Lithographic Apparatus, Sensor and Method
US-2015062548-A1 · Mar 5, 2015 · US
US9333532B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9333532-B2 |
| Application number | US-201113810678-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 19, 2011 |
| Priority date | Jul 27, 2010 |
| Publication date | May 10, 2016 |
| Grant date | May 10, 2016 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
The subject of the invention is a process for obtaining a material comprising a substrate provided on at least one of its faces with a permanent coating comprising at least one thin film, said process comprising the following steps: said permanent coating is deposited on at least one of the faces of said substrate; then a temporary coating is deposited directly on top of said permanent coating, said temporary coating comprising, as the layer closest to the substrate, at least one thin film soluble in a solvent, surmounted by at least one functional layer; then the substrate thus coated is subjected to a heat treatment; and then said coated substrate is treated with said solvent so as to remove said temporary coating from the surface of said substrate.
Opening claim text (preview).
The invention claimed is: 1. A process for obtaining a material comprising a substrate comprising, on a face thereof, a permanent coating comprising a thin film, the process comprising: depositing the permanent coating on a face of the substrate, to obtain a first coated substrate; then depositing a temporary coating directly on top of the permanent coating, wherein the temporary coating comprises, as a layer closest to the substrate, a thin film soluble in a solvent, surmounted by a functional layer configured to absorb laser radiation having a wavelength of between 600 and 1200 nm, thereby obtaining a second coated substrate; then heat treating the second coated substrate by rapid annealing with laser radiation having a wavelength of between 600 and 1200 nm and a surface power level greater than 20 kW/cm 2 absorbed by the functional layer, thereby improving the crystallization of a thin film of the permanent coating; and then, contacting the second coated substrate with a solvent, thereby removing the temporary coating from the surface of the substrate, and wherein the process does not comprise heating the substrate to any temperature above 100° C. 2. The process of claim 1 , wherein the substrate is a glass or glass-ceramic sheet. 3. The process of claim 2 , wherein the substrate is a glass sheet. 4. The process of claim 2 , wherein the substrate is a glass-ceramic sheet. 5. The process of claim 1 , wherein the permanent coating comprises a thin film comprising a transparent electrically conductive oxide, silver, or titanium dioxide. 6. The process of claim 1 , wherein the solvent is water-based. 7. The process of claim 6 , wherein the thin film soluble in a solvent comprises a metal halide or a metal sulfate soluble in water. 8. The process of claim 7 , wherein the water-soluble thin film comprises a metal halide. 9. The process of claim 7 , wherein the water-soluble thin film comprises a metal sulfate. 10. The process of claim 1 , wherein the permanent coating comprises a thin film comprising a transparent electrically conductive oxide. 11. The process of claim 1 , wherein the permanent coating comprises a thin film comprising silver. 12. The process of claim 1 , wherein the permanent coating comprises a thin film comprising titanium dioxide. 13. The process of claim 1 , wherein the functional layer is a metal or metal nitride layer. 14. The process of claim 1 , wherein the functional layer is a metallic titanium layer. 15. The process of claim 1 , wherein the functional layer is a graphite layer. 16. The process of claim 1 , wherein, between depositing the temporary coating and contacting the second coated substrate with a solvent, a duration of the heat treating is one second or less. 17. The process of claim 1 , wherein the permanent coating is transparent. 18. The process of claim 1 , wherein the functional layer is configured to absorb laser radiation having a wavelength of between 700 and 1200 nm, and wherein heat treating the second coated substrate by rapid annealing is with laser radiation having a wavelength of between 700 and 1200 nm and a surface power level of greater than 20 kW/cm 2 absorbed by the functional layer, thereby improving the crystallization of a thin film of the permanent coating.
at least one coating being a metal · CPC title
Partly or completely removing a coating · CPC title
Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic · CPC title
one layer at least containing a nitride, oxynitride, boronitride or carbonitride · CPC title
Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.