Perforated-structure body, manufacturing method therefor, and measurement apparatus and measurement method

Patent metadata

Field	Value
Publication number	US-9329125-B2
Application number	US-201514668562-A
Country	US
Kind code	B2
Filing date	Mar 25, 2015
Priority date	Sep 27, 2012
Publication date	May 3, 2016
Grant date	May 3, 2016

Abstract

A perforated-structure body having a plurality of apertures that penetrate from a first main surface to a second main surface of a perforated plate. Support substrates are stacked on at least one of the first main surface and the second main surface of the perforated plate so as to define a portion through which at least one of the apertures is exposed.

First claim

The invention claimed is:

1. A perforated-structure body comprising:
a plate having a first main surface and a second main surface that opposes the first main surface, and a plurality of apertures that penetrate from the first main surface to the second main surface; and
a support substrate that is stacked on at least one of the first main surface and the second main surface of the perforated plate, the support substrate defining a portion through which at least a first aperture of the plurality of apertures is exposed and at least a second aperture of the plurality of apertures is closed.

2. The perforated-structure body according to claim 1 , wherein in a location where the support substrate is stacked on the at least one of the first main surface and the second main surface, the apertures of the plate are filled with a same material of the support substrate or the plate.

3. The perforated-structure body according to claim 1 , wherein the support substrate includes first and second support substrates that are arranged so that at least one of the plurality of apertures is interposed therebetween.

4. The perforated-structure body according to claim 3 , wherein the first support substrate and the second support substrate intersect each other.

5. The perforated-structure body according to claim 4 , wherein a plurality of each of the first support substrate and the second support substrate are provided, the plurality of first support substrates and the plurality of second support substrates intersecting each other so as to have an opening that at least one of the apertures faces.

6. The perforated-structure body according to claim 5 , wherein the plurality of first support substrates and the plurality of second support substrates orthogonally intersect each other and form a rectangular opening.

7. The perforated-structure body according to claim 4 , wherein the first support substrate and the second support substrate intersect each other diagonally.

8. The perforated-structure body according to claim 4 , wherein a corner where the first support substrate and the second support substrate intersect each other has a curved shape.

9. The perforated-structure body according to claim 3 , wherein the first and second support substrates are alternately arranged on the at least one of the first main surface and the second main surface.

10. The perforated-structure body according to claim 3 , wherein the second support substrate surrounds a periphery of the first support substrate.

11. The perforated-structure body according to claim 10 , wherein the first support substrate has an annular shape and the second support substrate has an annular shape having a larger inner dimension than the first support substrate.

12. The perforated-structure body according to claim 1 , wherein the support substrate has a triangular shape.

13. The perforated-structure body according to claim 3 , wherein the first support substrate and the second support substrate each have a triangular shape.

14. A perforated-structure body comprising:
a plate having a first main surface and a second main surface that opposes the first main surface, and a plurality of apertures that penetrate from the first main surface to the second main surface; and
a support substrate that is stacked on at least one of the first main surface and the second main surface of the perforated plate, the support substrate defining a portion through which at least one of the apertures is exposed,
wherein the support substrate has a central portion and first and second end portions that are arranged on either side of the central portion, and a thickness of the first and second end portions is smaller than a thickness of the central portion.

15. The perforated-structure body according to claim 14 , wherein a sectional shape of the support substrate in a direction that connects the first and second end portions in a thickness direction of the support member is in an arch shape.

16. A manufacturing method for manufacturing the perforated-structure body according to claim 1 , the method comprising:
preparing the plate; and
forming the support substrate on the at least one of the first main surface and the second main surface of the plate so that the first aperture is exposed through the portion of the support substrate and the second aperture is closed by the support substrate.

17. The manufacturing method for manufacturing the perforated-structure body according to claim 16 , wherein the support substrate is formed using a plating method and the support substrate is formed such that part of the support substrate is accommodated inside at least one of the apertures covered by the support substrate at the time of plating.

18. A measurement apparatus comprising:
the perforated-structure body according to claim 1 ;
an electromagnetic wave radiating apparatus that radiates electromagnetic waves onto the perforated-structure body; and
an electromagnetic wave detection unit that measures a characteristic of electromagnetic waves that have been transmitted through the perforated-structure body,
wherein a measurement target is detected based on a change in a characteristic of the electromagnetic waves caused by the measurement target arranged adjacent the first or second main surface of the perforated-structure body.

19. A measurement method comprising:
obtaining a reference value by radiating electromagnetic waves onto the perforated-structure body according to claim 1 and detecting electromagnetic waves that have been transmitted through the perforated-structure body;
arranging a measurement target adjacent the first or second main surface of the perforated-structure body;
radiating electromagnetic waves at the perforated-structure body having the measurement target and then detecting electromagnetic waves that have been transmitted through the perforated-structure body having the measurement target; and
detecting a characteristic of the measurement target based on a difference between the electromagnetic waves transmitted through the perforated-structure body having the measurement target and the reference value of the electromagnetic waves.

Assignees

• Murata Manufacturing Co

Inventors

• Kondo Takashi
• Kamba Seiji
• Hara Tetsuzo
• Suzuki Masayuki

Classifications

• G01N2201/061

  Sources · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• G01N2021/0339

  Holders for solids, powders · CPC title

• G01N21/01

  Arrangements or apparatus for facilitating the optical investigation · CPC title

• G02B5/18

  Diffraction gratings {(holographic optical elements G02B5/32, G03H; integrally combined with optical fibres G02B6/02057; for coupling light guides G02B6/34; integrally combined with optical integrated light guides G02B6/12; grating systems G02B27/44)} · CPC title