Target for arc processes

Patent metadata

Field	Value
Publication number	US-9334558-B2
Application number	US-201113880514-A
Country	US
Kind code	B2
Filing date	Oct 18, 2011
Priority date	Oct 22, 2010
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

A target for the deposition of mixed crystal layers with at least two different metals on a substrate by means of arc vapor deposition (arc PVD), wherein the target includes at least two different metals. To produce mixed crystal layers which are as free as possible of macroparticles (droplets) according to the invention at least the metal with the lowest melting point is present in the target in a ceramic compound, namely as a metal oxide, metal carbide, metal nitride, metal carbonitride, metal oxynitride, metal oxycarbide, metal oxycarbonitride, metal boride, metal boronitride, metal borocarbide, metal borocarbonitride, metal borooxynitride, metal borooxocarbide, metal borooxocarbonitride, metal oxoboronitride, metal silicate or mixture thereof, and at least one metal different from the metal with the lowest melting point is present in the target in elemental (metallic) form.

First claim

The invention claimed is:

1. A target for the deposition of mixed crystal layers with at least two different metals on a substrate by means of arc vapor deposition (arc PVD), wherein the target includes at least two different metals, wherein at least the metal with the lowest melting point is present in the target in a ceramic compound, and wherein at least one metal different from the metal with the lowest melting point is present in the target in elemental (metallic) form.

2. A target according to claim 1 , wherein the at least two different metals in the target are selected from the group consisting of the elements scandium, yttrium, titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, manganese, iron, lithium, boron, aluminum, tin and silicon.

3. A target according to claim 2 , wherein the metals in the target are at least aluminum and chromium.

4. A target according to claim 3 , wherein the metals in the target are only aluminum and chromium.

5. A target according to claim 2 , wherein the ceramic compound is a metal oxide, metal carbide, metal nitride, metal carbonitride, metal oxynitride, metal oxycarbide, metal oxycarbonitride, metal boride, metal boronitride, metal borocarbide, metal borocarbonitride, metal borooxynitride, metal borooxocarbide, metal borooxocarbonitride, metal oxoboronitride, metal silicate or mixture thereof.

6. A target according to claim 1 , wherein the metal with the lowest melting point is present in the target as a metal oxide, metal carbide or metal nitride.

7. A target according to claim 1 , wherein the metal with the lowest melting point has a melting point of less than 1500° C.

8. A target according to claim 7 , wherein the metal with the lowest melting point has a melting point of less than 1000° C.

9. A target according to claim 8 , wherein the metal with the lowest melting point has a melting point of less than 700° C.

10. A target according to claim 1 , wherein ceramic compound in which the metal with the lowest melting point is present in the target has a melting point of at least 1200° C. and/or a melting point which is at least 400° C. higher than that of the pure metal with the lowest melting point.

11. A target according to claim 1 , wherein the metal present in the target in a ceramic compound with the lowest melting point is present in the target in an amount of between 2 and 99 atomic %.

12. A target according to claim 11 , wherein the metal present in the target in a ceramic compound with the lowest melting point is present in the target in an amount of between 5 and 90 atomic %.

13. A target according to claim 12 , wherein the metal present in the target in a ceramic compound with the lowest melting point is present in the target in an amount of between 10 and 80 atomic %.

14. A target according to claim 13 , wherein the metal present in the target in a ceramic compound with the lowest melting point is present in the target in an amount of between 30 and 60 atomic %.

15. A target according to claim 1 , wherein the at least one metal different from the metal with the lowest melting point is also present in the target, besides the elemental (metallic) form, in a proportion of up to 10 atomic % with respect to the respective metal, in a ceramic compound.

16. A target according to claim 15 , wherein the at least one metal different from the metal with the lowest melting point is also present in the target, besides the elemental (metallic) form, in a proportion of up to 20 atomic % with respect to the respective metal, in a ceramic compound.

17. A target according to claim 16 , wherein the at least one metal different from the metal with the lowest melting point is also present in the target, besides the elemental (metallic) form, in a proportion of up to 60 atomic % with respect to the respective metal, in a ceramic compound.

18. A target according to claim 17 , wherein the at least one metal different from the metal with the lowest melting point is also present in the target, besides the elemental (metallic) form, in a proportion of up to 70 atomic % with respect to the respective metal, in a ceramic compound.

19. A target according to claim 15 , wherein the ceramic compound is a metal oxide, metal carbide, metal nitride, metal carbonitride, metal oxynitride, metal oxycarbide, metal oxycarbonitride, metal boride, metal boronitride, metal borocarbide, metal borocarbonitride, metal borooxynitride, metal borooxocarbide, metal borooxocarbonitride, metal oxoboronitride, metal silicate or mixture thereof.

20. A target according to claim 1 produced by hot isostatic pressing.

21. A method of depositing mixed crystal layers with at least two different metals on a substrate by means of arc vapor deposition (arc PVD), wherein at least one target according to claim 1 is used.

22. A cutting tool comprising a substrate and a single-layer or multi-layer coating applied thereto, wherein at least one layer of the multi-layer coating is a mixed crystal layer produced with the method according to claim 21 .

23. A target according to claim 1 , wherein the ceramic compound is a metal oxide, metal carbide, metal nitride, metal carbonitride, metal oxynitride, metal oxycarbide, metal oxycarbonitride, metal boride, metal boronitride, metal borocarbide, metal borocarbonitride, metal borooxynitride, metal borooxocarbide, metal borooxocarbonitride, metal oxoboronitride, metal silicate or mixture thereof.

Assignees

• Schier Veit
• Walter Ag

Inventors

• Schier Veit

Classifications

• C04B35/117

  Composites · CPC title

• C04B35/111

  Fine ceramics · CPC title

• C04B35/56

  based on carbides {or oxycarbides (containing free metal binder C22C29/00)} · CPC title

• C04B35/58

  based on borides, nitrides, {i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides} or silicides {(containing free binder metal C22C29/00)} · CPC title

• C04B2235/402

  Aluminium · CPC title