Physical quantity sensor, electronic apparatus, and moving object
US-2016340177-A1 · Nov 24, 2016 · US
US9329040B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9329040-B2 |
| Application number | US-201213608480-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 10, 2012 |
| Priority date | Sep 26, 2011 |
| Publication date | May 3, 2016 |
| Grant date | May 3, 2016 |
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A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.
Opening claim text (preview).
What is claimed is: 1. A sensor element comprising: a base part; a first arm extended from the base part and capable of drive-vibrating; a second arm extended from the base part, the second arm vibrating as a result of the drive-vibrating of the first arm; a first electrode provided on the second arm and the first electrode capable of generating a first signal with the vibration of the second arm; a second electrode provided on the second arm and the second electrode capab…
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