Impedance measurement apparatus

Patent metadata

Field	Value
Publication number	US-9329215-B2
Application number	US-201414319914-A
Country	US
Kind code	B2
Filing date	Jun 30, 2014
Priority date	Jul 29, 2013
Publication date	May 3, 2016
Grant date	May 3, 2016

Abstract

A measurement auxiliary circuit is configured to form a resonance circuit together with a detection target. An ATAC is coupled with the resonance circuit. A signal generator applies an AC probe signal V S to the resonance circuit. After the impedance measurement apparatus enters a stable state, an impedance detection unit measures a voltage at at least one node and/or a current that flows through at least one current path. The impedance detection unit detects the impedance of the detection target based on the measurement value.

First claim

What is claimed is:

1. An impedance measurement apparatus configured to measure an impedance of a detection target, the impedance measurement apparatus comprising:
a measurement auxiliary circuit configured to form a resonance circuit together with the detection target;
an automatic tuning assist circuit coupled with the resonance circuit, and comprising (i) a first terminal and a second terminal, (ii) N (N represents an integer) auxiliary capacitors, (iii) a plurality of switches, each of which is arranged between two terminals from among the first terminal, the second terminal, and terminals of the N auxiliary capacitors, and (iv) a controller configured to respectively switch each of the plurality of switches;
a signal generator configured to apply an AC probe signal to the resonance circuit; and
an impedance detection unit configured to measure a voltage at least one node and/or a current that flows through at least one current path after the impedance measurement apparatus enters a stable state, and to detect the impedance of the detection target based on the measurement value.

2. The impedance measurement apparatus according to claim 1 , wherein the impedance detection unit is configured to detect the impedance of the detection target based on a capacitor voltage that occurs across at least one auxiliary capacitor included in the automatic tuning assist circuit.

3. The impedance measurement apparatus according to claim 1 , wherein the N auxiliary capacitors include a first auxiliary capacitor,
and wherein the plurality of switches includes a first switch and a second switch,
and wherein the first switch and the first auxiliary capacitor are arranged in series between the first terminal and the second terminal,
and wherein the second switch is arranged between the first terminal and the second terminal such that it is arranged in parallel with a circuit comprising the first switch and the first auxiliary capacitor.

4. The impedance measurement apparatus according to claim 3 , wherein the N auxiliary capacitors further include a second auxiliary capacitor,
and wherein the second auxiliary capacitor is arranged between the first terminal and the second terminal such that it is arranged in series with the second switch.

5. The impedance measurement apparatus according to claim 1 , wherein the plurality of switches includes a first switch, a second switch, a third switch, and a fourth switch,
and wherein the N auxiliary capacitors include a first auxiliary capacitor,
and wherein the first switch and the second switch are arranged in series between the first terminal and the second terminal,
and wherein the third switch and the fourth switch are sequentially arranged in series between the first terminal and the second terminal such that they are arranged on a path which is in parallel with a circuit comprising the first switch and the second switch,
and wherein the first auxiliary capacitor is arranged between a connection node that connects the first switch and the second switch and a connection node that connects the third switch and the fourth switch.

6. An impedance measurement apparatus configured to measure an impedance of a detection target, the impedance measurement apparatus comprising:
a measurement auxiliary circuit configured to form a resonance circuit together with the detection target;
an automatic tuning assist circuit coupled with the resonance circuit, and comprising (i) N (N represents an integer) auxiliary capacitors, (ii) a plurality of switches configured to charge and discharge the N auxiliary capacitors using a current that flows through the resonance circuit, (iii) a controller configured to respectively switch on and off each of the plurality of switches so as to generate a capacitor voltage across both ends of each of the N auxiliary capacitors, and to apply an auxiliary voltage to the resonance circuit according to the capacitor voltages generated across the N auxiliary capacitors;
a signal generator configured to apply an AC probe signal to the resonance circuit; and
an impedance detection unit configured to measure a voltage at least one node as well as or otherwise a current that flows through at least one current path after the impedance measurement apparatus enters a stable state, and to detect the impedance of the detection target based on the measurement value.

7. The impedance measurement apparatus according to claim 6 , wherein the impedance detection unit is configured to detect the impedance of the detection target based on a capacitor voltage that occurs across at least one auxiliary capacitor.

8. An impedance measurement apparatus configured to measure an impedance of a detection target, the impedance measurement apparatus comprising:
a measurement auxiliary circuit configured to form a resonance circuit together with the detection target;
an automatic tuning assist circuit coupled with the resonance circuit, configured to inject a correction current into, or otherwise draw a correction current from, the resonance circuit, and comprising (i) a first terminal and a second terminal, (ii) N (N represents an integer) auxiliary coils, (iii) a plurality of switches arranged between two terminals from among the first terminal, the second terminal, and terminals of the N auxiliary coils, and (iv) a controller configured to respectively switch on and off each of the plurality of switches;
a signal generator configured to apply an AC probe signal to the resonance circuit; and
an impedance detection unit configured to measure a voltage at at least one node as well as or otherwise a current that flows through at least one current path after the impedance measurement apparatus enters a stable state, and to detect the impedance of the detection target based on the measurement value.

9. The impedance measurement apparatus according to claim 8 , wherein the impedance detection unit is configured to detect the impedance of the detection target based on an auxiliary current that flows through at least one auxiliary coil included in the automatic tuning assist circuit.

10. The impedance measurement apparatus according to claim 8 , wherein the plurality of switches includes a first switch and a second switch,
and wherein the N auxiliary coils include a first auxiliary coil,
and wherein the first switch and the first auxiliary coil are arranged in series between the first terminal and the second terminal,
and wherein the second switch is arranged in parallel with the first auxiliary coil.

11. The impedance measurement apparatus according to claim 8 , wherein the plurality of switches includes a first switch, a second switch, a third switch, and a fourth switch,
and wherein the N auxiliary coils include a first auxiliary coil and a second auxiliary coil,
and wherein the first switch and the first auxiliary coil are arranged in series between the first terminal and the second terminal,
and wherein the second switch is arranged in parallel with the first auxiliary coil,
and wherein the third switch and the second auxiliary coil are arranged in series between the first terminal and the second terminal,
and wherein the fourth switch is arranged in parallel with the second auxiliary coil.

12. The impedance measurement apparatus according to claim 8 , wherein the plurality of switches includes a first switch, a second switch, a third switch, and a fourth switch,
and wherein the N auxiliary coils include a first auxiliary coil,
and wherein the first switch and the second switch are arranged in series between the first terminal and the second terminal,
and wherein the third switch and the fourth switch are arranged in series betwee

Assignees

• Advantest Corp

Inventors

• Endo Yuki
• Furukawa Yasuo
• Ueda Tomoaki

Classifications

• G01R27/02 Primary

  Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant (by measuring phase angle only G01R25/00) · CPC title