control unit configured to:
provide said at least one energy beam having a first focus in at least two positions on a work table,
detect said at least two positions of said energy beam spot on said work table created with said at least one energy beam having said first focus,
provide said at least one energy beam having a second focus in said at least two positions on a work table,
detect said at least two positions of said energy beam spot on said work table created with said at least one energy beam having said second focus, and
compare said at least two positions created with said first and second focuses, wherein said position of the energy beam is verified if said at least two positions created with said first focus are deviating less than a predetermined distance from said at least two positions created with said second focus.

6. The apparatus of claim 5 , wherein:
the apparatus is further configured for verifying a deflection speed of said first energy beam spot; and
the control unit is further configured to:
generate a predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
detect first deflection positions of said energy beam spot on said work table created with said first deflection speed;
generate said predetermined pattern on a work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
detect second deflection positions of said energy beam spot on said work table created with said second deflection speed; and
compare said first and second deflection positions, wherein said deflection speed is verified if each one of said first deflection positions are deviating less than a predetermined distance from corresponding ones of said second deflection positions.

7. The apparatus of claim 6 , wherein:
the apparatus is further configured for verifying a size of at least one energy beam spot; and
the control unit is further configured to:
vary at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until max intensity for the first beam spot is detected,
compare at least one setting of said focus lens and/or astigmatism lens for said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens for the first energy b

Assignees

• Arcam Ab

Inventors

• Snis Anders

Classifications

• G01M11/02

  Testing optical properties · CPC title

• B23K15/02 Primary

  Control circuits therefor · CPC title

• B22F12/90

  Means for process control, e.g. cameras or sensors · CPC title

• B22F12/52

  Hoppers · CPC title

• B22F10/31

  Calibration of process steps or apparatus settings, e.g. before or during manufacturing · CPC title