Tungsten sintered compact sputtering target and method for producing same
US-2015357170-A1 · Dec 10, 2015 · US
US9334560B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9334560-B2 |
| Application number | US-201213605688-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 6, 2012 |
| Priority date | Nov 2, 2011 |
| Publication date | May 10, 2016 |
| Grant date | May 10, 2016 |
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A cutting tool having a metallic glass thin film (MGTF) coated thereon, a metallic glass cutting tool, and methods of fabricating the same are disclosed. The cutting tool having metallic glass thin film coated thereon comprises: a cutting element having a sharpened portion, and the cutting element is made of metal; and a metallic glass thin film coated on the cutting element, and the metallic glass is represented by the following formula 1 or formula 2, (Zr a Cu b Ni c Al d ) 100-x Si x , [formula 1] wherein 45=<a=<75, 25=<b=<35, 5=<c=<15, 5=<d=<15, 0.1=<x=<10, (Zr e Cu f Ag g Al h ) 100-y Si y , [formula 2] 35=<e=<55, 35=<f=<55, 5=<g=<15, 5=<h=<15, 0.1=<y=<10. The metallic glass cutting tool of the present invention comprises: a cutting element having a sharpened portion, and the cutting element is made of a metallic glass represented by the above formula 1 or formula 2.
Opening claim text (preview).
What is claimed is: 1. A cutting tool having a metallic glass (MGTF) coated thereon, which comprises: a cutting element having a sharpened portion, and the cutting element is made of metal; a metallic glass thin film which is coated on the cutting element, and a composition of the metallic glass thin film is represented by a following formula 1 or formula 2; and a buffering layer locating between the cutting element and the metallic glass thin film, and the thickness of the buffering layer is 10 nm to 100nm, (Zr a Cu b Ni c Al d ) 100-x Si x , [formula 1] wherein 45=<a=<75, 25=<b=<35, 5=<c=<15, 5=<d=<15, 0.1=<x=<10, (Zr e Cu f Ag g Al h ) 100-y Si y , [formula 2] 35=<e=<55, 35=<f=<55, 5=<g=<15, 5=<h=<15, 0.1=<y=<10. 2. The cutting tool having an MGTF coated thereon as claimed in claim 1 , wherein a blade sharpness index (BSI) of the cutting tool is 0.2 to 0.28. 3. The cutting tool having an MGTF coated thereon as claimed in claim 2 , wherein when the composition of the metallic glass thin film is represented by the formula 1, the blade sharpness index of the cutting tool is 0.23 to 0.28. 4. The cutting tool having an MGTF coated thereon as claimed in claim 2 , wherein when the composition of the metallic glass thin film is represented by the formula 2, the blade sharpness index of the cutting tool is 0.2-0.25. 5. The cutting tool having an MGTF coated thereon as claimed in claim 1 , wherein the thickness of the metallic glass thin film is 100 nm to 500 nm. 6. The cutting tool having an MGTF coated thereon as claimed in claim 1 , wherein the cutting tool is a knife, a. saw, a blade, or a. cutter wheel. 7. The cutting tool having an MGTF coated thereon as claimed in claim 1 , wherein the cutting tool has a hardness of 700 Hv to 800 Hv. 8. The cutting tool having an MGTF coated thereon as claimed in claim 7 , wherein the cutting tool has a hardness of 700 Hv to 750 Hv. 9. A method of forming a metallic glass thin film (MGTF) on a cutting element, which comprises steps: (A) providing a metallic glass target, and a composition of the metallic glass target is represented by a following formula 1 or formula 2; and (B) sputtering to form the metallic glass thin film on a surface of the cutting ent by using the metallic glass target as a cathode; (Zr a Cu b Ni c Al d ) 100-x Si x , [formula 1] wherein 45=<a=<75, 25=<b=<35, 5=<c=<15, 5=<d=<15, 0.1=<x=<10, (Zr e Cu f Ag g Al h ) 100-y Si y , [formula 2] 35=<e=<55, 35=<f=<55, 5=<g=<15, 5=<h=<15, 0.1=<y=<10. 10. The method of forming an MGTF on a cutting element as claimed in claim 9 , wherein the metallic glass target is provided by the following steps: (A1) melting and mixing raw materials in a composition according to the formula 1 or the formula 2 and forming an ingot from the mixture; (A2) vacuum suction casting the ingot and cooling to form a sheet; and (A3) reprocessing the sheet to form the metallic glass target. 11. The method of forming an MGTF on a cutting element as claimed in claim 10 , wherein the cooling in the step (A2) is rapid cooling. 12. The method of forming an MGTF on a cutting element as claimed in claim 9 , wherein in the step (B), the thickness of the metallic glass thin film is 100 nm to 500 nm. 13. The method of forming an MGTF on a cutting element as claimed in claim 9 , wherein in the step (B), the sputtering is performed with a gas pressure of 1×10 −4 Pa to 1×10 −2 Pa. 14. The method of forming an MGTF on a cutting element as claimed in claim 9 , wherein in the step (B), the sputtering is performed in an inert gas or nitrogen gas atmosphere. 15. A metallic glass cutting tool, which comprises: a cutting element having a sharpened portion, the cutting element is made of a metallic glass, and a composition of the metallic glass is represented by a following formula 2; (Zr e Cu f Ag g Al h ) 100-y Si y , [formula 2] 35=<e=<55, 35=<f=<55, 5=<g=<15, 5=<h=<15, 0.1=<y=<10. 16. The metallic glass cutting tool as claimed in claim 15 , wherein the hardness of the cutting element is 500 Hv to 600 Hv. 17. The metallic glass cutting tool as claimed in claim 16 , wherein the hardness of the cutting element is 500 Hv to 550 Hv. 18. The metallic glass cutting tool as claim in claim 15 , wherein the blade sharpness index (BSI) of the cutting tool is 0.25 to 0.30. 19. The metallic glass cutting tool as claimed in claim 15 , wherein the cutting tool is a knife, a saw, a blade, or a cutter wheel. 20. A method of providing the metallic glass cutting tool of claim 15 , which comprises: (A) melting and mixing raw materials in a composition according to the formula 2 and forming an ingot from the mixture; (B) vacuum suction casting the ingot and rapid cooling to form a metallic glass sheet; and (C) reprocessing the metallic glass sheet to provide a cutting element having a sharpened portion, (Zr e Cu f Ag g Al h ) 100-y Si y , [formula 2] 35=<e=<55, 35=<f=<55, 5=<g=<15, 5=<h=<15, 0.1=<y=<10. 21. The method of providing a metallic glass cutting tool as claimed, in claim 20 , wherein in the step (C), the metallic glass sheet is reprocessed by cutting to provide the cutting element.
Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title
Alternative base metals from diverse categories · CPC title
all layers being exclusively metallic {(making layered metal workpieces by pressure cladding B23K20/22; making coatings with a metallic material characterised by its composition C23C30/00)} · CPC title
Refractory [Group IVB, VB, or VIB] metal-base component · CPC title
Disc type · CPC title
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