Slider for magnetic recording apparatus with projection comprising optical turning element and methods of fabrication thereof

Patent metadata

Field	Value
Publication number	US-9336801-B2
Application number	US-201514939004-A
Country	US
Kind code	B2
Filing date	Nov 12, 2015
Priority date	Aug 15, 2013
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

An apparatus includes a slider, a light source disposed upon an outer surface of the slider and a projection extending above the outer surface of the slider. The light source comprises a resonant cavity aligned with the outer surface of the slider. The projection comprises an optical turning element that is optically coupled to the light source. Also included are methods of fabrication thereof.

First claim

What is claimed is:

1. A method comprising:
pattern depositing a plurality of sets of waveguide elements upon a wafer, each set of waveguide elements comprising an optical turning element in a projection portion thereof;
slicing the wafer to produce a slider bar that includes some of the sets of waveguide elements;
pattern etching the slider bar to produce sliders, each slider having a respective one of the projections, each projection integral to the slider and extending above a top surface of the slider at a trailing edge, the top surface opposed to an air-bearing surface of the slider, the projection and slider forming a seamless, unitary, and one-piece structure; and
dicing the slider bar to separate the sliders.

2. The method of claim 1 , wherein the projection is formed by pattern depositing the projection above the top surface.

3. The method of claim 1 , wherein the projection is formed by pattern etching to remove excess material, the pattern etching forming a backpad on the top surface, the backpad being configured to receive a light source.

4. The method of claim 1 , wherein the wafer comprises AlTiC.

5. The method of claim 1 , wherein the pattern depositing comprises photolithography and deposition.

6. The method of claim 5 , wherein the pattern depositing comprises multiple steps of photolithography and deposition of waveguide and cladding materials to form the optical turning element.

7. The method of claim 1 , further comprising slope etching the slider bodies to form the optical turning element.

8. The method of claim 1 , further comprising mounting an edge-emitting light source to the top surface of the slider such that, when the light source is mounted to the slider, a resonant optical cavity of the light source is aligned substantially parallel to the top surface of the slider and extends along a horizontal direction from a leading edge of the slider to the trailing edge of the slider.

9. The method of claim 8 , wherein the projection comprises an input waveguide extending along the horizontal direction and receiving light emanating from the light source at an input surface of the projection that faces away from the trailing edge.

10. The method of claim 9 , wherein the optical turning element is configured to receive the light from the input waveguide and redirect the light in a vertical direction that is perpendicular to the horizontal direction, the projection further comprising a vertical waveguide that directs the light in the vertical direction towards the air-bearing surface.

11. The method of claim 1 , wherein the projection comprises a width that is less than a corresponding width of the slider, the width and the corresponding width being measured perpendicular to a vertical direction across the trailing edge of the slider.

12. The method of claim 1 , further comprising forming at least two solder bumps upon the top surfaces of each of the sliders, the solder bumps facilitating alignment between output light of the light source and an input waveguide of the projection in response to a reflow of the at least two solder bumps.

13. A method comprising:
pattern depositing a plurality of sliders upon a wafer, each slider comprising a top surface opposed to an air-bearing surface of the slider, the top surface configured to facilitate mounting of an edge-emitting light source such that, when the light source is mounted to the slider, a resonant optical cavity of the light source is aligned substantially parallel to the top surface of the slider and extends along a horizontal direction from a leading edge of the slider to a trailing edge of the slider; and
patterning the sliders to produce projections integral to the sliders and extending above the top surface of the sliders at the trailing edges, the projections and respective sliders forming seamless, unitary, and one-piece structures, each projection comprising:
an input waveguide extending along the horizontal direction and receiving light emanating from the light source at an input surface of the projection that faces away from the trailing edge; and
an optical turning element configured to receive the light from the input waveguide and redirect the light in a vertical direction that is perpendicular to the horizontal direction.

14. The method of claim 13 , further comprising separating the sliders from the wafer.

15. The method of claim 14 , wherein separating the sliders comprises slicing the wafer to produce a slider bar, and dicing the slider bar to separate the sliders.

16. The method of claim 13 , wherein patterning the sliders to produce the projections comprises removing excess material from the top surface of the slider.

17. The method of claim 13 , wherein patterning the sliders to produce the projections comprises adding the projections by successive patterning and deposition on the top surface of the slider.

18. The method of claim 13 , further comprising slope etching the slider bodies to form the optical turning element.

19. The method of claim 13 , further comprising mounting the edge-emitting light source to the top surface of the slider.

20. The method of claim 13 , wherein the projection comprises a width that is less than a corresponding width of the slider, the width and the corresponding width being measured perpendicular to the vertical direction across the trailing edge of the slider.

Assignees

• Seagate Technology Llc

Inventors

• Smith Ralph Kevin

Classifications

• G11B5/314

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G11B5/3173 Primary

  Batch fabrication, i.e. producing a plurality of head structures in one batch · CPC title

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title

• G11B5/6088

  Optical waveguide in or on flying head · CPC title