High density laser optics

Patent metadata

Field	Value
Publication number	US-9337623-B2
Application number	US-201514642950-A
Country	US
Kind code	B2
Filing date	Mar 10, 2015
Priority date	Jan 18, 2012
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

Apparatuses and methods for high density laser optics are provided. An example, of a laser optics apparatus includes a plurality of vertical cavity surface emitting lasers (VCSELs) in a monolithically integrated array, a high contrast grating (HCG) integrated with an aperture of a vertical cavity of each of the plurality of the VCSELs to enable emission of a single lasing wavelength of a plurality of lasing wavelengths, and a plurality of single mode waveguides, each integrated with a grating coupler, that are connected to each of the plurality of the integrated VCSELs and the HCGs, where each of the grating couplers is aligned to an integrated VCSEL and HCG.

First claim

What is claimed:

1. A high density laser optics apparatus, comprising:
a plurality of first vertical cavity surface emitting lasers (VCSELs) in a first monolithically integrated array;
a plurality of second VCSELs in a discrete second monolithically integrated array; and
a high contrast grating (HCG) integrated with an aperture of a vertical cavity of each of the plurality of the first and the second VCSELs to enable emission of a single lasing wavelength from each of the first and the second VCSELs of a plurality of single lasing wavelengths emitted from the plurality of first and the second VCSELs;
wherein dimensions of a pitch and a duty cycle of each HCG are tuned to produce a discrete single lasing wavelength emitted from each of the first and the second VCSELs; and
wherein each of the plurality of the first VCSELs is configured to produce a single lasing wavelength in a first range of lasing wavelengths that is discrete from the single lasing wavelengths in a second range configured to be produced by the plurality of the second VCSELs.

2. The apparatus of claim 1 , comprising:
a plurality of single mode waveguides, each integrated with a grating coupler, that are adjacent each of the plurality of the first and the second integrated VCSELs and the HCGs;
wherein each of the grating couplers has a predetermined pitch for refraction of light of a particular wavelength from an integrated VCSEL and HCG at a particular incident angle in an intended direction along the single mode waveguides.

3. The apparatus of claim 1 , comprising:
a plurality of single mode waveguides, each integrated with a grating coupler, that are adjacent each of the plurality of the first and the second integrated VCSELs and the HCGs;
wherein at least one of the plurality of single mode waveguides has a transition region that is wider than the waveguide to integrate with the grating coupler in order to tunnel photons into a narrower pathway of the waveguide relative to an area of incident light on the grating coupler.

4. The apparatus of claim 1 , comprising:
a plurality of single mode waveguides configured as a wavelength division multiplexer (WDM) that integrates each of the discrete single lasing wavelengths for output in a single optical waveguide;
wherein the WDM is formed on a same substrate as an integrated VCSEL and HCG.

5. The apparatus of claim 1 , comprising:
a plurality of single mode waveguides configured as a wavelength division multiplexer (WDM);
wherein each of the discrete single lasing wavelengths is a separate laser optics channel; and
wherein each of the plurality of single mode waveguides has a different length to cause a different phase shift for each discrete single lasing wavelength at an exit of each of the plurality of single waveguides.

6. The apparatus of claim 1 , comprising:
a plurality of single mode waveguides configured as an arrayed wavelength grating (AWG) that functions as a demultiplexer for a plurality of wavelengths of light input through a single optical waveguide;
wherein the AWG integrates each of the discrete single lasing wavelengths for output of multiplexed light traveling in the reverse direction.

7. A high density laser optics system, comprising:
a plurality of discrete monolithically integrated arrays of a plurality of vertical cavity surface emitting lasers (VCSELs), all of the discrete arrays integrated on a single semiconductor substrate;
a high contrast grating (HCG) integrated with an aperture of a vertical cavity of each of the plurality of the VCSELs in a first discrete array to enable emission of a single lasing wavelength that is discrete from lasing wavelengths emitted by other VCSELs in other discrete arrays in the plurality of discrete monolithically integrated arrays; and
a plurality of single mode waveguides, each integrated with a grating coupler, that are adjacent each of the plurality of the integrated VCSELs and the HCGs in the plurality of discrete monolithically integrated arrays;
wherein each of the plurality of the VCSELs in the first discrete array is configured to produce a single lasing wavelength in a first range of lasing wavelengths that is discrete from the single lasing wavelengths in a plurality of other ranges configured to be produced by the other VCSELs in the other discrete arrays.

8. The system of claim 7 , wherein each of the grating couplers is aligned to an integrated VCSEL and HCG.

9. The system of claim 7 , wherein dimensions of a pitch and a duty cycle of each HCG are adjusted to emit a discrete single lasing wavelength from each of the VCSELs.

10. The system of claim 7 , wherein dimensions of a pitch and a duty cycle of each HCG are adjusted to vary a quality factor that reflects a bandwidth relative to a center frequency.

11. The system of claim 7 , wherein a plurality of emitted discrete lasing wavelengths is each spaced apart in a range of from 1 nanometer to 20 nanometers.

12. The system of claim 7 , comprising a temperature stabilizing component that stabilizes a temperature of the plurality of the integrated VCSELs and the HCGs while in operation.

13. The system of claim 12 , wherein the temperature stabilizing component stabilizes the temperature to reduce a drift of the lasing wavelengths emitted from the integrated VCSELs and the HCGs.

14. A method of fabricating a high density laser optics apparatus, comprising:
processing a stack of semiconductor materials to form a plurality of vertical cavity surface emitting lasers (VCSELs) in a plurality of discrete monolithically integrated arrays; and
processing a first mirror material to form a high contrast grating (HCG) integrated with an aperture of a vertical cavity of each of the plurality of VCSELs;
wherein processing the HCG enables emission of a single lasing wavelength in a first range of lasing wavelengths from each of the VCSELs in a first discrete array that is discrete from a second range of single lasing wavelengths emitted from each of other VCSELs of the plurality of VCSELs in a second discrete array.

15. The method of claim 14 , comprising processing to flip-chip self-align a grating coupler, integrated with a single mode waveguide, to each particular integrated VCSEL and HCG of the plurality of VCSELs integrated with an HCG.

16. The method of claim 15 , wherein flip-chip self-aligning each of the grating couplers to the particular integrated VCSEL and HCG includes matching and bonding solder bumps of different heights to change an incident angle of light to be refracted along an intended path of a particular single mode waveguide.

17. The method of claim 14 , comprising:
processing a number of layers of a gain medium material to form an active region for generation of light wavelengths from the integrated VCSEL and HCG;
wherein the gain medium material is selected from chemical materials including GaAs, InGaAs, AlGaAs, InGaAsP, InGaAlP, InGaAlN, and combinations thereof.

18. The method of claim 14 , comprising processing dimensions of a pitch and a duty cycle of the HCG by laser trimming to tune a single lasing wavelength to be emitted from the plurality of VCSELs.

Assignees

• Hewlett Packard Development Co
• Hewlett Packard Entpr Dev Lp

Inventors

• Tan Michael Renne Ty
• Fattal David A
• Sorin Wayne Victor
• Mathai Sagi

Classifications

• H01S5/4087

  emitting more than one wavelength · CPC title

• H01S5/3434

  with a well layer comprising at least both As and P as V-compounds · CPC title

• H01S5/423 Primary

  having a vertical cavity · CPC title

• G02B6/12016

  characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides · CPC title

• H01S5/3412

  quantum box or quantum dash · CPC title