Laser-scribing of chemically strengthened glass

Patent metadata

Field	Value
Publication number	US-9328011-B2
Application number	US-201313910030-A
Country	US
Kind code	B2
Filing date	Jun 4, 2013
Priority date	Jun 4, 2013
Publication date	May 3, 2016
Grant date	May 3, 2016

Abstract

A method is disclosed for scribing a contained crack or vent in a chemically strengthened glass sheet. The glass has shallow surface regions under compressive stress, bounding a central region under tensile stress. The vent is formed by rapidly bulk-heating the glass, using radiation from a carbon monoxide laser, to a depth just below a surface compressive region and extending marginally into the tensile stress region then rapidly cooling the heated region with a water mist spray. The glass sheet can be subsequently divided along the vent by application of mechanical or thermal stress.

First claim

What is claimed is:

1. A method of scribing a sheet of chemically strengthened glass for subsequent separation into one or more parts, the chemically strengthened glass sheet characterized as having opposite surface zones under compressive stress, with a central zone between the surface zones being under tensile stress, the method comprising:
using a beam of laser-radiation from a carbon monoxide (CO) gas laser directed onto a surface to be scribed, and while translating the laser-radiation beam with respect to a surface of the chemically strengthened glass sheet, heating the glass sheet to a depth extending below the surface zone, and extending partially into the central zone; and
directing a coolant spray onto the surface at a predetermined distance behind the laser-radiation beam in the translation-direction thereof, thereby cooling the heated surface-zone and creating a contained crack following the translation-direction of the laser-radiation beam, the crack having a depth extending below the surface zone partially into the central zone;
and wherein the beam of laser radiation emitted from the laser has an about Gaussian intensity distribution and wherein the beam is transmitted through a sealed enclosure containing air having a predetermined controlled humidity selected to convert the Gaussian intensity distribution to a flat-top intensity distribution, wherein the beam having a flat-top intensity distribution is directed to the surface to be scribed.

2. The method of claim 1 , wherein laser-radiation beam is directed by a lens selected to provide a beam-spot of a predetermined shape on the surface to be scribed.

3. The method of claim 2 , wherein the translation-direction is in a straight line and the beam-spot has an elongated shape having a length aligned with the translation-direction.

4. The method of claim 2 , wherein the translation-direction is along an arcuate path and the beam-spot has a round shape.

5. The method of claim 4 , wherein the coolant spray is an annular spray surrounding the laser-radiation beam and leaving an air gap between the spray and the beam.

6. The method of claim 5 , wherein gas is forced between the annular coolant spray and the laser-radiation beam for preventing incursion of the coolant spray into the laser beam.

7. The method of claim 2 , wherein the lens focuses the beam on the surface.

8. The method of claim 2 , wherein the lens focuses the beam above the surface.

9. The method of claim 1 , wherein the beam path outside the controlled-humidity enclosure is purged with dry nitrogen.

10. The method of claim 1 , further including the steps forming a linear defect in the defect extending in a direction transverse to the translation-direction of the laser-radiation beam, and initiating the translation of the laser-radiation beam at a point behind the linear defect in the translation-direction for forming the contained surface crack.

11. The method of claim 10 , wherein the linear defect has a depth extending through the surface compressive-stress zone of the chemically strengthened glass sheet and partially into the central tensile-stress zone of the chemically strengthened glass sheet.

12. The method of claim 11 , wherein the contained crack formed by the translation of the heating the glass sheet and directing of coolant spray onto the surface has a depth about equal to the depth of the linear defect.

13. The method of claim 12 , wherein the linear defect is formed by the steps of, creating a contained region of surface laser damage using the directed laser-radiation beam, and propagating the linear defect from the controlled damage region by heating the surface-zone using the laser-radiation beam, then subsequently cooling the heated surface zone using the coolant spray, while translating the laser-radiation beam and the coolant spray in a direction transverse to the translation-direction used for forming the contained surface crack.

14. The method of claim 1 , wherein the laser-radiation beam has one or more wavelengths in a range between about 4 micrometers and about 6 micrometers.

15. A method of scribing a sheet of chemically strengthened glass for subsequent separation into one or more parts, the chemically strengthened glass sheet characterized as having opposite surface zones under compressive stress, with a central zone between the surface zones being under tensile stress, the method comprising:
creating a linear defect in a surface of the chemically strengthened glass sheet to be scribed, the linear extending in a first direction; then
using a beam of laser-radiation from a carbon monoxide (CO) gas laser directed onto the surface to be scribed, and while translating the laser-radiation beam with respect to the surface of the chemically strengthened glass sheet in a second direction transverse to the first direction along a path crossing the linear defect, heating the glass sheet to a depth extending below the surface zone, and extending partially into the central zone; and
directing a coolant spray onto the surface at a predetermined distance behind the laser-radiation beam in the translation-direction, thereby creating a contained crack following the translation-direction of the laser-radiation beam, the crack having a depth extending below the surface zone partially into the central zone and wherein the linear defect is formed by the steps of, initially creating a contained region of surface laser-damage using the directed laser-radiation beam, and propagating the linear defect from the controlled damage region by heating the surface-zone using the laser-radiation beam, then subsequently cooling the heated surface zone using the coolant spray, while translating the laser-radiation beam and the coolant spray in the first direction.

16. The method of claim 15 , wherein the laser-radiation beam has one or more wavelengths in a range between about 4 micrometers and about 6 micrometers.

17. The method of claim 15 , wherein laser-radiation beam is directed by a lens selected to provide a beam-spot of a predetermined shape on the surface to be scribed.

18. The method of claim 17 , wherein the translation-direction is in a straight line and the beam-spot has an elongated shape having a length aligned with the translation-direction.

19. The method of claim 17 , wherein the translation-direction is along an arcuate path and the beam-spot has a round shape.

20. The method of claim 15 , wherein the beam of laser-radiation directed onto the surface has a flat-top intensity distribution.

21. The method of claim 20 , wherein the beam of laser radiation from the laser has an about Gaussian intensity distribution and the flat-top intensity distribution of the laser-radiation beam on the surface is caused by propagating the Gaussian-intensity-distribution laser radiation beam through an enclosure of a predetermined length containing air having a predetermined controlled humidity.

Assignees

• Coherent Inc

Inventors

• Washko Jr John F
• Li Xinghua
• Bosenberg Walter R

Classifications

• C03B33/04

  Cutting or splitting in curves, especially for making spectacle lenses · CPC title

• B23K26/147

  Features outside the nozzle for feeding the fluid stream towards the workpiece · CPC title

• C03B33/091 Primary

  using at least one focussed radiation beam, e.g. laser beam (C03B33/0955 takes precedence) · CPC title

• B23K26/128

  Laser beam path enclosures · CPC title

• B23K26/142

  for the removal of by-products · CPC title