Laser induced thermal imaging device and laser induced thermal imaging method

Patent metadata

Field	Value
Publication number	US-9337427-B2
Application number	US-201314022114-A
Country	US
Kind code	B2
Filing date	Sep 9, 2013
Priority date	Apr 12, 2013
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

A laser induced thermal imaging device includes a substrate stage configured to support a substrate and a donor film; a beam radiation portion configured to emit a laser beam toward the donor film to image an imaging layer of the donor film on a pixel region on the substrate; an error measurement portion configured to determine a position of the laser beam and a position of the pixel region from the donor film to measure a pattern error; and a stage moving portion configured to move the substrate stage in accordance with the pattern error to correct the pattern error.

First claim

What is claimed is:

1. A laser induced thermal imaging device comprising:
a substrate stage configured to support a substrate and a donor film;
a beam radiation portion configured to emit a laser beam toward the donor film to image an imaging layer of the donor film on a pixel region on the substrate and to form a waste donor film from the donor film;
an error measurement portion configured to measure a pattern error using the waste donor film by determining a position of the laser beam and a position of the pixel region from the waste donor film separated from the substrate; and
a stage moving portion configured to move the substrate stage in accordance with the pattern error to correct the pattern error.

2. The laser induced thermal imaging device of claim 1 , wherein the error measurement portion comprises:
a support on an upper portion of the waste donor film; and
a camera on the support and configured to photograph the waste donor film to measure the position of the laser beam and the position of the pixel region.

3. The laser induced thermal imaging device of claim 2 , wherein the laser beam is scanned along a first direction of the substrate, and
wherein the pattern error is a distance between a center of the laser beam and a center of the pixel region along a second direction crossing the first direction.

4. The laser induced thermal imaging device of claim 3 , wherein the stage moving portion is configured to move the substrate stage along the second direction to the same displacement as the pattern error.

5. The laser induced thermal imaging device of claim 3 , wherein the camera is coupled to the support by a moving stage configured to move along the second direction, and
wherein the camera comprises an auto-focusing unit.

6. The laser induced thermal imaging device of claim 5 , wherein the substrate is a mother substrate comprising a plurality of unit cells, and
wherein the camera and the moving stage comprise a plurality of cameras and a plurality of moving stages arranged on the support along the second direction.

7. The laser induced thermal imaging device of claim 1 , wherein the error measurement portion and the stage moving portion are electrically connected to a controller, and
wherein the controller is configured to transfer a driving signal to the stage moving portion in accordance with pattern error information provided from the error measurement portion.

8. A laser induced thermal imaging method comprising:
laminating a donor film on a substrate mounted on a substrate stage;
irradiating a laser beam onto the donor film and performing scanning in a first direction of the substrate to image an imaging layer of the donor film on pixel regions on the substrate and to form a waste donor film from the donor film;
separating the waste donor film from the substrate and confirming a position of the laser beam and a position of the pixel region from the separated waste donor film to measure a pattern error; and
moving the substrate stage in accordance with the pattern error to correct the pattern error.

9. The laser induced thermal imaging method of claim 8 , wherein an error measurement portion having at least one camera is arranged adjacent the waste donor film to measure the pattern error.

10. The laser induced thermal imaging method of claim 9 , wherein the camera is movably installed along a second direction crossing the first direction and
wherein the camera comprises a plurality of cameras arranged along the second direction.

11. The laser induced thermal imaging method of claim 10 , wherein the pattern error is a distance between a center of the laser beam and a center of the pixel region along the second direction, and
wherein the substrate stage is moved along the second direction by a stage moving portion in accordance with the pattern error.

12. The laser induced thermal imaging method of claim 8 , wherein measurement of the pattern error and moving the substrate stage in accordance with the pattern error are automatically performed for a plurality of substrates on which imaging is performed.

13. The laser induced thermal imaging method of claim 8 , wherein the substrate is an organic light emitting display panel prior to forming an organic emission layer thereon, and
the imaging layer is imaged on the pixel regions to form the organic emission layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Jeun Jin-Hong
• Lee Yuna

Classifications

• H01L51/0013 Primary

  Electricity · mapped topic

• H01L51/0031

  Electricity · mapped topic

• B41M5/00

  Duplicating or marking methods; Sheet materials for use therein (by using light-sensitive materials G03; electrography, magnetography G03G {; repeatedly usable boards or tablets for writing or drawing B43L1/00}) · CPC title

• H01S3/00

  Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range (semiconductors lasers H01S5/00) · CPC title

• B41J2/455

  using laser arrays {, the laser array being smaller than the medium to be recorded} · CPC title